A cleaning module for cleaning a wafer comprises a wafer gripping device configured to support a wafer in a vertical orientation and comprises a catch cup and a gripper assembly. The catch cup comprises a wall that has an annular inner surface that defines a processing region and has an angled portion that is symmetric about a central axis of the wafer gripping device. The gripper assembly comprises a first plate assembly, a second plate assembly, a plurality of gripping pin, and a plurality of loading pin. The gripping pins are configured to grip a wafer during a cleaning process and the loading pins are configured to grip the wafer during a loading and unloading process. The cleaning module further comprises a sweep arm coupled to a nozzle mechanism configured to deliver liquids to the front and back side of the wafer.

A dedusting apparatus removes dust and debris from particulate material flowing over the surface of a wash deck formed with steps and incorporating an air knife engaging the flow of particulate material as the material drops from one wash deck level to another. An ionizing wire is placed at each step on the wash deck so that the air knife blows negative ions from the ionizing wire into the particulate material falling off the step onto the level of wash deck below the ionizing wire. The wash deck is formed with openings to allow air to blow through the wash deck surface and remove dust and debris from the flow of particulate material. The wash deck can be constructed from modules supported on one another in a manner to present an overhang at each step. The wash deck can be formed from a flat pattern as a unitary bent structure.

The present invention provides a cleaning method and equipment thereof for object FOUP, comprising the following steps: firstly separating the object FOUP into a container lid and a container body, then conducting individual processes of wet washing, liquid removing and vacuum drying for the container lid and container body, and in the end combining the container lid and container body to complete the cleaning procedure of the object FOUP; specifically, during the liquid removing process, multiple wind knives are used to carry out liquid removing for the container body, and during the vacuum drying process after liquid removing, multiple thermal components are used to carry out vacuum drying for the container body under a vacuum environment; moreover, the present invention also includes the cleaning equipment to execute the above method, for the purpose of overcoming the problem that the wet cleaning process in the conventional automatic chip FOUP cleaning technique cannot effectively clean object FOUPs with relatively complicated internal structures.

A cart sanitizing system that has a conveyor assembly configured to selectively move a cart and a cleaning chamber assembly configured to selectively clean a cart positioned therein. The conveyor assembly repositions a cart into the cleaning chamber for a cleaning process and removes the cart from the cleaning chamber after the cleaning process is complete.

The present application discloses a cleaning method and a cleaning device. The cleaning method includes the following steps: dividing a cleaning device into at least two regions to control for the same cleaning mode; detecting a width of an object to be cleaned; and turning on the cleaning device of corresponding region according to the width of the object to be cleaned. The cleaning device includes a detection structure, a conveying structure, a washing structure, an air knife structure, and a control structure, where the washing structure is divided into at least two regions, and the air knife structure is also divided into at least two regions.

A cleaning method of sufficiently cleaning a workpiece is provided. The cleaning method, including: rotating or swinging a workpiece having a first cleaning surface about a table rotation axis; ejecting cleaning fluid from a nozzle along an ejection axis; and swinging the nozzle about a nozzle rotation axis parallel to the table rotation axis to keep a constant impact angle formed between the ejection axis and the first cleaning surface for cleaning the workpiece.

A machine for removing debris from pine straw is described. The machine comprises a conveyor system, a doffer, a debris-pine straw separation zone, and a clean pine straw zone. The conveyor system and doffer thin, spread and fluff the pine straw, as well as control the flow of pine straw to the separation zone. A system of air is directed through the separation zone and engages pine straw and debris discharged into the separation zone and effectively separates the debris from the pine straw, after which the pine straw is directed from the separation zone to the clean pine straw zone.

An apparatus (1) for contactless cleaning of a workpiece as well as a corresponding method are described. The apparatus (1) comprises a first hollow body (2), wherein the first hollow body (2) is configured to at least partially receive the workpiece to be cleaned, a second hollow body (3), wherein the second hollow body (3) at least partially surrounds the first hollow body (2), and a movable nozzle ring (4) located between the first hollow body (2) and the second hollow body (3) for flow of media between the first hollow body (2) and the second hollow body (3), wherein the nozzle ring (4) is movable by ease of a drive (6).

There is provided a cleaning nozzle that cleans a cleaning target face that is one of a holding face that holds a workpiece and/or a surface of the workpiece held on the holding face. The cleaning nozzle includes an air nozzle having an jet port for jetting air toward the cleaning target face and extending in a direction parallel to the cleaning target face, and a suction nozzle having a suction port for sucking air on the cleaning target face and arranged adjacent to and in parallel to the air nozzle.

Provided is a strip edge detection device that can precisely detect an edge of a strip, and that can reduce maintenance labor; and also provided is a brushing apparatus comprising the same.

An edge detection device 7 reciprocates in a width direction of a strip 2, together with brush rolls 3, to detect an edge of the strip 2 in the width direction. The edge detection device 7 comprises a light-emitting portion 8 for emitting light from one side of the front and back surfaces of the strip 2 to the other side; a light-receiving portion 9 for receiving light emitted from the light-emitting portion 8, the light-receiving portion 9 being placed on the opposite side of the light-emitting portion 8 with respect to the strip 2; multiple covers 100 individually covering the light-emitting portion 8 and the light-receiving portion 9; an air injection means 11 for continuously injecting air to the light-emitting portion 8 or the light-receiving portion 9, the air injection means 11 being provided in each cover 100; and a water injection means 12 for injecting water to the light-emitting portion 8 or the light-receiving portion 9 at a predetermined timing, the water injection means 12 being provided in each cover 100.