A process gas suction structure for preventing a generation of products from a process gas due to a temperature drop is disclosed. The process gas suction structure includes a double tube structure, and a heating device configured to heat the double tube structure. The double tube structure includes a process-gas flow passage portion where the process gas flows, and a partition portion arranged outside of the process-gas flow passage portion.

A vacuum pump includes a vacuum pump having a discharge port to which an abatement part for treating an exhaust gas discharged from the vacuum pump to make the exhaust gas harmless is attached. The vacuum pump includes a cylindrical member having an exhaust gas introduction port for introducing the exhaust gas to be treated and a gas outlet port for discharging gases which have been treated, a plurality of fuel nozzles provided at a circumferential wall of the cylindrical member for ejecting a fuel, and a plurality of air nozzles provided at the circumferential wall of the cylindrical member for ejecting air so as to form a swirling flow of air along an inner circumferential surface of the circumferential wall. The air nozzles are disposed at a plurality of stages spaced in an axial direction of the cylindrical member.

A system for chemical vapor densification includes a reaction chamber having an inlet and outlet; a trap; a conduit fluidly coupled between the outlet of the reaction chamber and the trap; a cryogenic cooler fluidly coupled to the trap though a frustoconical conduit; a first exit path from the cryogenic cooler that vents hydrogen gas to an exhaust; and a second exit path from the cryogenic cooler that recirculates silane and hydrocarbon-rich gas back to the inlet of the reaction chamber—and a related method places a substrate in the reaction chamber; establishes a sub-atmospheric pressure inert gas atmosphere within the reaction chamber; densifies the substrate by inputting virgin gas into the reaction chamber; withdraws effluent gas from the reaction chamber; extracts silane and hydrocarbon-rich gas from the effluent gas; and recirculates the silane and hydrocarbon-rich gas back to the reaction chamber.

The invention relates to a method for preparing a solid comprising the mixture of a set of compounds comprising at least one Cu.sub.2(OH).sub.2CO.sub.3 powder, one metal oxide powder selected from the group of metals consisting of copper, zinc, iron, manganese and mixtures thereof, and at least one binder as well as the use of the solid prepared by means of this method.

The present invention discloses a preparation method of a catalyst with white carbon black modified by Zr—Nd—O and use thereof, and belongs to the field of catalyst technologies. In the present invention, an organic solvent evaporation induced self-assembly method is used to load Zr—Nd—O onto white carbon black to obtain a mesoporous Zr—Nd—O/white carbon black catalyst. The mesoporous Zr—Nd—O/white carbon black catalyst in the present invention has high catalytic activity, contains uniformly distributed mesopores with a relatively large average aperture, and has a simple preparation process, etc.

A method of obtaining helium from a process gas. The process gas is at a pressure less than 15 bar to a first membrane separation stage having a first membrane more readily permeable for helium than for at least one other component in the process gas. A first retentate stream is fed to a second membrane separation stage having a second membrane more readily permeable for helium than for at least one other component in the process gas. Helium is separated from a first helium-containing permeate stream using a pressure swing adsorption to obtain a helium-containing product stream. A second helium-containing permeate stream is recycled to the first membrane separation stage. A purge gas from the pressure swing adsorption is also recycled to the first membrane separation stage.

The present disclosure relates to the technical field of industrial waste gas purification, in particular to a core-shell structured catalyst, a preparation method and use thereof. The present disclosure provides a core-shell structured catalyst including a metal oxide-molecular sieve as a core and porous silica (SiO.sub.2) as a shell, where the metal oxide-molecular sieve includes a molecular sieve and a metal oxide loaded on the molecular sieve, the metal oxide includes an oxide of a first metal and an oxide of a second metal, the first metal is Fe, Cu, Ti, Ni or Mn, and the second metal is Ce or La. The core-shell structured catalyst of the present disclosure can enable effective removal of HCN and AsH.sub.3 at the same time with a stable effect, and no secondary pollution.

A detoxifying device 100 having an inner wall 104 that forms a flow passage 103 through which treatment gas flows includes a first piping 130 that forms a part of the flow passage 103, a replaceable piping section 170 that forms a part of the flow passage 103 at the position downstream of the first piping 130, and is connected thereto for sprinkling the cleaning water to remove the solid product adhering to the inner wall 104, and a second piping 150 that forms a part of the flow passage 103 at the position downstream of the piping section 170, and is connected thereto.

Methods of filtering a feed comprising a liquid or a gas for or during the production of electronics, nanosystems or ultrapure water include filtering said feed using at least one filter assembly, wherein said at least one filter assembly includes at least one isoporous block copolymer filtration membrane.

A process gas suction structure for preventing a generation of products from a process gas due to a temperature drop is disclosed. The process gas suction structure includes a double tube structure, and a heating device configured to heat the double tube structure. The double tube structure includes a process-gas flow passage portion where the process gas flows, and a partition portion arranged outside of the process-gas flow passage portion.