A polishing apparatus polishes a periphery of a substrate. This polishing apparatus includes a rotary holding mechanism configured to hold the substrate horizontally and rotate the substrate, plural polishing head assemblies provided around the substrate, plural tape supplying and recovering mechanisms configured to supply polishing tapes to the plural polishing head assemblies and recover the polishing tapes from the plural polishing head assemblies, and plural moving mechanisms configured to move the plural polishing head assemblies in radial directions of the substrate held by the rotary holding mechanism. The tape supplying and recovering mechanisms are located outwardly of the plural polishing head assemblies in the radial directions of the substrate, and the tape supplying and recovering mechanisms are fixed in position.

A device for a grinding table includes a shim with a cross section shaped to mirror a cross section of a step gap formed at an edge of grinding tape adhered to a first side of a wafer that covers solder balls, such that the shim and the grinding tape form a planer surface on a grinding table for the wafer.

A polishing apparatus includes a chuck table configured to hold the workpiece, a polishing unit including a rotatable polishing pad configured to polish the workpiece held by the chuck table, a moving mechanism configured to move a holding unit to a loading and unloading region for loading and unloading the workpiece onto and from the chuck table and a polishing region for polishing the workpiece by the polishing unit, a raising and lowering mechanism configured to bring the polishing pad into contact with the workpiece held by the chuck table or separate the polishing pad from the workpiece by raising or lowering the polishing unit, and a shaping unit configured to shape the polishing pad. The shaping unit comes into contact with a polishing surface of the polishing pad, and shapes the polishing surface into a desired shape.

A method for beveling a thin glass plate by simultaneously grinding an edge of the glass using multiple abrasive cup wheels, wherein the edge of the glass plate is extended from the fixturing device. The extension of the glass plate allows the glass plate to bend in response to forces applied by the abrasive cup wheels, thereby reducing the sensitivity of the grinding process to variations in position of the abrasive wheels. The axes of rotation of the abrasive wheels are separated by a distance selected to prevent deflection in the glass plate caused by a first abrasive wheel to influence the deflection in the glass plate caused by a second (adjacent) abrasive wheel.

An adjusting device for lifting and lowering a workbench is provided between a workbench and a workbench rest. An adjusting seat is firmly secured with the workbench rest and an adjusting wheel is screwed and locked on the adjusting seat. A screwing fastener is inserted through the underside of the workbench and the adjusting wheel, and an elastic member is provided between an upper flange of the screwing fastener and the topside of a fixed plate of the workbench. Thus, by the prestress of the elastic member pushing against the workbench, the workbench can be surely driven by screw rotation of the adjusting wheel and hence the adjusting wheel can easily drive the workbench to move up and down.

A polishing solution according to an embodiment includes an exothermic agent that generates heat through application of an alternating magnetic field thereto, and a viscosity modifier that undergoes a reversible phase transition between a gel state and a sol state depending on temperature.

A vertical type surface grinding machine includes a column arranged over an index table. The column includes, in a plan view, a lateral side portion extending along a direction of arrangement of first and second positions, and a vertical side portion extending perpendicularly to the lateral side portion. The column is supported from below by both ends of the lateral side portion and at least one end of the vertical side portion. Each of first and second grinding mechanisms is supported by the lateral side portion and the vertical side portion while arrange like a bridge between the lateral side portion and the vertical side portion. Each of feeding mechanisms of the first and second grinding mechanisms is located at a corner at which the lateral side portion and the vertical side portion intersect.

An edge polishing system with an edge alignment function for plates, including an edge polishing machine and a plate feeding platform. The plate feeding platform includes a frame assembly, a conveyor belt mechanism, a lifting mechanism, a blocking mechanism and a plate pressing mechanism. The frame assembly includes a movable frame and a fixed frame articulated with the movable frame. The conveyor belt mechanism is arranged on the movable frame. The lifting mechanism is arranged between the movable frame and the fixed frame. The blocking mechanism is arranged on an end of the movable frame. The plate pressing mechanism is arranged above the conveyor belt mechanism.

Workbench (1) for supporting and moving articles comprising a frame (22), a support surface (24) able to tilt relative to the frame (22) and pass from an initial horizontal position into a final inclined position, at least one rigid element (30) hinged with the frame (22) at a pivoting point (P) and having an end portion (36) hinged with the surface (24) and at least one first actuator (44) configured to raise and rotate the surface (24) into an intermediate inclined position. The element (30) is shaped as a rocker arm with the pivoting point (P) arranged between a first wing (32) and a second wing (34) and movement means (54) are provided for rotation of the rocker arm (30) about an axis (X2) so as to move the surface (24) from the intermediate position into the final inclined position. The first actuator (44) comprises a first end (46) hinged with the rocker arm (30) and a second end (48) hinged with the support surface (24).

An edge polishing system with an edge alignment function for plates, including an edge polishing machine and a plate feeding platform. The plate feeding platform includes a frame assembly, a conveyor belt mechanism, a lifting mechanism, a blocking mechanism and a plate pressing mechanism. The frame assembly includes a movable frame and a fixed frame articulated with the movable frame. The conveyor belt mechanism is arranged on the movable frame. The lifting mechanism is arranged between the movable frame and the fixed frame. The blocking mechanism is arranged on an end of the movable frame. The plate pressing mechanism is arranged above the conveyor belt mechanism.