Patent classifications
B
B24
B24D
5/00
B24D5/16
B24D5/165
B24D5/165
Blade dicing device for wafers
12444624
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2025-10-14
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Provided is a blade dicing device for wafers that cuts (dices) a wafer with the grit on a cutting blade and separates the wafer into individual chips, and that can minimize process defects when dicing compound semiconductor wafers made of high-hardness materials such as SiC. The device includes a body, a cutting blade protruding from the outer periphery of the body, and grit bonded and attached to the outer periphery of the cutting blade and cutting a wafer, wherein the length of the grit is 2 m to 4 m.