Patent classifications
H10D30/6755
THIN FILM TRANSISTOR, ELECTRONIC DEVICE, MANUFACTURING METHOD OF ELECTRONIC DEVICE, AND DISPLAY DEVICE
The present disclosure provides a thin film transistor, an electronic device, a manufacturing method of electronic device, and display device. The thin film transistor includes a driving circuit layer including a first metal layer, a first insulating layer, a second metal layer, a second insulating layer, and a third metal layer stacked together; wherein one of the first, the second, and the third metal layer is configured to be a gate, and the another two are configured to be a source and a drain; a gate insulating layer disposed on a sidewall of the driving circuit layer, and a semiconductor layer disposed on a surface of the gate insulating layer.
Integrated Assemblies Comprising Hydrogen Diffused Within Two or More Different Semiconductor Materials, and Methods of Forming Integrated Assemblies
Some embodiments include an integrated assembly having a first semiconductor material between two regions of a second semiconductor material. The second semiconductor material is a different composition than the first semiconductor material. Hydrogen is diffused within the first and second semiconductor materials. The conductivity of the second semiconductor material increases in response to the hydrogen diffused therein to thereby create a structure having the second semiconductor material as source/drain regions, and having the first semiconductor material as a channel region between the source/drain regions. A transistor gate is adjacent the channel region and is configured to induce an electric field within the channel region. Some embodiments include methods of forming integrated assemblies.
THIN FILM TRANSISTOR, THIN FILM TRANSISTOR ARRAY PANEL INCLUDING THE SAME, AND METHOD OF MANUFACTURING THE SAME
A thin film transistor according to an exemplary embodiment of the present invention includes an oxide semiconductor. A source electrode and a drain electrode face each other. The source electrode and the drain electrode are positioned at two opposite sides, respectively, of the oxide semiconductor. A low conductive region is positioned between the source electrode or the drain electrode and the oxide semiconductor. An insulating layer is positioned on the oxide semiconductor and the low conductive region. A gate electrode is positioned on the insulating layer. The insulating layer covers the oxide semiconductor and the low conductive region. A carrier concentration of the low conductive region is lower than a carrier concentration of the source electrode or the drain electrode.
DISPLAY PANEL AND ELECTRONIC DEVICE
A display panel includes a substrate including a first opening and a second opening that are spaced apart from each other, a plurality of pixels located in a display area around the first opening and the second opening, each of the plurality of pixels including a pixel circuit including a first thin-film transistor, and a display element connected to the pixel circuit, a bottom metal layer located between the substrate and the first thin-film transistor, emission control lines located on the substrate, extending in a first direction and spaced apart from each other by the first opening and the second opening, and a first conductive layer located in an intermediate area surrounding each of the first opening and the second opening to bypass the first opening and the second opening.
COMPOSITIONALLY-MODULATED CAPPING LAYER FOR A TRANSISTOR AND METHODS FOR FORMING THE SAME
A reduced interfacial defect density and low contact resistance can be provided for a thin film transistor by using a compositionally-modulated capping layer. A stack including a gate electrode, a gate dielectric layer, an active layer including a semiconducting metal oxide material, an in-process capping layer including a dielectric metal oxide material can be formed over a substrate. A dielectric material layer can be formed, and a source cavity and a drain cavity can be formed through the dielectric material layer. Exposed portions of the in-process capping layer can be converted into conductive material portions to provide a compositionally-modulated capping layer, which includes a first conductive capping material portion, the second conductive capping material portion, and a dielectric capping material portion.
Semiconductor device and manufacturing method thereof
A transistor with stable electrical characteristics. A semiconductor device includes a first insulator over a substrate, a second insulator over the first insulator, an oxide semiconductor in contact with at least part of a top surface of the second insulator, a third insulator in contact with at least part of a top surface of the oxide semiconductor, a first conductor and a second conductor electrically connected to the oxide semiconductor, a fourth insulator over the third insulator, a third conductor which is over the fourth insulator and at least part of which is between the first conductor and the second conductor, and a fifth insulator over the third conductor. The first insulator contains a halogen element.
Method for fabricating displaying backplane, displaying backplane and displaying device
The present disclosure provides a displaying backplane and a displaying device, and relates to the technical field of displaying. The displaying backplane includes: a substrate base plate; a first active layer and a second active layer that are provided on the substrate base plate, wherein the material of the first active layer and the second active layer is an oxide semiconductor, the first active layer has a first channel region and first no-channel regions, and the second active layer has a second channel region and second no-channel regions; a first grid insulating layer covering the first active layer and the second active layer; and a first grid and a second grid that are provided on the first grid insulating layer; wherein the oxygen-vacancy concentration of the first channel region is greater than the oxygen-vacancy concentrations of the first no-channel regions, the second no-channel regions and the second channel region.
Dual gate control for trench shaped thin film transistors
Disclosed herein are dual gate trench shaped thin film transistors and related methods and devices. Exemplary thin film transistor structures include a non-planar semiconductor material layer having a first portion extending laterally over a first gate dielectric layer, which is over a first gate electrode structure, and a second portion extending along a trench over the first gate dielectric layer, a second gate electrode structure at least partially within the trench, and a second gate dielectric layer between the second gate electrode structure and the first portion.
Semiconductor device
A semiconductor device includes a thin-film transistor. The thin-film transistor comprises an oxide semiconductor layer, a gate insulating layer, a gate electrode overlapped on the oxide semiconductor layer through the gate insulating layer, a source electrode in contact with the oxide semiconductor layer, a drain electrode in contact with the oxide semiconductor layer and a first metal layer in contact with the oxide semiconductor layer and disposed between the source electrode and the drain electrode at a distance from the source electrode and the drain electrode.
Semiconductor device and method for manufacturing the same
A region containing a high proportion of crystal components and a region containing a high proportion of amorphous components are formed separately in one oxide semiconductor film. The region containing a high proportion of crystal components is formed so as to serve as a channel formation region and the other region is formed so as to contain a high proportion of amorphous components. It is preferable that an oxide semiconductor film in which a region containing a high proportion of crystal components and a region containing a high proportion of amorphous components are mixed in a self-aligned manner be formed. To separately form the regions which differ in crystallinity in the oxide semiconductor film, first, an oxide semiconductor film containing a high proportion of crystal components is formed and then process for performing amorphization on part of the oxide semiconductor film is conducted.