A stackable air filter module includes a base gas filter unit and at least one additional gas filter unit. The base filter unit includes a metal frame and at least one first filter body located in the filter passage of the metal frame. At least one additional filter unit is detachably superposed on the base filter unit, and the additional filter unit includes a filter frame and a second filter body located in the filter passage of the filter frame. The service life of the filter material contained in the first filter body is greater than the service life of the filter material contained in the second filter body.

A reticle storage device includes a top lid having a ceiling and a cover surrounding the ceiling, and a bottom lid having a carrier and a peripheral structure surrounding the carrier. When the top lid engages with the bottom lid, a passage is defined therebetween and therefore the reticle storage device is not sealed.

The present invention generally relates to an air filter, and in particular, the present invention relates to an air filter with a porous copper layer, having natural antimicrobial property, for improving the quality of air breathed in by people.

A filtration element assembly for use with a cylindrical filter casing has a prismatic support body with a support body interior space. The side walls of the support body form a polygonal outer cross-sectional shape defining a circumscribed circle with a diameter less than or equal to the casing diameter. At least one side wall has an inlet flow passage with a receiving channel surrounding it. A porous filtration structure is disposed within the receiving channel so as to cover the inlet flow passage. A clamping member attached to each of the at least one side wall has a framing portion and a flange portion. The framing portion has a flow window formed there-through in registration with the inlet flow passage. The flange portion extends from the framing portion and is sized and configured for reception into the receiving channel to engage and retain the filtration element within the channel.

Filters for semiconductor tool and clean room applications to control airborne molecular contamination. The filter cartridge system includes a filter cartridge having a non-woven fiber and at least one adsorbent. In some embodiments, the filter cartridge is constructed of substantially combustible materials to support its end of service destruction.

The disclosed apparatus make possible the maintenance, repair, alteration, and upgrade of walls and wall mounted facilitates within hospitals and cleanrooms while occupying a minimum area. In one embodiment the apparatus is a six-sided box with an open side, a transparent side, and a side with two hand ports. To operate, the apparatus is placed, from the open side, against the wall or the wall facility that needs repair or upgrade. Afterwards the air inside the apparatus is vacuumed to lower the air pressure with respect to the surrounding pressure before the hands of a repairman enters the apparatus through the two hand ports. Repair can start at this time while the apparatus maintains a negative inside air pressure and while no particles of contaminants can escape the apparatus. The vacuumed air may be released back into the room or hallway after it is filtered.

The invention discloses a reticle storage device including a top lid, a bottom lid and a soft contact member. The top lid has a ceiling and a cover surrounding the ceiling. The bottom lid has a carrier and a peripheral structure surrounding the carrier. The soft contact member is configured to laterally extend in between the cover and the peripheral structure when the top lid and the bottom lid engage with each other, and to extend from an inside to an outside of the device in order to buffer the contact among the two lids.

The present invention provides a quick-release valve module which includes a flexible grommet defining a channel, and a piston having a disc portion at an end thereof, wherein the disc portion of the piston is exposed to the flexible grommet.

A reticle storage device includes a top lid having a ceiling and a cover surrounding the ceiling, and a bottom lid having a carrier and a peripheral structure surrounding the carrier. When the top lid engages with the bottom lid, a passage is defined therebetween and therefore the reticle storage device is not sealed.

An adsorbent breather assembly for filtering contaminants such as particulars and vapor phase contaminants, e.g. volatile organic compounds, for use with electronic devices can include a blocking region adjacent to the adsorbent filter layer to improve filtering performance.