This disclosure provides a negative capacitance gate stack structure with a variable positive capacitor to implement a hysteresis free negative capacitance field effect transistors (NCFETs) with improved voltage gain. The gate stack structure provides an effective ferroelectric negative capacitor by using the combination of a ferroelectric negative capacitor and the variable positive capacitor with semiconductor material (such as polysilicon), resulting in the effective ferroelectric negative capacitor's being varied with an applied gate voltage. Our simulation results show that the NCFET with the variable positive capacitor can achieve not only a non-hysteretic I.sub.D-V.sub.G curve but also a better sub-threshold slope.

An integrated circuit includes a ferroelectric memory cell. The ferroelectric memory cell includes a ferroelectric layer stack comprising at least one ferroelectric material oxide layer. Each of the ferroelectric material oxide layers includes a ferroelectric material that is at least partially in a ferroelectric state. The ferroelectric layer stack comprises at least two ferroelectric domains. Further, the voltage which is to applied to the layer stack to induce polarization reversal differs for the individual domains such that polarization reversal of individual domains or of a portion of the totality of ferroelectric domains within the ferroelectric material of can be attained.

A method used in forming an electronic component comprising conductive material and ferroelectric material comprises forming a non-ferroelectric metal oxide-comprising insulator material over a substrate. A composite stack comprising at least two different composition non-ferroelectric metal oxides is formed over the substrate. The composite stack has an overall conductivity of at least 110.sup.2 Siemens/cm. The composite stack is used to render the non-ferroelectric metal oxide-comprising insulator material to be ferroelectric. Conductive material is formed over the composite stack and the insulator material. Ferroelectric capacitors and ferroelectric field effect transistors independent of method of manufacture are also disclosed.

A three-dimensional (3D) transistor includes a ferroelectric film between the gate and the channel. The 3D transistor can be characterized as a 3D Negative Capacitance (NC) transistor due to the negative capacitance resulting from the ferroelectric film. Performance of the transistor is optimized by manipulating the structure and/or by the selection of materials. In one example, the capacitance of the ferroelectric film (C.sub.FE) is matched to the sum of the gate capacitance (C.sub.MOS) and the gate edge capacitance (C.sub.EDGE), wherein the gate edge capacitance (C.sub.EDGE) is the capacitance at the edge of the gate and between the gate and the source and its extension, and the gate and the drain and its extension.

Methods to utilize piezoelectric materials as a gate dielectric in RBTs in an IC device to generate and sense higher frequency signals with high Qs and resulting devices are disclosed. Embodiments include forming, on an upper surface of a semiconductor layer, RBTs comprising even multiples of sensing RBTs and driving RBTs, each RBT including a piezoelectric gate dielectric layer, a gate, and a dielectric spacer on opposite sides of the piezoelectric gate dielectric layer and gate, wherein at least one pair of sensing RBTs is directly between two groups of driving RBTs; forming metal layers, separated by interlayer dielectric layers, above the RBTs; and forming vias through a dielectric layer above the RBTs connecting the RBTs to a metal layer.

Some embodiments include transistor constructions having a first insulative structure lining a recess within a base. A first conductive structure lines an interior of the first insulative structure, and a ferroelectric structure lines an interior of the first conductive structure. A second conductive structure is within a lower region of the ferroelectric structure, and the second conductive structure has an uppermost surface beneath an uppermost surface of the first conductive structure. A second insulative structure is over the second conductive structure and within the ferroelectric structure. A pair of source/drain regions are adjacent an upper region of the first insulative structure and are on opposing sides of the first insulative structure from one another.

Provided is a three-dimensional semiconductor device and its fabrication method. The semiconductor device includes a first active region on a substrate and including a plurality of lower channel patterns and a plurality of lower source/drain patterns that are alternately arranged along a first direction, a second active region on the first active region and including a plurality of upper channel patterns and a plurality of upper source/drain patterns that are alternately arranged along the first direction, a first gate electrode on a first lower channel pattern of the lower channel patterns and on a first upper channel pattern of the upper channel patterns, and a second gate electrode on a second lower channel pattern of the lower channel patterns and on a second upper channel pattern of the upper channel patterns. The second gate electrode may include lower and upper gate electrodes with an isolation pattern interposed therebetween.

A device includes a substrate, a semiconductor layer and a ferroelectric layer. The semiconductor layer is over the substrate. The semiconductor layer is a single crystal silicon layer or a single crystal germanium layer. The ferroelectric layer is over the semiconductor layer. The ferroelectric layer is in physical contact with the semiconductor layer and has an orthorhombic phase.

A method used in forming an electronic device comprising conductive material and ferroelectric material comprises forming a composite stack comprising multiple metal oxide-comprising insulator materials. At least one of the metal oxide-comprising insulator materials is between and directly against non-ferroelectric insulating materials. The multiple metal oxide-comprising insulator materials are of different composition from that of immediately-adjacent of the non-ferroelectric insulating materials. The composite stack is subjected to a temperature of at least 200 C. After the subjecting, the composite stack comprises multiple ferroelectric metal oxide-comprising insulator materials at least one of which is between and directly against non-ferroelectric insulating materials. After the subjecting, the composite stack is ferroelectric. Conductive material is formed and that is adjacent the composite stack. Devices are also disclosed.

A ferroelectric memory device, a manufacturing method of the ferroelectric memory device and a semiconductor chip are provided. The ferroelectric memory device includes a gate electrode, a ferroelectric layer, a channel layer, first and second blocking layers, and source/drain electrodes. The ferroelectric layer is disposed at a side of the gate electrode. The channel layer is capacitively coupled to the gate electrode through the ferroelectric layer. The first and second blocking layers are disposed between the ferroelectric layer and the channel layer. The second blocking layer is disposed between the first blocking layer and the channel layer. The first and second blocking layers comprise a same material, and the second blocking layer is further incorporated with nitrogen. The source/drain electrodes are disposed at opposite sides of the gate electrode, and electrically connected to the channel layer.