A pad conditioning disk configured to condition a polishing pad of a chemical mechanical polishing tool including a plurality of zones comprising cutting elements that selectively engage the polishing pad based on a positioning of the plurality of zones, is provided. An associated chemical mechanical polishing (CMP) tool and method for conditioning a polishing pad during a chemical mechanical polishing process is also provided.

A pad conditioning disk configured to condition a polishing pad of a chemical mechanical polishing tool including a plurality of zones comprising cutting elements that selectively engage the polishing pad based on a positioning of the plurality of zones, is provided. An associated chemical mechanical polishing (CMP) tool and method for conditioning a polishing pad during a chemical mechanical polishing process is also provided.

Disclosed herein is a dressing board for dressing a cutting blade. The dressing board is held on a chuck table in dressing the cutting blade. The dressing board includes a bar code formed on the front side of the dressing board for indicating kind information on the dressing board, and a groove code formed on the front side of the dressing board at an edge portion thereof, the groove code being composed of grooves having pattern corresponding to that of the bar code. Even when the bar code is cut off by the cutting blade in dressing the cutting blade, the kind information on the dressing board is indicated by the groove code left on the front side of the dressing board.

Disclosed herein is a dressing board for dressing a cutting blade. The dressing board is held on a chuck table in dressing the cutting blade. The dressing board includes a bar code formed on the front side of the dressing board for indicating kind information on the dressing board, and a groove code formed on the front side of the dressing board at an edge portion thereof, the groove code being composed of grooves having pattern corresponding to that of the bar code. Even when the bar code is cut off by the cutting blade in dressing the cutting blade, the kind information on the dressing board is indicated by the groove code left on the front side of the dressing board.

A dresser apparatus for dressing a grinding wheel, the apparatus comprising a dresser cradle unit for holding a dresser roll, and a rotary drive for driving the dresser roll, wherein the dresser cradle unit is removable from the rotary drive.

A dresser apparatus for dressing a grinding wheel, the apparatus comprising a dresser cradle unit for holding a dresser roll, and a rotary drive for driving the dresser roll, wherein the dresser cradle unit is removable from the rotary drive.

Provided is a formed rotary dresser that has regions in which diamond abrasive grains are scattered and arranged on an outer circumferential surface thereof brought into contact with a grindstone, and slit regions in which the diamond abrasive grains are not arranged on the outer circumferential surface thereof. The plurality of slit regions are provided to be inclined with respect to a rotational axis. A plurality of octahedral diamond abrasive grains are arranged along downstream edges of the slit regions in a rotating direction such that any face of an octahedron is parallel with the outer circumferential surface.

Provided is a formed rotary dresser that has regions in which diamond abrasive grains are scattered and arranged on an outer circumferential surface thereof brought into contact with a grindstone, and slit regions in which the diamond abrasive grains are not arranged on the outer circumferential surface thereof. The plurality of slit regions are provided to be inclined with respect to a rotational axis. A plurality of octahedral diamond abrasive grains are arranged along downstream edges of the slit regions in a rotating direction such that any face of an octahedron is parallel with the outer circumferential surface.

Provided is a disclosure for embodiments that perform effluent monitoring for brush conditioning, where the monitored data may be fed back for use in the conditioning.

A method for the dressing of a multi-thread grinding worm by a dressing roll, wherein the grinding worm has at least two screw channels which are arranged parallel to another, which screw channels extend helically around an axis of the grinding worm and wherein the dressing roll has at least two adjacent dressing profiles which are arranged along an axis of the dressing roll, wherein the dressing profiles of the dressing roll are guided simultaneously through adjacent screw channels of the grinding worm during the dressing of the grinding worm. To improve the precision of the dressing the method includes the steps: a) execution of a first partial dressing process at which the dressing profiles of the dressing roll are guided simultaneously through first adjacent screw channels of the grinding worm; b) execution of at least one second partial dressing process at which the dressing profiles of the dressing roll are guided simultaneously through second adjacent screw channels of the grinding worm, wherein the second adjacent screw channels are, compared with step a), offset in the direction of the axis of the grinding worm by at least one screw channel of the grinding worm.