A temperature control device includes a machine body temperature sensor which measures a machine body temperature at a portion separated from a spindle device, a return oil temperature sensor which measures a temperature of cooling oil which circulates in a machine tool and which is collected by the temperature control device, an oil controller which includes at least two oil control modules, each having a cooler and which control the temperature of the cooling oil so that the temperature of the cooling oil detected by the return temperature sensor is synchronized with a reference temperature set based on a machine body temperature, in which tanks thereof communicate with each other, and the at least two oil control modules are connected in parallel to the machine tool, and a piping connection manifold for uniformizing convergence of the cooling oil to the machine tool and branching to each of the oil control modules.

Machine tool includes an ejection part, a first tank, a second tank, a pump, and a control unit. Control modes of the pump include: a first control mode in which the pump is driven when a first coolant amount in the first tank is more than a first predetermined amount and the pump is stopped when the first coolant amount is less than a second predetermined amount; and a second control mode in which the pump is driven so that the first coolant amount is a constant amount. The control unit controls the pump in first control mode when a second coolant amount in the second tank is more than or equal to a third predetermined amount, and switches the control mode of the pump from the first control mode to the second control mode when the second coolant amount is less than the third predetermined amount.

The present disclosure relates to a structure for reducing thermal displacement of a machine tool structure, and more particularly, to a structure for reducing thermal displacement of a machine tool structure capable of reducing thermal displacement of a structure in order to prevent processing precision from deteriorating due to deformation of a fixed structure by heat generated at a part where the fixed structure and a movable structure perform frictional motion together with each other. Accordingly, in order to resolve a technical problem, an object of the present invention is to provide a structure for reducing thermal displacement of a machine tool structure capable of preventing a structure from being deformed and distorted by reducing a temperature deviation over the entire structure by rapidly transferring heat to other parts when a temperature of a specific part of the structure is raised.

The invention relates, on the one hand, to a machine element (6), for example a motor spindle or an electromechanical drive unit, with integrated, internal cooling system (8) and, on the other hand, to a closed cooling circuit (24) with corresponding machine element (6). According to the invention, the cooling takes place with a special coolant (4). The coolant (4) is a dispersion containing at least one Phase Change Material (PCM).

A machining thermostatic control system and method of using the same are disclosed. The system comprises a detecting unit, a processing unit and at least a cooling unit. The detecting unit is used for detecting the temperature distribution of a workpiece. The processing unit is coupled to the detecting unit and is used for processing the temperature distribution for obtaining a position of maximum hot spot of the workpiece. The cooling unit comprises a head which is provided for discharging cooling fluid and a plurality of blades which are angle-adjustably mounted to the head. The blades are coupled to the processing unit and the angle of blades are controlled by the processing unit for enabling the cooling fluid to flow toward to the position of maximum hot spot position.

A fluid temperature control assembly in combination with a machine tool, and a method of adjusting the temperature of a fluid being supplied to a machine tool. The assembly is arranged to adjust the temperature of a fluid being supplied to the machine tool to maintain the fluid at a setpoint temperature at a location downstream of the assembly with a high level of accuracy. The assembly comprises a radio frequency (RF) or microwave energy source to supply energy to the fluid as it passes through the assembly to heat the fluid, a temperature sensing arrangement for outputting a temperature signal responsive to the temperature of the fluid at the downstream location, and a control arrangement configured to receive the temperature signal and control the energy source with reference to the temperature signal to heat the fluid so as to maintain the fluid at the setpoint temperature at the downstream location.

A machine tool with improved thermal stability includes a workpiece support for supporting at least one workpiece for allowing machining of the workpiece, and a support structure including a tool carrier support. The tool carrier support supports a tool carrier configured for carrying and driving a tool for machining a workpiece supported by the workpiece support through a relative movement between the workpiece and the tool. The machine has a conduit configured to allow the flow of air in a closed circuit, the conduit has a surface part and an underground part, the surface part being an inner cavity of the support structure and the underground part having a piping configured to be buried in the soil beneath the support structure.

A wafer placement table includes a ceramic plate having a wafer placement surface on its upper surface, a cooling plate on a lower surface of the ceramic plate, a refrigerant flow path in the cooling plate, and an insulating hole located beside the refrigerant flow path in the cooling plate and extending from a lower surface of the cooling plate to a ceiling located higher than 2/3 of a height of the refrigerant flow path from its bottom.

In a precision machine tool wherein a spindle head 20 that is movable in the up and down direction is disposed on a column 14 disposed on a bed 10 and a water storage space for storing temperature-regulated cooling water is formed inside the column 14, the column 14 has, in a lower part thereof, intake ports 38a and 38b through which cooling water is led into the water storage space, the column 14 has, in an upper part thereof, a drain opening 40 through which a cooling water is led outside, and an air vent hole 49 through which air in the column is discharged is formed at a position higher than the drain opening 40.

A fluid temperature control apparatus in combination with a machine tool, wherein the apparatus is arranged to adjust the temperature of a fluid being supplied to the machine tool. The apparatus comprises a temperature control assembly for adjusting the temperature of the fluid as it passes through the assembly. The assembly comprises at least one thermoelectric temperature control device.