A method of laser processing a transparent workpiece (160) includes directing a laser beam (112) into the transparent workpiece (160) wherein a portion of the laser beam (112) directed into the transparent workpiece (160) includes a laser beam focal column (113) and generates an induced absorption to produce a defect column (172) within the transparent workpiece (160), the laser beam focal column (113) having a radius of maximum beam intensity that is variable along a length of the laser beam focal column (113) such that the radius of maximum beam intensity has at least two non-zero angles of propagation with respect to a center line of the laser beam focal column (113) along the length of the laser beam focal column (113).

In one aspect, a method for producing a diffractive optical element for beam shaping of a laser beam having a first wavelength of at least 100 nm includes providing a laser mirror, the laser mirror having a layered structure made of a substrate, a dielectric layer and optionally an absorption layer, the dielectric layer resting against the substrate or the absorption layer being located between the substrate and the dielectric layer. The method also includes creating a plurality of bulges of the dielectric layer by treating the laser mirror with a series of focused heating laser beams having a second wavelength (λ.sub.2), the plurality of bulges having a height perpendicular to the dielectric layer, and at least one bulge having a height of at least half the first wavelength (λ.sub.1).

In one aspect, a method for producing a diffractive optical element for beam shaping of a laser beam having a first wavelength of at least 100 nm includes providing a laser mirror, the laser mirror having a layered structure made of a substrate, a dielectric layer and optionally an absorption layer, the dielectric layer resting against the substrate or the absorption layer being located between the substrate and the dielectric layer. The method also includes creating a plurality of bulges of the dielectric layer by treating the laser mirror with a series of focused heating laser beams having a second wavelength (λ.sub.2), the plurality of bulges having a height perpendicular to the dielectric layer, and at least one bulge having a height of at least half the first wavelength (λ.sub.1).

An optical element reflects radiation, such as EUV radiation. The optical element includes a substrate with a surface to which a reflective coating is applied. The substrate has at least one channel through which a coolant can flow. The substrate is formed from fused silica, such as titanium-doped fused silica, or a glass ceramic. The channel has a length of at least 10 cm below the surface to which the reflective coating is applied. The cross-sectional area of the channel varies by no more than +/−20% over the length of the channel.

An optical element reflects radiation, such as EUV radiation. The optical element includes a substrate with a surface to which a reflective coating is applied. The substrate has at least one channel through which a coolant can flow. The substrate is formed from fused silica, such as titanium-doped fused silica, or a glass ceramic. The channel has a length of at least 10 cm below the surface to which the reflective coating is applied. The cross-sectional area of the channel varies by no more than +/−20% over the length of the channel.

A substrate having a first surface with at least one division line and an opposite second surface is processed by attaching a protective sheeting to the first surface and applying a laser beam to the protective sheeting to form a plurality of alignment marks in the protective sheeting. The substrate has a backside layer on the second surface. A laser beam is applied to the substrate from the side of the first surface. The substrate is transparent to the laser beam and the focal point of the laser beam is located inside the substrate which is closer to the second surface than to the first surface, to form a plurality of alignment marks in the backside layer. Substrate material is removed along the division line from the side of the second surface. The alignment marks are used for aligning the substrate material removing means relative to the division line.

A manufacturing method of a glass article having an organic film includes irradiating a first main surface of a glass plate having the first main surface and a second main surface, opposite each other, with a laser light of a first laser, to form an in-plane void region, in which voids are arrayed, on the first main surface, and internal void arrays, including voids arrayed from the in-plane void region to the second main surface, in the glass plate;

depositing the organic film on the first main surface or the second main surface of the glass plate; and irradiating and scanning the first main surface or the second main surface, on which the organic film was deposited, with a laser light of a second laser, along the in-plane void region, to separate the glass article from the glass plate along the in-plane void region.

A manufacturing method of a glass article having an organic film includes irradiating a first main surface of a glass plate having the first main surface and a second main surface, opposite each other, with a laser light of a first laser, to form an in-plane void region, in which voids are arrayed, on the first main surface, and internal void arrays, including voids arrayed from the in-plane void region to the second main surface, in the glass plate;

depositing the organic film on the first main surface or the second main surface of the glass plate; and irradiating and scanning the first main surface or the second main surface, on which the organic film was deposited, with a laser light of a second laser, along the in-plane void region, to separate the glass article from the glass plate along the in-plane void region.

An apparatus and method regarding forming a cooling hole in a component for a turbine engine, with the component held in a hole-forming machine with a laser carried on a multi-axis carriage and defining an optical path, the method comprising forming a set of cooling holes in the component with a laser mounted to the multi-axis carriage, estimating a total airflow through the set of cooling holes based on a set of data regarding the flow effectiveness of the set of cooling holes, and forming a second set of cooling holes with the laser.

An apparatus and method regarding forming a cooling hole in a component for a turbine engine, with the component held in a hole-forming machine with a laser carried on a multi-axis carriage and defining an optical path, the method comprising forming a set of cooling holes in the component with a laser mounted to the multi-axis carriage, estimating a total airflow through the set of cooling holes based on a set of data regarding the flow effectiveness of the set of cooling holes, and forming a second set of cooling holes with the laser.