A method of temperature control for a chemical mechanical polishing system includes directing a gas that includes steam from an orifice onto the component in the polishing system while the component is spaced away from a polishing pad of the polishing system to raise a temperature of the component to an elevated temperature, and before the component returns to an ambient temperature, moving the component into contact with the polishing pad.

Loopback rolls which can transfer and guide a polishing tape (T) along a perimeter of a pressure contact roll (R) is provided, the pressure contact roll having a tapered peripheral edge having a top edge and a pair of slant edge faces formed on a periphery of the pressure contact roll, by which the polishing tape can be bent into a substantially V-shape in cross section, and a switchable pressure contact mechanism is switchably provided which pressure contacts each of bent portions of the polishing tape, which is bent into the substantially V-shape in cross section by the tapered peripheral edge, to one tooth face (B1) or the other tooth face of a worm.

A tilt adjusting mechanism provided in a processing apparatus including a chuck table having a holding surface for holding a workpiece thereon and a processing unit having a processing surface for processing the workpiece held on the chuck table, for adjusting parallelism between the holding surface and the processing surface. The tilt adjusting mechanism includes at least three support posts supporting the chuck table, the support posts including at least one expansible and contractible support post that is provided with a piezoelectric actuator including layered piezoelectric elements, a direct current power supply electrically connected to the piezoelectric actuator, and a voltage controller for controlling a direct current voltage value of direct current electric power supplied to the piezoelectric actuator.

The invention relates to an equipment having an upstream holder for a supply reel carrying a continuous ribbon, a portion of which is suitable for forming a film intended to cover a support plate, a downstream holder, an assembly station having a base comprising having a first platen, an actuator with a movable part carrying a second platen, the second platen or the first platen being adapted to receive a support plate, wherein the second platen is adapted to cooperate with the first platen to form a tooling capable of contacting the film and the support plate when the portion of the ribbon forming the film is located between the second platen and the first platen, facing the support plate.

A truing device includes a housing and a truing mandrel (1) with a shaft (10) used to mount a circular tool having a concentric opening, in particular a grinding disc (3), and with a first bearing (11) fixed on the housing (4) and located in a first end region of the truing mandrel (1) The shaft (10) includes a hydraulic clamping device (20) having a chamber (21) containing hydraulic medium, to which a pre-clamping pressure can be applied with a preclamping element (23) The hydraulic clamping device is formed from a clamping section (22) lying above the chamber (21) in the radial direction and held in the shaft on both sides. The outer surface of the clamping section forms the clamping surface and which, when the hydraulic pressure in the chamber (21) increases, can be reversibly moved or bent outwards in the radial direction such that a radial clamping force can be exerted on the inner surface of the concentric opening of the circular tool penetrated by the clamping section (22). A method provides for mounting and removing a circular tool on the truing mandrel of a truing device of this kind.

A polishing apparatus includes a holding table having a holding surface that holds a wafer, a polishing unit in which a polishing pad having an opening at the center of a polishing surface that polishes the wafer is mounted to a spindle and is rotated, a slurry supply unit that supplies slurry to the polishing surface of the polishing pad, and an air supply unit that shuts an upper end of a penetrating path penetrating through the axial center of rotation of the polishing pad and the spindle and supplies air into the penetrating path.

A grinding method includes an oblique grinding step of rotating a grinding wheel about the central axis of a second shaft, tilting the second shaft to a first shaft of a rotatable chuck table such that the bottom of a first portion of the grinding wheel that is positioned above an outer circumferential portion of the chuck table is higher than the bottom of a second portion of the grinding wheel that is positioned above a central portion of the chuck table, and then moving the grinding wheel and the chuck table relatively closer to each other along a direction parallel to the first shaft, thereby forming a disk-shaped recess in the reverse side of the workpiece, and a tilt changing and grinding step of grinding the reverse side of the workpiece while gradually changing a tilt of the second shaft to orient parallel to the first shaft.

A center shaft machining apparatus includes: a grinding structure that moves on a machining central axis while rotating about the machining central axis and machines an end surface on one end side of a workpiece arranged on the machining central axis; an end portion support structure that supports an opposite end side of the workpiece; and a shaft portion support structure that supports a shaft support portion set at an intermediate portion of the workpiece. The end portion support structure includes an eccentric mechanism capable of supporting an opposite end of the workpiece in a state where a workpiece central axis of the workpiece is eccentric with respect to the machining central axis.

A wheel fixture is disclosed. A main shaft drives a first positioning pull rod on a chuck body to extend and contract in the radial direction via a tightening screw, a clamping jaw is at a position within the travel range of extension and contraction, a wheel is positioned and clamped by the fixture, airtight support blocks are pressed down by the wheel and flush with the support plane of the clamping jaw, at this time, airtight ejector rods press second O rings to prevent air from flowing out of the airtight detection position, a detection system of a machine tool detects a preset air pressure value which indicate that the wheel has been placed correctly, and if the wheel is not placed correctly on the fixture, the machine tool will alarm through the detected pressure feedback.

Disclosed are an antigravity shear-resisting and deformation-eliminating centerless grinding apparatus and a machining method. The grinding apparatus comprises a grinding tool configured to grind a thin-walled bearing ring and a clamping mechanism configured to clamp the thin-walled bearing ring stably. The clamping mechanism comprises a main clamping mechanism and an auxiliary clamping mechanism. The main clamping mechanism comprises an electromagnetic centerless clamp. The electromagnetic coil is arranged above the thin-walled bearing ring being ground. According to the present invention, not only can gravity of the thin-walled bearing ring and a tangential force generated by grinding be counteracted to effectively prevent extrusion deformation of the thin-walled bearing ring when being ground, but also the lubricating performance the capacity to resist load itself can be further improved and the service life of is prolonged.