Provided are a mask inspection apparatus and a mask inspection method that can prevent a reduction in a reflectance of a drop-in mirror, which is caused by carbon contaminants. A mask inspection apparatus according to the present invention includes a drop-in mirror including multi-layer film and a reflective surface. The drop-in mirror is configured to reflect illumination light incident on the reflective surface and illuminate the mask. An area of the reflective surface is configured to be greater than an area of an illuminated spot irradiated with the illumination light on the reflective surface. The drop-in mirror is configured to be movable. A position of the illuminated spot on the reflective surface is configured to be moved when the drop-in mirror is moved.

A tool includes a head that extends form the flexible section, an emitter within the head; and a nozzle to eject a cooling fluid therefrom. A method of additively manufacturing a component including delivering series of thermal shocks to a conglomerated powder within an internal passage of an additively manufactured component to facilitate removal of the conglomerated powder.

A method for removing oxide materials from a crack of a metallic workpiece comprises: infiltrating an alkali solution into the crack in a pressurized atmosphere or an ultrasonic environment; applying an energy to the crack to react the oxide materials with the alkali solution and form a resultant material; and rinsing the resultant material with an acid solution to remove the resultant material from the crack. The method is easier to penetrate into the inside of the cracks, in particular suitable for cleaning narrow and deep cracks.

An assembly comprising at least two elements in a movable arrangement relative to each other for performing a first function of the assembly is furthermore equipped with an anti-biofouling system for subjecting at least an area of the assembly that is to be at least partially exposed to water during at least a part of its lifetime to an anti-biofouling action as an additional function of the assembly, different from the first function of the assembly. The anti-biofouling system comprises one or more light sources for emitting anti-biofouling light, and the anti-biofouling system is adapted to realize coverage of the area with the anti-biofouling light on the basis of the movable arrangement of the at least two elements relative to each other for performing the first function of the assembly.

Disclosed are methods and coatings for protecting the surface of a non-metallic composite part, comprising applying a protective layer to an exposed surface of the non-metallic composite part, the protective layer comprising: (a) a multilayer having at least a co-cured layer applied to the surface of the non-metallic part and laser-sensitive layer applied to a surface of the co-cured layer, wherein the laser-sensitive layer is selected from a reflective layer, an optical sensor layer or a layer having both reflective and optical sensor properties; or (b) a co-cured coating which comprises a laser-sensitive material incorporated therein to form a laser-sensitive co-cured layer applied to a surface of the non-metallic composite part, wherein the laser-sensitive material is selected from a reflective material, an optical sensor material or a combination thereof, such that the non-metallic composite part will be protected from damage during subsequent laser ablation to remove an outer coating.

Systems for processing a material by submerging the material in a fluid and directing laser pulses at the fluid and the material for processing the material. An embodiment removes the surface of concrete, brick, or rock or minerals in a relatively gentle, energy-efficient, and controlled manner that also confines the material that is removed.

A laser cleaning system including a laser source, an energy-transferring optical fiber, a laser cleaning head, a coreless motor, a connection lens barrel, and a mirror.

A dry cleaning apparatus includes a chamber, a substrate support supporting a substrate within the chamber, a shower head arranged in an upper portion of the chamber to supply a dry cleaning gas toward the substrate, the shower head including an optical window transmitting a laser light therethrough toward the substrate support, a plasma generator generating plasma from the dry cleaning gas, and a laser irradiator irradiating the laser light on the substrate through the optical window and the plasma to heat the substrate.

Laser cleaning equipment and a cleaning method for a shaft component are provided. The equipment includes: a supporting base assembly; two driving wheel structures on the supporting base assembly, driving wheels of each of which is configured for being close to or away from each other, and the shaft component to be cleaned is placed between the two driving wheel structures; a friction wheel structure that is tangent to driving wheel structure(s) and uses a friction force thereof to drive driving wheel structure(s) to rotate; a connection shaft assembly that coaxially passes through the friction wheel structure; a power driving mechanism, one end of which that faces toward the connection shaft assembly is in drive connection with the connection shaft assembly and is configured to drive the connection shaft assembly to rotate; and a laser cleaning mechanism configured for performing laser cleaning on the shaft component to be cleaned.

An automated cleaning system for cleaning an object, comprising a laser configured to be directed at the object, to remove contaminants from the object; detection system to identify details about the object; rotation apparatus to rotate the object in a cleaning position; and control apparatus to direct the laser at the object in the cleaning position, and operate the laser to clean the object.