Copper sorbents which are resistant to the reduction by hydrogen are used as a guard bed for an acetylene conversion zone. The adsorbents include cuprous oxide, cupric oxide, copper metal, and a halide and are pre-reduced prior to be loaded into the guard bed. The sorbents can remove contaminants that would poison selective hydrogenation catalysts used for a selectively hydrogenating acetylenic compounds in an olefin stream. The sorbents may also selectively hydrogenate the acetylenic compounds.

A hydrogen gas recovery system according to the present ingestion is configured by a condensation and separation apparatus (A) that condenses and separates chlorosilanes from a hydrogen-containing reaction exhaust gas exhausted from a polycrystalline silicon production step, a compression apparatus (B) that compresses the hydrogen-containing reaction exhaust gas, an absorption apparatus (C) that absorbs and separates hydrogen chloride by contacting the hydrogen-containing reaction exhaust gas with an absorption liquid, a first adsorption apparatus (D) comprising an adsorption column filled with activated carbon for adsorbing and removing methane, hydrogen chloride, and part of the chlorosilanes each contained in the hydrogen-containing reaction exhaust gas, a second adsorption apparatus (E) comprising an adsorption column filled with synthetic zeolite that adsorbs and removes methane contained in the hydrogen-containing reaction exhaust gas, and a gas line (F) that recovers a purified hydrogen gas having a reduced concentration of methane.

Copper adsorbents which are resistant to the reduction by the components of the synthesis gas at normal operation conditions. The adsorbents are produced by admixing small amounts of an inorganic halide, such as NaCl, to the basic copper carbonate precursor followed by calcination at a temperature sufficient to decompose the carbonate. The introduction of the halide can be also achieved during the forming stage of adsorbent preparation. These reduction resistant copper oxides can be in the form of composites with alumina and are especially useful for purification of synthesis gas and the removal of mercury, arsine, phosphine, as well as hydrogen sulfide.

The present invention provides a method for separating high purity methane gas from biogas, which comprises the steps of: compressing and cooling biogas (step 1); and separating carbon dioxide by introducing the biogas compressed and cooled in step 1 into a four-stage polymer separation membrane system in which the residue stream of the first polymer separation membrane is connected to the second polymer separation membrane, the residue stream of the second polymer separation membrane is connected to the third polymer separation membrane, and the permeate stream of the second polymer separation membrane is connected to the fourth polymer separation membrane (step 2).

Venturi Scrubbers are used to separate particulate from a large range of fluids. Many provide additional liquid and/or gas to drive the fluid and aid in the removal of particulate. The present invention provides a liquid ring pump through which the fluid to be treated is first passed and then exhausted, with additional work fluid to a Venturi scrubber such that the particulate can be separated from the exhaust fluid.

An inlet assembly for a an abatement burner includes: an inlet conduit operable to convey an effluent gas stream to be treated from an inlet aperture via a bore to an outlet aperture for treatment; and a lance conduit operable to convey a fuel gas from a gas inlet aperture via a gas bore to a gas outlet aperture positioned within the bore for mixing with the effluent gas stream, a cross-sectional area of the gas bore increasing towards the gas outlet aperture. In this way, the expansion caused by the increasing cross-sectional area of the gas bore enhances the mixing of the fuel gas with the effluent gas stream which provides for improved destruction and removal efficiencies (DRE), which enables the inlet assembly to be operated with reduced quantities of fuel gas, while still maintaining required levels of DRE.

A vacuum pump with abatement function is used for evacuating a chamber of a manufacturing apparatus. The vacuum pump with abatement function includes a vacuum pump having a discharge port to which one or more abatement parts for treating an exhaust gas discharged from the vacuum pump to make the exhaust gas harmless are attached. The one or more abatement parts are selected, depending on the amount and kind of the exhaust gas discharged from the vacuum pump, from plural kinds of abatement parts which have different treatment types of exhaust gas and/or different treatment amounts of exhaust gas.

A system to abate an emission stream from a semiconductor manufacturing process is disclosed. The system includes a plurality of sections configured to pass an emission stream therethrough. The sections include a metal oxide media section to remove a hydride from the emission stream; a desiccate media section downstream to the metal oxide media section to remove moisture from the emission stream; and a catalytic media section downstream to the desiccate media section to remove a nitrogen oxide (NO.sub.x) from the emission stream. The abatement system provides carbon-free abatement of nitrogen oxide and hydride(s). The abatement system has significantly lower cost to manufacture and operate.

An air separation system includes an air separation module configured to receive feed air and separate the feed air into nitrogen-enriched air and oxygen-enriched air, a nitrogen-enriched air line for transporting the nitrogen-enriched air from the air separation module to a fuel tank for inerting, an oxygen sensing line connected to the nitrogen-enriched air line, a gas adsorption filter located in the oxygen sensing line, and an oxygen sensor downstream of the gas adsorption filter in the oxygen sensing line.

An air intake system for directing intake air to an internal combustion engine of a machine is disclosed. The air intake system may comprise an air compressor configured to increase a pressure of the intake air, and a membrane unit downstream of the air compressor and having a membrane with selectivity for siloxanes. The membrane may have a first side and a second side, and the first side may be exposed to a higher pressure than the second side when the air compressor is operating. The membrane may be configured to separate the intake air into a permeate that traverses the membrane from the first side to the second side, and a retenate that remains on the first side. The permeate may have a higher siloxane content than the retenate. The retenate may be directed to the internal combustion engine for combustion.