A method for providing upgraded biogas includes feeding a stream of biogas into a biogas upgrading system in order to remove carbon dioxide from the stream of biogas. The biogas upgrading system, which may be based on absorption, adsorption, membrane permeation, and/or cryogenics, provides a stream of upgraded biogas and a tail gas stream. The tail gas stream, which may be CO.sub.2-rich, is enriched with natural gas so that it is combustible in medium-BTU equipment. The upgraded biogas is used for transportation use and/or the generation of fuel credits. Accordingly, both the tail gas and the upgraded biogas are used effectively and at lower cost.

A vacuum pump with abatement function is used for evacuating a chamber of a manufacturing apparatus. The vacuum pump with abatement function includes a vacuum pump having a discharge port to which one or more abatement parts for treating an exhaust gas discharged from the vacuum pump to make the exhaust gas harmless are attached. The one or more abatement parts are selected, depending on the amount and kind of the exhaust gas discharged from the vacuum pump, from plural kinds of abatement parts which have different treatment types of exhaust gas and/or different treatment amounts of exhaust gas.

A method for providing upgraded biogas includes feeding a stream of biogas into a biogas upgrading system in order to remove carbon dioxide from the stream of biogas. The biogas upgrading system, which may be based on absorption, adsorption, membrane permeation, and/or cryogenics, provides a stream of upgraded biogas and a tail gas stream. The tail gas stream, which may be CO.sub.2-rich, is enriched with natural gas so that it is combustible in medium-BTU equipment. The upgraded biogas is used for transportation use and/or the generation of fuel credits. Accordingly, both the tail gas and the upgraded biogas are used effectively and at lower cost.

This present disclosure relates to processes for removing contaminants from hydrocarbon streams, e.g. removing chlorides, CO.sub.2, COS, H.sub.2S, AsH.sub.3, methanol, mercaptans and other S- or O-containing organic compounds from olefins, paraffins, aromatics, naphthenes and other hydrocarbon streams. The process involves contacting the stream with an adsorbent which comprises a zeolite, an alumina component and a metal component e.g. sodium, in an amount at least 30% of the zeolite's ion exchange capacity.

Provided is an abatement device that reduces an amount of drainage of circulating water. The abatement device lowers an average drainage flow of circulating water to a low flow, when a ratio of a concentration of silicon dioxide within the circulating water and a concentration of hydrogen fluoride within the circulating water is greater than or equal to a predetermined value at which hydrofluorosilicic acid can be produced, and raises the average drainage flow of the circulating water to a high flow higher than the low flow, when the ratio of the concentration of silicon dioxide within the circulating water and the concentration of hydrogen fluoride within the circulating water is less than the predetermined value.

A plasma abatement process for abating effluent containing compounds from a processing chamber is described. A plasma abatement process takes gaseous foreline effluent from a processing chamber, such as a deposition chamber, and reacts the effluent within a plasma chamber placed in the foreline path. The plasma dissociates the compounds within the effluent, converting the effluent into more benign compounds. Abating reagents may assist in the abating of the compounds. The abatement process may be a volatizing or a condensing abatement process. Representative volatilizing abating reagents include, for example, CH.sub.4, H.sub.2O, H.sub.2, NF.sub.3, SF.sub.6, F.sub.2, HCl, HF, Cl.sub.2, and HBr. Representative condensing abating reagents include, for example, H.sub.2, H.sub.2O, O.sub.2, N.sub.2, O.sub.3, CO, CO.sub.2, NH.sub.3, N.sub.2O, CH.sub.4, and combinations thereof.

The present invention provides a method for separating high purity methane gas from biogas, which comprises the steps of: compressing and cooling biogas (step 1); and separating carbon dioxide by introducing the biogas compressed and cooled in step 1 into a four-stage polymer separation membrane system in which the residue stream of the first polymer separation membrane is connected to the second polymer separation membrane, the residue stream of the second polymer separation membrane is connected to the third polymer separation membrane, and the permeate stream of the second polymer separation membrane is connected to the fourth polymer separation membrane (step 2).

A plasma abatement process for abating effluent containing compounds from a processing chamber is described. A plasma abatement process takes gaseous foreline effluent from a processing chamber, such as a deposition chamber, and reacts the effluent within a plasma chamber placed in the foreline path. The plasma dissociates the compounds within the effluent, converting the effluent into more benign compounds. Abating reagents may assist in the abating of the compounds. The abatement process may be a volatizing or a condensing abatement process. Representative volatilizing abating reagents include, for example, CH.sub.4, H.sub.2O, H.sub.2, NF.sub.3, SF.sub.6, F.sub.2, HCl, HF, Cl.sub.2, and HBr. Representative condensing abating reagents include, for example, H.sub.2, H.sub.2O, O.sub.2, N.sub.2, O.sub.3, CO, CO.sub.2, NH.sub.3, N.sub.2O, CH.sub.4, and combinations thereof.

Embodiments disclosed herein include a method for abating compounds produced in semiconductor processes. The method includes energizing an abating agent, forming a composition by reacting the energized abating agent with gases exiting a vacuum processing chamber, and flowing the composition through a plurality of holes formed in a cooling plate. By cooling the composition with the cooling plate, damages on the downstream pump are avoided.

A particulate and siloxane filtration system may include a housing and a filter media assembly. The filter media assembly may be disposed within the housing and positioned to filter intake gases to an internal combustion engine. The filter media assembly may include a particulate media configured to remove particulates from the intake gases and a siloxane media configured to remove siloxanes from the intake gases.