B29C59/026

Imprint apparatus, method for manufacturing article, and exposure apparatus

There is provided an imprint apparatus for forming a pattern of an imprint material on a substrate by using a mold, the imprint apparatus including a mold holding unit configured to hold the mold, and a substrate holding unit configured to hold the substrate, in which a particle is captured by generating a first region and a second region charged to different polarities in at least either one of a peripheral region of a region covered by the mold of the mold holding unit and a peripheral region of a region covered by the substrate of the substrate holding unit.

Decorative Sheet, Embossing Method And Embossing Die
20210001592 · 2021-01-07 · ·

A decorative sheet includes a base material and a concave portion. The concave portion is provided on a front face of the base material. In the concave portion, a depth direction coincides with a thickness direction of the base material. The concave portion includes a first concavo-convex pattern and a second concavo-convex pattern. The first concavo-convex pattern is provided in a first region of an inner surface of the concave portion. The second concavo-convex pattern is a concavo-convex pattern different from the first concavo-convex pattern. The second concavo-convex pattern is provided in a second region of the inner surface of the concave portion which is different from the first region.

Pattern forming method as well as production methods for processed substrate, optical component, circuit board, electronic component and imprint mold

A pattern is formed on a substrate with forming a layer of a curable composition (A1) containing a polymerizable compound (a1) on a surface of the substrate, then dispensing droplets of a curable composition (A2) containing a polymerizable compound (a2) dropwise discretely onto the curable composition (A1) layer, subsequently sandwiching a mixture layer of the curable composition (A1) and the curable composition (A2) between a mold and the substrate, then irradiating the mixture layer with light to cure the mixture layer, and releasing the mold from the mixture layer after the curing. The curable composition (A1) except a solvent has a viscosity at 25 C. of 40 mPa.Math.s or more and less than 500 mPa.Math.s. The curable composition (A2) except a solvent has a viscosity at 25 C. of 1 mPa.Math.s or more and less than 40 mPa.Math.s.

INCLINED SHEET MATERIAL, PRODUCING METHOD OF INCLINED SHEET MATERIAL, AND EMBOSSING MOLDING MATERIAL

A sheet material comprises a recessed part and a non-recessed part which are formed on a surface side of a cushion base material. The sheet material comprises a gradual changing part in which a height H changes gradually across the recessed part and the non-recessed part. The sheet material may comprise an obtuse angle face portion formed on a near part to a bottom of the recessed part which comprises a wide angle face portion formed on a near part to the non-recessed part. In a producing method of the sheet material, an embossing mold material comprises an embossing gradual changing part in which a depth D changes gradually across an embossing projected part and an embossing non-projected part. The embossing mold material is pressed in a situation where the embossing projected part and the embossing gradual changing part are abutting to a surface side of a cushion base material.

Bactericidal surface patterns

The invention relates to imparting surfaces with nanometer sized structures that provide bactericidal properties to the surface and devices. In one embodiment, the present invention provides a bactericidal surface with nanometer sized pillars created by imprinting a softened polymer surface with a mold. In another embodiment, the nanometer sized pillars are part of a medical device with antibacterial properties.

Template, template component, and semiconductor device manufacturing method

According to an embodiment, a template includes a flat plate-shaped first member, a flat plate-shaped second member including a pattern arrangement face, and a flat plate-shaped third member provided with an opening at a position corresponding to an arrangement position of the second member. The template is dividable at a position of at least one of a first boundary between the first member and the second member and a second boundary between the first member and the third member.

Imprint apparatus, imprint method, and article manufacturing method
10871710 · 2020-12-22 · ·

An imprint apparatus performs imprint processing of supplying a second composition having a property of being cured onto a substrate to which a first composition not having a property of being cured in an uncured state is supplied, bringing a mold into contact with a mixed layer of the first composition and the second composition, which is formed by the supplying, curing the mixed layer, separating the mold from the cured mixed layer, and forming a pattern on the mixed layer. When unloading the substrate outside the apparatus before completion of the imprint processing for all shot regions of the substrate, the apparatus supplies the second composition to a portion on the substrate in which the first composition is in an uncured state and performs curing processing of curing the mixed layer formed in the portion before the unloading.

SIMULATION METHOD, SIMULATION APPARATUS, AND STORAGE MEDIUM
20200394346 · 2020-12-17 ·

There is provided a simulation method of predicting a behavior of a curable composition in a process of bringing a plurality of droplets of the curable composition arranged on one of a first member and a second member into contact with an other of the first member and the second member and forming a film of the curable composition on the first member. The method includes generating a link by connecting two adjacent representative points of the plurality of droplets, generating a cell as a closed region formed by a plurality of links, and determining, based on the presence/absence of merging of droplets corresponding to each link forming the cell, whether a bubble is formed in the cell.

Mold, imprint device, and imprint method

A mold includes a rugged pattern layer, an inorganic sheet layer, and an elastic sheet layer. The inorganic sheet layer is formed of an inorganic material and supports the rugged pattern layer. The elastic sheet layer supports the inorganic sheet layer.

System for transfer of nanomembrane elements with improved preservation of spatial integrity

Transfer of nanoscale elements from a substrate on which they were manufactured or transferred to a flexible sheet may be performed by local and progressive deformation of the flexible sheet over the surface of the substrate to attach and lift the nanoscale elements from the substrate with controlled inter-element registration.