Generally, a panel maintenance system including a panel maintenance assembly configured to move over a plurality of panel modules. Specifically, a panel module including a first frame including a first plurality of frame members joined to enclose a first panel. The first plurality of frame members including a first frame inner side configured to capture the first panel within the first frame and a first frame outer side configured to provide a first track axially extending between first and second ends of at least one of the first plurality of frame members. The first track configured to engage a drive element of a panel maintenance assembly which operates to move the panel maintenance assembly over the first panel. The panel maintenance assembly bears one or more components which function to maintain the first panel.

In a substrate processing apparatus, the inner peripheral edge of a second-cup canopy part radially opposes an outer peripheral surface of an opposing-member side wall part. This suppresses dispersion of processing liquids to above a cup part. A second-cup gap distance that is a radial distance between the outer peripheral surface of the opposing-member side wall part and the inner peripheral edge of the second-cup canopy part is greater than a holder gap distance that is a radial distance between the inner peripheral surface of the opposing-member side wall part and the outer peripheral surface of the substrate holder. This prevents or suppresses the possibility that, when a second processing liquid dispersed from a substrate is received by a second cup, the second processing liquid may be pushed downward by a downward airflow. Accordingly, a plurality of types of processing liquids will be separately received by a plurality of cups.

A substrate treating apparatus is disclosed. The apparatus may include a housing including an upper body and a lower body coupled to each other to define a treatment space, the lower body being provided below the upper body, a supporting unit coupled to the upper body, the supporting unit supporting an edge of a substrate disposed in the treatment space, a fluid supplying unit configured to supply fluid into the treatment space, a sealing member provided between and in contact with the upper and lower bodies, the sealing member hermetically isolating the treatment space from an outer space, and an isolation plate installed between the sealing member and the supporting unit. The isolation plate may be provided to face the sealing member.

Generally, a panel maintenance system including a panel maintenance assembly configured to move over a plurality of panel modules. Specifically, a panel module including a first frame including a first plurality of frame members joined to enclose a first panel. The first plurality of frame members including a first frame inner side configured to capture the first panel within the first frame and a first frame outer side configured to provide a first track axially extending between first and second ends of at least one of the first plurality of frame members. The first track configured to engage a drive element of a panel maintenance assembly which operates to move the panel maintenance assembly over the first panel. The panel maintenance assembly bears one or more components which function to maintain the first panel.

Spray apparatus and uses thereof are described herein. A vacuum spray nozzle apparatus may include a first tube in fluid communication with a fluid source, a rotor coupled to the tube, a conduit in fluid communication with the passages of the first tube, and a second tube coupled to the conduit, the second tube being in fluid communication with a vacuum source. The rotor is in fluid communication with the pressurized fluid source. The conduit is substantially arched or angled such that an outlet of the conduit is offset a radial distance in a radial direction from the rotor axis, and when pressurized fluid is ejected from the outlet, during use, rotates the conduit. The vacuum spray nozzle apparatus is configured to remove components from a material through the second tube when a pressure of the system is reduced using the vacuum source.

A suction device, including a suction unit, a suction line arrangement that is fluidically connected to the suction unit, a fluid supplying arrangement, a discharge arrangement for fluid, which is fluidically connected to the fluid supplying arrangement, and a guide element that is couplable to the discharge arrangement and the suction line arrangement and that guides fluid from the discharge arrangement into the suction line arrangement, for cleaning the suction line arrangement.

As an example, an apparatus includes a hood portion and a body portion. The hood portion includes a distal opening adapted to be positioned around a periphery of a wall-mounted appliance. The hood portion includes a sidewall of a pliant material extending outwardly from a perimeter of the distal opening to terminate in a proximal opening having a perimeter that is spaced apart from and opposing the distal opening. The proximal opening is to provide access to an interior volume of the hood portion corresponding to the sidewall between the first and second openings. The body portion extends from the perimeter of the proximal opening in a longitudinal direction that is substantially transverse to a central axis of the distal opening. An outlet in fluid communication with the body portion is to enable discharge of fluids from an interior volume of the body portion.

Systems and methods for cleaning, drying, and thermally managing vehicle components are described herein. In some embodiments, the vehicle components can include various sensors and, more particularly, the surfaces of cameras, LIDAR sensors, etc., that need to be clean to effectively perceive the environment around the vehicle. In one embodiment, a cleaning system includes a central delivery system configured to route fluid, such as washer fluid, along one or more delivery channels to remote holding chambers. The holding chambers can hold and/or heat the fluid before delivering the fluid to nozzles that spray the fluid on nearby vehicle components to clean the components.

Systems and methods for cleaning, drying, and thermally managing vehicle components are described herein. In some embodiments, the vehicle components can include various sensors and, more particularly, the surfaces of cameras, LIDAR sensors, etc., that need to be clean to effectively perceive the environment around the vehicle. In one embodiment, a cleaning system includes a central delivery system configured to route fluid, such as washer fluid, along one or more delivery channels to remote holding chambers. The holding chambers can hold and/or heat the fluid before delivering the fluid to nozzles that spray the fluid on nearby vehicle components to clean the components.

Systems and methods for cleaning, drying, and thermally managing vehicle components are described herein. In some embodiments, the vehicle components can include various sensors and, more particularly, the surfaces of cameras, LIDAR sensors, etc., that need to be clean to effectively perceive the environment around the vehicle. In one embodiment, a cleaning system includes a central delivery system configured to route fluid, such as washer fluid, along one or more delivery channels to remote holding chambers. The holding chambers can hold and/or heat the fluid before delivering the fluid to nozzles that spray the fluid on nearby vehicle components to clean the components.