A method for manufacturing a glass particle deposit according to one aspect of the present disclosure includes manufacturing the glass particle deposit by producing glass particles through a hydrolysis reaction using flame of a burner and depositing the glass particles on a target in a reaction container, and taking out the glass particle deposit from the reaction container and transporting the glass particle deposit to a clean room. Air is introduced into the clean room through a clean room filter that removes particles in the air. When the glass particle deposit is manufactured, air is introduced from a space different from the clean room into the reaction container through a reaction container filter.

Articles and methods involving filter media are generally provided. In certain embodiments, the filter media includes at least a first layer, a second layer, and an adhesive resin positioned between the first layer and the second layer. In some embodiments, the first layer may be a pre-filter layer or a support layer. The second layer may, for example, comprise fibers formed by a solution spinning process and/or may comprise fine fibers. In some embodiments, the adhesive resin may be present in a relatively low amount and/or may have a low glass transition temperature. The filter media as a whole may have one or more advantageous properties, including one or more of a high stiffness, a high bond strength between the first layer and the second layer, a high gamma, and/or a low increase in air resistance after being subjected to an IPA vapor discharge. The filter media may be, for example, a HEPA filter and/or an ULPA filter.

A biosafety containment chamber comprises a rigid frame that supports an enclosure made of a flexible, substantially transparent material, which includes at least top and side surfaces joined to provide a fully enclosed environment. A plurality of glove ports are disposed on the enclosure, each including a flexible glove that enables manipulation of items within the enclosure. The biosafety containment chamber further comprises an air supply system to draw air into the fully enclosed environment through an intake HEPA filter, and an air exhaust system to draw air from the fully enclosed environment into an external environment through an exhaust HEPA filter. The air supply system and the air exhaust system are configurable to maintain a negative pressure in the fully enclosed environment.

Cleanroom particle capture systems and cleanroom workstations utilizing the particle capture systems are disclosed. One embodiment of a particle capture system according to the present invention comprises a duct carrying a particle capture air stream. A fan is included at a first end of said duct that generates the particle capture air stream. A particle filter is also arranged at the first end of the duct with at least some of the particle capture air stream passing through the filter, wherein the particle capture airstream has a first air velocity at said filter. A blow off device provides a blow off airstream into the duct at a second end of the duct, with the blow off airstream having a second air velocity at the second end that is higher than the first air velocity. The duct has one or more intervening features to reduce the second air velocity such that it substantially matches the first air velocity when the blow off airstream reaches the filter. These particle capture systems can be arranged below the bench top in a workstation or can be arranged above or on the bench top.

A plurality of air data may be collected by a sensor within a data center. The plurality of air data is received by a processor. At least a portion of the received plurality of air data corresponding to at least one zone within the data center may be determined to satisfy a threshold. Coordinates of a geographical location associated with the zone that includes the sensor may be transmitted to a robotic filter. The robotic filter can be dispatched to the transmitted geographic location to filter the zone.

A filtering system and method for installing the system on an HVAC or computer server closet. The filtering system comprises of two horizontal rails and two vertical rails, the rails are secured together to form a rectangular structure. The rails define a channel on a front side of the rails. An air filtering screen that is placed over the front side of the rails. And, a slat that secures the air filter within the channel of the rails.

Methods and apparatus for delivering one or more gases to a process chamber are provided herein. In some embodiments a gas delivery system includes a process chamber having an inner volume; a gas source panel; a gas line coupling the inner volume to the gas source panel; and a first gas filter disposed along the gas line proximate the inner volume, wherein the first gas filter comprises a filter element body having a first end and a second end opposite the first end, and a filtration efficiency of about 1 to about 5 log reduction value (LRV).

A plurality of air data may be collected by a sensor within a data center. The plurality of air data is received by a processor. At least a portion of the received plurality of air data corresponding to at least one zone within the data center may be determined to satisfy a threshold. Coordinates of a geographical location associated with the zone that includes the sensor may be transmitted to a robotic filter. The robotic filter can be dispatched to the transmitted geographic location to filter the zone.

An air distribution system for supplying filtered air to isolator working volumes includes an inlet including a HEPA filter and an outlet including a slidably mounted sintered panel. Methods for supplying filtered air to an isolator working volume are also disclosed.

Articles and methods involving filter media are generally provided. In certain embodiments, the filter media includes at least a first layer, a second layer, and an adhesive resin positioned between the first layer and the second layer. In some embodiments, the first layer may be a pre-filter layer or a support layer. The second layer may, for example, comprise fibers formed by a solution spinning process and/or may comprise fine fibers. In some embodiments, the adhesive resin may be present in a relatively low amount and/or may have a low glass transition temperature. The filter media as a whole may have one or more advantageous properties, including one or more of a high stiffness, a high bond strength between the first layer and the second layer, a high gamma, and/or a low increase in air resistance after being subjected to an IPA vapor discharge. The filter media may be, for example, a HEPA filter and/or an ULPA filter.