Several designs of a gas distribution device for a substrate processing system are provided. The gas distribution device includes a dual plenum showerhead. Additionally, designs for a light blocking structure used with the showerheads are also provided.

A sucker rod cleaning system includes an inductive heating device, a feed mechanism, a first support and a second support. An electromagnet of inductive heating device includes a wire coil head that is configured to inductively heat a sucker rod positioned within a heating zone. The feed mechanism is configured to feed a sucker rod through the heating zone in a feed direction. The first support is positioned on an upstream side of the wire coil head, and is configured to support a portion of a sucker rod as it is fed through the heating zone by the teed mechanism. The second support is positioned on a downstream side of the wire coil head, and is configured to support a portion of a sucker rod as it is fed through the heating zone by the feed mechanism.

A dust removal device provided with a discharge outlet 30a (30) and suction inlet 21a, 21b, 22a, 22b facing the surface of an object to be dedusted 100 undergoing relative movement and arranged at a predetermined interval along the direction of relative movement of the object to be dedusted 100 and that discharges gas from the discharge outlet 30 to the surface of the object to be dedusted 10 while drawing in the gas above the surface of the object to be dedusted 100 through the suction inlet 21a, 21b, 22a, 22b. The dust removal device has a gas discharge path 32b with a shape that gradually expands from an opening 33 facing the object to be dedusted 100 to the discharge outlet 30a.

It is preferred that the foreign material removal device for notching a secondary battery according to one example of the present invention comprises: a foreign material confirmation part provided so that in a transport path of an electrode film through a notching process, the upper and lower surfaces of the notched electrode pattern are photographed, and a position of a foreign material present in the electrode pattern is calculated based on the photographed image; and a foreign material removal process part provided so that air is sprayed to the position of the foreign material and a vacuum pressure is applied thereto according to the foreign material position information calculated by the foreign material confirmation part.

A dust removal device capable of normally dedusting a surface of a sheet-shaped object having an edge portion of a shape with protruding parts continuously arranged at predetermined intervals along the longitudinal direction, that is, a dust removal device discharging a gas to a surface of a sheet-shaped object 100 from a discharge outlet while drawing in the gas above the surface of the sheet-shaped object 100 through a suction inlet, the discharge outlet including a first discharge outlet 30 for discharging the gas to portions of the sheet-shaped object 100 other than the edge portion and a second discharge outlet 35 for discharging the gas to the edge portion 100b of the sheet-shaped object 10, and the suction inlet including a first suction inlet (31, 32) for drawing in the gas above the surface of the portions of the sheet-shaped object 100 other than the edge portion 100b and a second suction inlet (33, 34) for drawing in the gas of the surface of the edge portion 100b of the sheet-shaped object 100.

An apparatus for matting a coating applied on mainly flat panels includes a cleaning workstation and an excimer treatment workstation where the panels are conveyed by a belt conveyor having an upper outward section and a lower return section. In the cleaning workstation, the upper outward section of the belt conveyor has a V-shaped path, which is formed by two rollers in contact with the plane of advancement of the panel, and a roller in lower position, and which is bridged by advancing rollers, among which gaseous nitrogen is supplied that brushes all sides of the panel. In the treatment workstation, the upper outward section of the belt has a V-shaped path, where the panel is irradiated by an excimer emitter, and which is formed by two rollers in contact with the plane of advancement of the panel, and a roller in lower position, and is bridged by advancing rollers.

A front end conveyor includes a frame having a first side and a second side, a lower deck and an upper deck. The lower deck includes a plurality of sheet supports, and upper portions of the sheet supports lie in a first plane. The upper deck includes a plurality of sheet guides that define with the sheet supports a sheet transport path through the front end conveyor. A chad wall extends transversely to the sheet transport direction and has a top edge located below the sheet transport path and a front surface facing in the upstream direction and a plurality of fingers projecting from the front surface in the upstream direction. The top edge of the chad wall is positioned relative to the sheet transport path such that hanging chads depending from the sheets will impact the chad wall.

A front end conveyor includes a frame having a first side and a second side, a lower deck and an upper deck. The lower deck includes a plurality of sheet supports, and upper portions of the sheet supports lie in a first plane. The upper deck includes a plurality of sheet guides, and the plurality of sheet supports and the plurality of sheet guides define therebetween a sheet transport path for moving sheets in a sheet transport direction toward the downstream end of the front end conveyor. A transverse scrap conveyor is mounted below the lower deck to carry scrap in a direction perpendicular to the sheet transport direction. The transverse scrap conveyor is secured to and supported by the frame such that the transverse scrap conveyor is movable with the frame as a unit.

A front end conveyor include a lower deck having a plurality of lower sheet supports, an upstream upper deck having an upstream end at the upstream end of the front end conveyor, a downstream end and a plurality of first upper sheet guides and a downstream upper deck having an upstream end, a downstream end at the downstream end of the front end conveyor, and a plurality of second upper sheet guides. The lower sheet supports and the upper sheet guides define a sheet transport path for moving sheets of material though the conveyor. The downstream end of the upstream upper deck and the upstream end of the downstream upper deck are independently pivotably mounted to the frame such that the upstream end of the upstream upper deck and the downstream end of the downstream upper deck shiftable toward and away from the lower deck.

A front end conveyor includes a frame having a first side and a second side, a lower deck including a plurality of sheet supports and an upper deck including a plurality of sheet guides. Upper portions of the sheet supports lie in a first plane, and the plurality of sheet supports and the plurality of sheet guides define therebetween a sheet transport path for moving sheets in a sheet transport direction toward the downstream end of the front end conveyor. At least one helical brush is positioned at the sheet transport path and is configured to engage scrap material on the plurality of sheets. The conveyor also includes a drive configured to rotate the helical brush.