A stamp tool holding device capable of holding a stamp tool while keeping a stamp surface of the stamp tool clean, a stamp tool positioning device that easily positions a stamp tool with respect to a transport head, a multi-element transfer device for efficiently transferring a transport object element such as an element using a stamp tool, and a method of manufacturing an element array using the same, wherein the stamp tool holding device has an installation stage on which a stamp tool is detachably installed. The installation stage has an installation surface on which a housing recess for accommodating a stamp layer of the stamp tool is formed, and a suction hole capable of detachably adsorbing a part of the stamp tool located around the stamp layer is formed on the installation surface.

An imprint apparatus according to the present invention includes a controller configured to perform a contacting step of moving at least one of a mold holding unit and a substrate holding unit by at least one of a mold driving unit and a substrate driving unit such that a mold and an imprint material on a substrate surface are brought into contact with each other, an obtaining step of obtaining a driving force in a first direction parallel to the substrate surface for the substrate holding unit by the substrate driving unit after performing the contacting step, and a tilt correcting step of rotating the mold holding unit about a second direction perpendicular to the first direction in the substrate surface by the mold driving unit based on a magnitude of the driving force obtained in the obtaining step.

A method and an apparatus for producing a three-dimensional decoration piece that does not damage the tacky bonding or adhesion strength of the lower layer material of the decoration piece. The method includes putting an upper layer material on a first table operating as cathode; lowering an upper mold operating as anode onto the first table, emitting a high frequency wave for dielectric heating; stopping the high frequency dielectric heating; moving a second table carrying a lower layer material having a tacky bonding property to below the upper mold; and lowering said upper mold onto the second table. In the apparatus, the second table or the lower mold is provided on the top surface thereof with recessed sections that are transversally and inwardly separated from a position where an edge of the first machining means contacts, by 0.2 mm to 1 mm; and a cushion member being arranged in the respective recessed sections.

[Object] Provided are a stamp tool whose transport head can be easily shared, a transport device capable of allowing the stamp tool to easily pick up an transport object element disposed on a surface of a substrate from the substrate and transporting the element without being left on the substrate side, and an element array manufacturing method using the same.

[Solution] A stamp tool 10 includes a stamp layer 12 allowing an element 32r as an transport object element to detachably adhere thereto, a support plate 14 to which the stamp layer 12 is fixed, and an adapter plate 16 having a mounting surface 16a, the support plate 14 being replaceably attached thereto, and a transport head 22 being allowed to be detachably attached thereon.

The present invention provides an imprint apparatus for performing an imprint process of molding an imprint material on a substrate with a mold to form a pattern on the substrate, the apparatus including a supply device configured to supply, to a space between the imprint material on the substrate and the mold, a penetrating gas that penetrates at least one of the mold, the imprint material and the substrate and a condensable gas that is liquefied by pressure rise due to the molding, and a controller configured to control the supply device so as to change at least one of a supply amount of the penetrating gas and a supply amount of the condensable gas based on information on a recipe for the imprint process.

A conformal micro- or nanopatterned nanoimprint lithography (NIL) master and methods of making and using same is disclosed. A conformal foil or film master with a patterned surface is provided for imprinting a substantially uniform pattern on a non-flat substrate. The conformal foil or film master may be mounted to a soft backing, which may be mounted to a rigid backing, to form conformal master structure. When pressed against a non-flat substrate, the conformal foil or film master substantially conforms to the contours and/or topology of the non-flat substrate to provide a substantially uniform pattern thereon.

There is provided a molding apparatus that molds a composition on a substrate by using a mold, characterized by including a control unit configured to control a process of forming a film of the composition between a first surface of the mold and the substrate by bringing the first surface into contact with the composition, and a deforming unit configured to deform the first surface into a convex shape with respect to a substrate side by applying power to a second surface of the mold on an opposite side to the first surface, wherein the control unit controls the deforming unit in the process so as to make power applied to the second surface by the deforming unit after contact between the first surface and the composition larger than power applied to the second surface by the deforming unit before the contact between the first surface and the composition.

A Press element and a method for manufacturing a structured press element, wherein a heterogeneous mask is applied on a metallic base element, after which a surface treatment is carried out and the heterogeneous mask has a certain resistance to the surface treatment.

The present invention relates to a replication tool for replicating an element from a replication material, the replication tool comprising a replication side, a plurality of cavities on the replication side, each defining the shape of one element or a group of elements, the replication tool further comprising at least one bump portion, protruding, on the replication side, from the cavities, and further comprising means for confining the replication material to a predetermined area of the tool, when the tool is pressed against a substrate, which predetermined area exceeds the desired volume of the element in at least one direction along the surface of the substrate.

An imprinting apparatus includes a first conveyer unit, a flexible imprinting mold film and a driving roller set. The first conveyer is adapted to convey a workpiece to a working region of the imprinting apparatus. The flexible imprinting mold film has imprinting segments. At least one of the imprinting segments is located in the working region. The workpiece is adapted to be imprinted in the working region through the corresponding imprinting segment. The flexible imprinting mold film is partially rolled around the driving roller set, the imprinting segment located in the working region is expanded from the driving roller set, and the driving roller set is adapted to drive the flexible imprinting mold film, such that at least another one of the imprinting segments rolled around the driving roller set is expanded from the driving roller set and moved to the working region. Besides, an imprinting method is also provided.