Semiconductor structures including electrical isolation and methods of forming a semiconductor structure including electrical isolation. The structure includes a semiconductor substrate having a first surface, a recess in the first surface, and a second surface inside the first recess. The structure further includes a shallow trench isolation region extending from the first surface into the semiconductor substrate. The shallow trench isolation region is positioned to surround an active device region including the recess. A field-effect transistor includes a gate electrode positioned on a portion of the second surface.

A super junction MOSFET device, including: a substrate having a first conductive type; a buffer layer having the first conductive type and disposed on the substrate; a super junction structure disposed on the buffer layer and including multiple first conductive type pillars and multiple second conductive type pillars alternately arranged in a transverse direction, several second conductive type pillars being partially and/or wholly displaced to provide two or more different transverse dimensions for the first conductive type pillars; a body region having the second conductive type and disposed on a top of the second conductive type pillar; a source structure located within the body region and including a source region having the first conductive type and an ohmic contact region having the second conductive type which contacts with the source region; and a gate structure in contact with the first conductive type pillar and the source structure.

A nanosheet device includes a bottom dielectric isolation formed by a first portion of a high-k dielectric layer above a semiconductor substrate, a spacer material above the first portion of the high-k dielectric layer and a second portion of the high-k dielectric layer above the spacer material. A sequence of semiconductor channel layers are stacked perpendicularly to the semiconductor substrate above the bottom dielectric isolation and are separated by and vertically aligned with a metal gate stack. Source/drain regions extend laterally from opposite ends of the semiconductor channel layers with a bottom surface of the source/drain regions being in direct contact with the bottom dielectric isolation for electrically isolating the source/drain regions from the semiconductor substrate.

A semiconductor structure that includes at least one lateral diffusion field effect transistor is described. The structure includes a source contact and a gate shield that enables the line width of an ohmic region that electrically connects the source/body region to the gate shield to be smaller than the minimum contact feature size. The gate shield defines a bottom recess for forming a narrower bottom portion of the source contact, and a section that flares outward with distance from the ohmic region to extend above and laterally beyond the ohmic region. By providing a wider area for the source contact, the flared portion of the gate shield allows the portion of the gate shield that contacts the ohmic region to be narrower than the minimum contact feature size. As a result, the cell pitch of the lateral diffusion field effect transistor can be reduced.

A silicon carbide (SiC) planar transistor device includes a SiC semiconductor substrate of a first charge type, a SiC epitaxial layer of the first charge type formed at a top surface of the SiC semiconductor substrate, a source structure of the first charge type formed at a top surface of the SiC epitaxial layer, a drain structure of the first charge type formed at a bottom surface of the SiC semiconductor substrate, a gate structure comprising a gate runner and a gate dielectric that covers at least part of the source structure and the gate runner, and a channel region of a second charge type located in vertical direction below the gate structure and adjacent to the source structure. The channel can be formed by performing a plurality of implantation steps so that the channel region comprises a first region and a second region.

Integrated circuits can include semiconductor devices with back-side field plates. The semiconductor devices can be formed on substrates that have conductive layers located within the substrates. The conductive layers can include at least one of a conducting material or a semi-conducting material that modifies an electric field produced by the semiconductor devices. The semiconductor devices can include one or more semiconductor layers that include one or more materials having a compound material that includes at least one Group 13 element and at least one Group 15 element.

A high voltage superjunction MOSFET includes a semiconductor substrate and a semiconductor layer having columns of first and second conductivity. A buffer layer of the first conductivity is between the semiconductor substrate and semiconductor layer. A plug region of the second conductivity is formed at a semiconductor layer surface and extends to the columns. A source/drain region is formed at the semiconductor layer surface and is connected to the plug region. The source/drain region has a concentration of the first conductivity between about 110.sup.19 cm.sup.3 and 1.510.sup.20 cm.sup.3. A body region of the second conductivity is between the source/drain region and the first column and is connected to the plug region. A gate trench is formed in the semiconductor layer surface and extends toward the first column and has a trench gate electrode disposed therein. A dielectric layer separates the trench gate electrode from the first column.

Shielded gate trench MOSFETs with gate trenches separated from termination trenches are disclosed, wherein the termination trenches surrounds outer periphery of gate trenches and do not surround said gate metal pad area; Inner edges of a first termination trench of the termination trenches adjacent to trench ends of the gate trenches have a plurality of wave shape portions in regions between two adjacent trench ends of the gate trenches while outer edges have a straight shape to reduce drain-source leakage current. Each of gate trenches on which has at least one shielded gate trench contact connected to a shielded gate electrode, and the shielded gate trench contact is spaced apart from any of multiple gate metal runners with a distance larger than 100 um.

The disclosure discloses an epitaxial structure of a semiconductor device, as well as a manufacturing method thereof, and a semiconductor device. Therein, the epitaxial structure includes a substrate and an epitaxial layer located on one side of the substrate, and a surface roughness of one side the substrate close to the epitaxial layer is Ra, wherein 0<Ra5 nm. In the epitaxial structure of a semiconductor device as well as the manufacturing method thereof and the semiconductor device provided by the disclosure, by setting the surface roughness Ra on one side of the epitaxial growth of the substrate to satisfy 0<Ra5 nm, a high-quality epitaxial layer can be directly epitaxially grown on the substrate, eliminating the need to arrange a thicker buffer layer and thus reducing thermal resistance, which improves the operating performance of the semiconductor device.

A semiconductor device includes a first-conductivity-type drift region provided in a semiconductor substrate; a trench portion provided from an upper surface of the semiconductor substrate to an inside of the semiconductor substrate, and extending in a predetermined extending direction in a plane of the upper surface of the semiconductor substrate; a mesa portion provided in contact with the trench portion in an array direction orthogonal to the extending direction; a second-conductivity-type base region provided in the mesa portion above the drift region and in contact with the trench portion; and a second-conductivity-type floating region provided in the mesa portion below the base region, in contact with the trench portion, and provided in at least a part of the mesa portion in the array direction.