Patent classifications
H10F39/80373
IMAGING DEVICE MANUFACTURING METHOD
There is provided an imaging device manufacturing method contributing to improved reliability and yield. The method includes forming a first insulating film on a polysilicon film and then removing a portion of the first insulating film formed on a second main surface and a portion of the first insulating film formed on a side surface of the substrate to expose a polysilicon film. After the polysilicon film is exposed, a second insulating film is formed on the first main surface by a plasma chemical vapor deposition (CVD) method.
Imaging device and electronic device
To provide an imaging device capable of high-speed reading. The imaging device includes a photodiode, a first transistor, a second transistor, a third transistor, and a fourth transistor. The back gate electrode of the first transistor is electrically connected to a wiring that can supply a potential higher than a source potential of the first transistor and a potential lower than the source potential of the first transistor. The back gate electrode of the second transistor is electrically connected to a wiring that can supply a potential higher than a source potential of the second transistor. The back gate electrode of the third transistor is electrically connected to a wiring that can supply a potential higher than a source potential of the third transistor and a potential lower than the source potential of the third transistor.
SOLID-STATE IMAGING DEVICE, MANUFACTURING METHOD OF SOLID-STATE IMAGING DEVICE, AND ELECTRONIC DEVICE
The present technology relates to a solid-state imaging device, manufacturing method of a solid-state imaging device, and an electronic device, which can provide a solid-state imaging device having further improved features such as reduced optical color mixing and the like. Also, an electronic device using the solid-state imaging device thereof is provided. According to a solid-state imaging device having a substrate and multiple photoelectric converters that are formed on the substrate, an insulating film forms an embedded element separating unit. The element separating unit is configured of an insulating film having a fixed charge that is formed so as to coat the inner wall face of a groove portion, within the groove portion which is formed in the depth direction from the light input side of the substrate.
IMAGE SENSOR
An image sensor includes a substrate comprising a first face and a second surface which faces the first surface and on which light is incident, a semiconductor photoelectric conversion device on the substrate, a gate electrode located between the first surface of the substrate and the semiconductor photoelectric conversion device and extending in a first direction perpendicular to the first surface, and an organic photoelectric conversion device stacked on the second surface of the substrate.
IMAGE SENSOR AND METHOD OF MANUFACTURING THE SAME
An image sensor includes a first charge storage region of a first conductive type disposed in a substrate, a second charge storage region of a second conductive type disposed on one side of the first charge storage region, a first floating diffusion region spaced apart from the first charge storage region, a second floating diffusion region spaced apart from the second charge storage region, a first transfer gate disposed on the substrate between the first charge storage region and the first floating diffusion region, and a second transfer gate disposed on the substrate between the second charge storage region and the second floating diffusion region.
Solid-state imaging device, method of manufacturing a solid-state imaging device, and electronic apparatus
Provided is a solid-state imaging device including a lamination-type backside illumination CMOS (Complementary Metal Oxide Semiconductor) image sensor having a global shutter function. The solid-state imaging device includes a separation film including one of a light blocking film and a light absorbing film between a memory and a photo diode.
STRUCTURE AND PROCESS FOR OVERTURNED THIN FILM DEVICE WITH SELF-ALIGNED GATE AND S/D CONTACTS
Processes and overturned thin film device structures generally include a metal gate having a concave shape defined by three faces. The processes generally include forming the overturned thin film device structures such that the channel self-aligns to the metal gate and the contacts can be self-aligned to the sacrificial material.
IMAGING DEVICE AND IMAGING SYSTEM
A first voltage line supplies a constant first voltage in column circuits of an imaging device. A second voltage line supplies a second voltage that is lower than the first voltage and is constant. A third voltage line supplies a constant third voltage. A fourth voltage line supplies a fourth voltage that is lower than the third voltage and is constant. The first voltage line is electrically connected to a drain of an NMOS transistor, and the third voltage line is electrically connected to a gate of the NMOS transistor. The second voltage line is electrically connected to a drain of a PMOS transistor, and the fourth voltage line is electrically connected to a gate of the PMOS transistor.
SOLID-STATE IMAGE PICKUP DEVICE, MANUFACTURING METHOD, AND ELECTRONIC APPARATUS
The present disclosure relates to a solid-state image pickup device, a manufacturing method, and an electronic apparatus, which can obtain high charge transfer efficiency from a photoelectric conversion unit to a floating diffusion layer. The floating diffusion layer is arranged in a rectangular shape so as to surround a gate electrode of a vertical transistor whose groove portion is rectangular. A reset drain is formed so as to be adjacent to the floating diffusion layer through a reset gate. A potential of the floating diffusion layer is reset to the same potential as that of the reset drain by applying a predetermined voltage to the reset gate. It is possible to apply the present disclosure to, for example, a CMOS solid-state image pickup device used in an image pickup device such as a camera.
PHOTOELECTRIC CONVERSION APPARATUS AND METHOD OF MANUFACTURING THE SAME
A method of manufacturing a photoelectric conversion apparatus includes forming a first semiconductor region of a first conductivity type in a trench provided in a semiconductor substrate, forming an insulating member on the semiconductor substrate, and forming a second semiconductor region of a second conductivity type that forms a photoelectric conversion portion. The first semiconductor region is present between the second semiconductor region and the insulating member in a direction perpendicular to a depth direction of the semiconductor substrate.