Through the procedures of pretreatment, temperature swing adsorption (TSA) coarse desorption, pressure swing adsorption (PSA) purification and hydrogen purification, the hydrogenous waste gas from various procedures in the manufacturing process of semiconductor (especially silicon wafer), including the off-gas from chemical vapor deposition (CVD), doping (diffusion and ion implantation), photolithography and cleaning, the combusted and washed discharged gas of the off-gas in other procedures after field treatment and centralized treatment, or the hydrogenous waste gas entering the hydrogen discharge system are purified to meet the standard for the electronic grade hydrogen required for the manufacturing process of semiconductor, the recycling of hydrogen resources is realized, and the yield of hydrogen is greater than or equal to 70-85%. The present invention solves the technical difficulty the normal-pressure waste hydrogen recovered in the manufacturing process of semiconductor can't be returned to the manufacturing process of semiconductor for reuse.

An apparatus comprising (A) an atmospheric water extraction unit; and (B) a direct air capture unit positioned downstream of and in communication with the atmospheric water extraction unit, wherein the apparatus is capable of reversibly operating in (i) adsorption mode to adsorb water and CO.sub.2 from an incoming air stream and (ii) regeneration mode to release adsorbed water and CO.sub.2, wherein the atmospheric water extraction unit comprises a first desiccant bed comprising a sorbent that adsorbs water from an incoming air stream during adsorption mode and releases water during regeneration mode, and wherein the direct air capture unit comprises a first CO.sub.2 sorbent bed that adsorbs CO.sub.2 from an air stream during adsorption mode and releases CO.sub.2 during regeneration.

The present invention and embodiments thereof provide a process to separate ethylene products from impurities such as nitrogen, hydrogen, ethane, propane and isobutane without the need for distillation processes.

An evaporative emission control canister system comprises an initial adsorbent volume having an effective incremental adsorption capacity at 25° C. of greater than 35 grams n-butane/L between vapor concentration of 5 vol % and 50 vol % n-butane, and at least one subsequent adsorbent volume having an effective incremental adsorption capacity at 25° C. of less than 35 grams n-butane/L between vapor concentration of 5 vol % and 50 vol % n-butane, an effective butane working capacity (BWC) of less than 3 g/dL, and a g-total BWC of between 2 grams and 6 grams. The evaporative emission control canister system has a two-day diurnal breathing loss (DBL) emissions of no more than 20 mg at no more than 210 liters of purge applied after the 40 g/hr butane loading step.

A portable pressure swing adsorption system and method for fuel gas conditioning. A fuel gas conditioning system includes a pressure swing adsorption (PSA) system fluidly coupled to a compressed rich gas stream, the PSA system including a plurality of adsorbent beds and configured to condition the compressed rich natural gas stream and produce therefrom a high-quality fuel gas and gaseous separated heavier hydrocarbons, a product end of the adsorbent beds fluidly coupled to a fuel gas line, and a feed end of the adsorbent beds configured to be fluidly coupled to the compressed rich natural gas stream or a raw natural gas stream, wherein the produced gaseous separated heavier hydrocarbons are desorbed at at least 50 psia and recirculated into the rich natural gas stream or the raw natural gas stream without post-desorption compression.

A system for generating hydrogen includes an ammonia decomposition bed configured to introduce an ammonia gas, decompose the ammonia gas into a high-pressure first mixed gas including nitrogen and hydrogen, and discharge the high-pressure first mixed gas; an ammonia adsorption bed supplied with the high-pressure first mixed gas from the ammonia decomposition bed, and configured to adsorb ammonia of the first mixed gas, and discharge a high-pressure second mixed gas including nitrogen and hydrogen; and a nitrogen adsorption bed directly supplied with the high-pressure second mixed gas from the ammonia adsorption bed, and configured to adsorb the nitrogen, and discharge the hydrogen.

System (2) for CO.sub.2 capture from a combustion engine (1) comprising an exhaust gas flow circuit (6) having an inlet end fluidly connected to an exhaust of the combustion engine, a heat exchanger circuit (12), a primary exhaust gas heat exchanger (H1) for transferring heat from exhaust gas to fluid in the heat exchanger circuit, at least one compressor (10) for compressing fluid in a section of the heat exchanger circuit, the compressor driven by thermal expansion of heat exchanger circuit fluid from the primary exhaust gas heat exchanger (H1), and a CO.sub.2 temperature swing adsorption (TSA) reactor (4) fluidly connected to an outlet end of the exhaust gas flow circuit. The TSA reactor includes at least an adsorption reactor unit (D4) and a desorption reactor unit (D2), the heat exchanger circuit comprising a heating section (12b) for heating the desorption unit (D2) and a cooling section (12a) for cooling the adsorption unit (D4).

System (2) for CO.sub.2 capture from a combustion engine (1) comprising an exhaust gas flow circuit (6) having an inlet end fluidly connected to an exhaust of the combustion engine, a heat exchanger circuit (12), a primary exhaust gas heat exchanger (H1) for transferring heat from exhaust gas to fluid in the heat exchanger circuit, at least one compressor (10) for compressing fluid in a section of the heat exchanger circuit, the compressor driven by thermal expansion of heat exchanger circuit fluid from the primary exhaust gas heat exchanger (H1), and a CO.sub.2 temperature swing adsorption (TSA) reactor (4) fluidly connected to an outlet end of the exhaust gas flow circuit. The TSA reactor includes at least an adsorption reactor unit (D4) and a desorption reactor unit (D2), the heat exchanger circuit comprising a heating section (12b) for heating the desorption unit (D2) and a cooling section (12a) for cooling the adsorption unit (D4).

The present invention is directed to a dryer provided with an inlet for receiving a flow of compressed gas and an outlet for providing dry air, said dryer comprising: a first and a second adsorption vessel connected in parallel, a depressurization unit connectable to the inlet flow conduit of each of said first and second adsorption vessels; whereby the dryer further comprises a flow reducer connectable to the inlet flow conduit of each of the first and second adsorption vessels and whereby said control valves are adapted to be switched in a first state, and a second state.

Disclosed in certain embodiments are methods of removing water from a gas feed stream comprising hydrocarbons and water during an adsorption step of an adsorption cycle.