This invention relates to a Cu-BTC MOF which is water stable. The Cu-BTC MOF has open coordination sites and has been post synthesis modified by partially occupying the open sites with a ligand such as acetonitrile (CH.sub.3CN). The resultant MOF retains at least 40% of its as synthesized surface area after exposure to liquid water at 60 C. for 6 hours. This is an unexpected result versus the MOF which has not been post treated with ligands such as acetonitrile. This MOF can be used to abate contaminants such as ammonia in gas streams and especially air streams.

The present invention relates to a pre-hydrotreatment and purification method for waste lubricating oil, the method comprising the following steps: mechanical impurities are removed from waste lubricating oil, and then the oil is subjected to flash distillation to separate free water and a portion of light hydrocarbons; a bottom product of the flash distillation column is mixed with hydrogen and a self-sulfurizing oil-soluble transition metal catalyst, and then enters a slurry bed reactor for pre-hydrotreatment; a gas product obtained by performing separation on a reaction effluent is subjected to adsorption purification and then enters a hydrogen recycle compressor for cyclic use; a liquid product obtained by performing separation on a reaction effluent is subjected to hydrocyclone separation and solvent washing to remove solid residue, and finally a purified lubricating oil component is obtained. The method of the present invention has such advantages as simple processing procedures, a high non-ideal component conversion rate, a high oil liquid yield, and good quality. In addition, the oil-soluble catalyst features simple dispersion, no need for vulcanization, a small catalyst adding amount, high low-temperature hydrogenation activity, and is capable of effectively preventing the coking that could occur during a process of preheating the waste lubricating oil, markedly extending the operational lifespan of a waste lubricating oil hydrogen treatment device.

The invention relates to a method for purifying a gaseous, liquid or aerosol composition, containing at least one pollutant consisting of a volatile inorganic compound (VIC), a siloxane and/or a functional volatile organic compound (Pollution Trap Concept or P.T.C. System).

Embodiments disclosed herein include an abatement system for abating compounds produced in semiconductor processes. The abatement system includes an exhaust cooling apparatus located downstream of a plasma source. The exhaust cooling apparatus includes a plate and a cooling plate disposed downstream of the plate. During operation, materials collected on the plate react with cleaning radicals to form a gas. The temperature of the plate is higher than the temperature of the cooling plate in order to improve the reaction rate of the reaction of the cleaning radicals and the materials on the plate.

A method for the destruction of a target gas, the method including: a) compressing at a first pressure a mixture of air and target gas to produce a compressed target gas mixture; b) destroying the target gas by combusting the compressed target gas mixture with diesel fuel in a forced-induction internal combustion engine, at a combustion pressure greater than the first pressure in the turbocharger, to produce an oxidised exhaust gas, the combustion occurring while maintaining a load on the diesel engine with a load bank; and c) processing the oxidised exhaust gas to produce a vent gas for venting to atmosphere where the vent gas includes substantially no target gas.

Implementations of the present disclosure relate to methods and systems for abating F-gases present in the effluent of semiconductor manufacturing processes. In one implementation, a method for abating effluent exiting a processing chamber is provided. The method begins by flowing an effluent from a processing chamber into a plasma source, wherein the effluent comprises one or more F-gases. The method further includes delivering at least one abating reagent to the plasma source, the abating reagent comprising at least one of water vapor and oxygen-containing gas, at operation. The method further includes activating the effluent and the abating reagent in the presence of a plasma to convert the one or more F-gases in the effluent and the abating reagent to an abated material.

A gas chamber supply system includes a gas source configured to fluidly connect to a gas chamber and to supply a gas mixture to the gas chamber, the gas source including: a pre-prepared gas supply including a gas mixture, the gas mixture including a plurality of gas components and lacking a halogen; a recycled gas supply including the gas mixture; and a fluid flow switch connected to the pre-prepared gas supply and to the recycled gas supply. The gas chamber supply also includes a control system configured to: determine if the relative concentration between the gas components within the recycled gas supply is within an acceptable range; and provide a signal to the fluid flow switch to thereby select one of the pre-prepared gas supply and the recycled gas supply to as the gas source based on the determination.

A gas recycle system includes a gas purifier system; a gas analysis system; a gas blending system that prepares a recycled gas mixture; and a control system configured to: determine whether a measured amount of at least one intended gas component is within a first range of acceptable values; and determine whether a measured amount of the at least one impurity gas component is within a second range of acceptable values. If the measured amount of the at least one intended gas component is not within the first range of acceptable values, the control system causes the gas blending system to add an additional gas component to the purified gas mixture to prepare the recycled gas mixture; and if the measured amount of the at least one impurity gas is not within the second range of acceptable values, the control system generates an error signal.

Polymeric sorbents for reactive gases are provided. More particularly, the polymeric sorbents are a reaction product of a divinylbenzene/maleic anhydride precursor polymeric material with a nitrogen-containing compound. The polymeric sorbent has nitrogen-containing groups that are covalently attached to the polymeric sorbent. The nitrogen-containing groups include a primary amino group, a secondary amino group, a tertiary amino group, or a combination thereof. Additionally, methods of sorbing reactive gases on the polymeric sorbents and compositions resulting from the sorption of reactive gases on the polymeric sorbents are provided.

In a first aspect, the disclosure provides a method for removing a component from a gas stream. A carrier gas stream is cooled by direct contact with a dehydrating solution stream. The dehydrating solution stream removes a portion of water present in the carrier gas stream and produces a dry gas stream and a wet solution stream. A portion of the component is removed from the dry gas stream by direct contact with a cold contact liquid stream. A depleted gas stream and a slurry stream are produced. Removing the portion of the component may include desublimating, freezing, condensing, depositing, or a combination thereof of the portion of the component out of the dry gas stream as a solid product. The slurry stream may include the solid product and a contact liquid. The solid product is separated from the contact liquid, producing a substantially pure solid product stream and the cold contact liquid stream.