A method for removing methane and non-methane volatile organic compound concentrations from a gas stream. The method includes exposing the target gas to a halogen gas and a light from a suitable light source having a wavelength sufficient to activate halogen gas to halogen radicals, wherein the halogen radicals react with the VOC in the target gas to provide the target gas with a removed concentration of VOC as well as a device including a reaction chamber for reacting the halogen radicals with the VOC in the target gas.

A nozzle for an abatement apparatus and a method are disclosed. The nozzle is for abatement apparatus operable to treat an effluent stream from a processing tool, the nozzle comprises: a nozzle body defining a nozzle inlet operable to receive the effluent stream, a nozzle outlet, and a conduit extending between the nozzle inlet and the nozzle outlet and operable to convey the effluent stream in a direction of flow from the nozzle inlet to the nozzle outlet; and an effluent stream rotator configured to impart a rotational component to the effluent stream to rotate the effluent stream around the direction of flow. In this way, the effluent stream is rotated as it passes through the nozzle body. The destruction rate efficiency achieved by an abatement apparatus when receiving such rotating effluent streams has been found to be significantly improved compared to non-rotating effluent streams.

A flue ozone distributor applied in a low-temperature oxidation denitrification technology and an arrangement manner thereof is disclosed. The flue ozone distributor comprises a distribution main pipe, multiple distribution branch pipes, Venturi distributors and delta wings. The distribution branch pipes are led out from the distribution main pipe as parallel branches. The Venturi distributors are arranged with an equal space on the distribution branch pipes. The delta wings are arranged on one diffusion segment side of the Venturi distributors. The flue ozone distributor is arranged in the flue. The technology is used in the field of denitrification for flue gas of an industrial boiler/kiln by a low-temperature ozone oxidation method. The ozone-injecting direction is consistent with a flow direction of the flue gas. A soot deposit congestion problem does not exist. A turbulent flow behavior of the flue gas and ozone is strengthened. The oxidation efficiency is improved.

The present invention provides an ohmic heating-type exhaust gas purification catalyst system. The ohmic heating-type exhaust gas purification catalyst system is configured to perform, based on information of temperature of a catalyst bed input from a temperature detector of an ohmic heating-type exhaust gas purification device, electric current pass control including controls of (1) causing an electric current to pass through a pair of electrodes when the temperature of the catalyst bed is equal to or lower than a first threshold temperature T1 set in a range of 350?25? C., (2) not causing an electric current to pass through the pair of electrodes when the temperature of the catalyst bed exceeds the first threshold temperature T1 and is equal to or lower than a second threshold temperature T2 set in a range of 450?25? C., (3) causing an electric current caused to pass through the pair of electrodes when the temperature of the catalyst bed exceeds the second threshold temperature T2 and is equal to or lower than a third threshold temperature T3 set to be equal to or higher than 550? C., and (4) not causing an electric current to pass through the pair of electrodes when the temperature of the catalyst bed exceeds the third threshold temperature T3.

A method for removing methane and non-methane volatile organic compound concentrations from a gas stream. The method includes exposing the target gas to a halogen gas and a light from a suitable light source having a wavelength sufficient to activate halogen gas to halogen radicals, wherein the halogen radicals react with the VOC in the target gas to provide the target gas with a removed concentration of VOC as well as a device including a reaction chamber for reacting the halogen radicals with the VOC in the target gas.

Methods and apparatus for treating an exhaust gas in a foreline of a substrate processing system are provided herein. In some embodiments, a method for treating an exhaust gas in an exhaust conduit of a substrate processing system includes: flowing an exhaust gas from a process chamber into a plasma source via a foreline; injecting a reagent into the foreline; forming a plasma in the plasma source from the exhaust gas and the reagent; and injecting a cleaning gas into the foreline, wherein the cleaning gas and the reagent are different gases.

A method for removing methane and non-methane volatile organic compound concentrations from a gas stream. The method includes exposing the target gas to a halogen gas and a light from a suitable light source having a wavelength sufficient to activate halogen gas to halogen radicals, wherein the halogen radicals react with the VOC in the target gas to provide the target gas with a removed concentration of VOC as well as a device including a reaction chamber for reacting the halogen radicals with the VOC in the target gas.

An exhaust purification system of an internal combustion engine comprising at least two exhaust treatment catalysts arranged in an engine exhaust passage, a hydrogen feed source, and a plurality of hydrogen feed passages for feeding hydrogen from the hydrogen feed source to the exhaust treatment catalysts. When warming up the exhaust treatment catalysts, hydrogen is fed from the hydrogen feed source through the corresponding hydrogen feed passage to the exhaust treatment catalyst with the larger rise of the exhaust removal rate when hydrogen is fed among the exhaust treatment catalysts.

A method for binding hazardous agricultural ammonia using organic carbon dioxide reduces ammonia emissions from farming operations producing livestock, such as cows, pigs, and poultry. The method entraps a quantity of agricultural ammonia within an ammonia solution by reacting the quantity of agricultural ammonia with a quantity of organic carbon dioxide within a primary reaction vessel. The quantity of agricultural ammonia is mixed with a quantity of organic carbon dioxide to form an ammonia-bound solution. The ammonia-bound solution is able to be stored or transported for use in future chemical processes.

Provided is a method for removing carbon dioxide in acidic gas and an apparatus therefor. A method for removing carbon dioxide in acidic gas includes: purifying coke oven gas to prepare acidic gas; injecting ammonia into the acidic gas and adjusting a molar ratio of carbon dioxide to ammonia in an entire mixed stream to 0.5 or more; indirectly cooling the mixed stream to form a salt; removing the salt in a form of slurry; heating the salt in the removed slurry to decompose the salt into carbon dioxide gas, ammonia gas, and water; and recovering the decomposed ammonia gas.