Manipulator devices are used for computer-assisted tele-operated surgery. In some embodiments, the manipulator devices described herein include an arm with a proximal end that is configured to releasably couple with a set-up structure of a computer-assisted tele-operated surgery system. A first ring is rotatably coupled to a distal end portion the arm and is rotatably driven by a first gear motor within the arm. A second ring that is concentric with the first ring is also rotatably coupled to the distal end portion of the arm. Rotations of the second ring are driven by a second gear motor within the arm. An instrument actuator coupling is pivotably coupled to the second ring. The instrument actuator coupling is configured to releasably couple with a computer-assisted tele-operated surgical instrument actuator, and defines a surgical instrument insertion axis.

Systems and techniques for reducing or eliminating particulate contamination from wafer handling robots configured for vertical translation are disclosed. In one such technique, a collar may be provided having an aperture through it through which the turret of a wafer handling robot may be extended or retracted. The collar may have one or more radial gas passages. Gas directed at the turret from the radial passage(s) may turn downward when it strikes the turret and may act to prevent or discourage gas from within the base of the wafer handling robot from escaping through the aperture. In another technique, a bellows may be affixed to the bottom of the turret and to the bottom of the base such that the volume of the base occupied by the turret and the bellows remains generally fixed regardless of the degree to which the turret is extended from the base.

Systems and techniques for reducing or eliminating particulate contamination from wafer handling robots configured for vertical translation are disclosed. In one such technique, a collar may be provided having an aperture through it through which the turret of a wafer handling robot may be extended or retracted. The collar may have one or more radial gas passages. Gas directed at the turret from the radial passage(s) may turn downward when it strikes the turret and may act to prevent or discourage gas from within the base of the wafer handling robot from escaping through the aperture. In another technique, a bellows may be affixed to the bottom of the turret and to the bottom of the base such that the volume of the base occupied by the turret and the bellows remains generally fixed regardless of the degree to which the turret is extended from the base.

A sealed actuator including stacked motor modules. Each motor module has a motor module housing, a motor stator attached to a respective motor module housing, a motor rotor in communication with a respective motor stator, and a stator seal disposed between the motor stator and motor rotor, surrounding the motor rotor and having a sealing surface interface, that interfaces with a respective sealing housing surface of the motor module housing, facing the motor rotor to seal the motor stator from the motor rotor. The motor module housings are stacked against each other and the sealing housing surface interfaced, at the sealing surface interface facing the rotors, to the respective stacked stator seals of the motor module housings forms a substantially continuous seal interface of the stacked motor modules sealed by the stacked stator seals to form a continuous barrier seal between the motor rotors and the motor stators.

A sealed actuator including stacked motor modules. Each motor module has a motor module housing, a motor stator attached to a respective motor module housing, a motor rotor in communication with a respective motor stator, and a stator seal disposed between the motor stator and motor rotor, surrounding the motor rotor and having a sealing surface interface, that interfaces with a respective sealing housing surface of the motor module housing, facing the motor rotor to seal the motor stator from the motor rotor. The motor module housings are stacked against each other and the sealing housing surface interfaced, at the sealing surface interface facing the rotors, to the respective stacked stator seals of the motor module housings forms a substantially continuous seal interface of the stacked motor modules sealed by the stacked stator seals to form a continuous barrier seal between the motor rotors and the motor stators.

Provided are systems, methods, and devices for storing and transporting articles with a multi-shelf storage unit. A system for article handling includes a multi-shelf storage unit and a robotic unit. The multi-shelf storage unit includes a plurality of shelves disposed on a frame, the plurality of shelves including at least one vertically moveable shelf configured to move in first and second vertical directions relative to the frame, and a lift mechanism configured to automatically drive, in response to receiving a drive input, the at least one vertically moveable shelf in the first or second vertical direction. The robotic unit includes an end effector disposed on a robotic manipulator for engaging an article and a lift mechanism actuator that is connectable to the lift mechanism and configured to provide the drive input to actuate the lift mechanism.

A substrate transport device includes an arm, an end effector coupled to the arm, a driver configured to lift the arm so that the end effector receives a substrate, and a controller configured to control an output of the driver to change a lifting speed of the arm. While lifting the arm at a first speed to lift the end effector toward the substrate, the controller changes the lifting speed to a second speed that is lower than the first speed when the end effector starts to raise a height position of the substrate.

The invention relates to a method and to a device for producing a robot with a robotic arm. Said method can be carried out using an assembly robot wherein first housing segments are arranged in an intended sequence for the robotic arm, drive units are inserted into the first housing segments and the respective complimentary second housing segments are placed on the first housing segments comprising the drive units.

A modular telescopic rotation arm by motor control includes a fastening element, a first knuckle module, a first flange, a telescopic module, an outer sleeve module and an inner sleeve module. The first knuckle module is disposed in one end of the fastening element. One end of the first flange is connected to one end of the first knuckle module. The telescopic module is partially disposed in the fastening element. The telescopic module includes a second knuckle module. The second knuckle module is disposed in the fastening element. The outer sleeve module is connected to the first flange, and the telescopic module is partially surrounded by the outer sleeve module. The inner sleeve module is surrounded by the outer sleeve module.

A modular telescopic rotation arm by motor control includes a fastening element, a first knuckle module, a first flange, a telescopic module, an outer sleeve module and an inner sleeve module. The first knuckle module is disposed in one end of the fastening element. One end of the first flange is connected to one end of the first knuckle module. The telescopic module is partially disposed in the fastening element. The telescopic module includes a second knuckle module. The second knuckle module is disposed in the fastening element. The outer sleeve module is connected to the first flange, and the telescopic module is partially surrounded by the outer sleeve module. The inner sleeve module is surrounded by the outer sleeve module.