A semiconductor device includes: a semiconductor substrate; an epitaxial layer or layer stack on the semiconductor substrate; a plurality of transistor cells of a first type formed in a first region of the epitaxial layer or layer stack and electrically coupled in parallel to form a vertical power transistor; a plurality of transistor cells of a second type different than the first type and formed in a second region of the epitaxial layer or layer stack; and an isolation structure that laterally and vertically delimits the second region of the epitaxial layer or layer stack. Sidewalls and a bottom of the isolation structure include a dielectric material that electrically isolates the plurality of transistor cells of the second type from the plurality of transistor cells of the first type in the epitaxial layer or layer stack. Methods of producing the semiconductor device are also described.

This disclosure provides a semiconductor structure and a method of forming buried field plate structures. The semiconductor structure includes a substrate, buried field plate structures, and a gate. The substrate incudes a first surface and a second surface opposite the first surface. Each of the buried field plate structures include a conductive structure and an insulation structure surrounding the conductive structure. The gate is embedded in the substrate and extend into the substrate from the first surface of the substrate, wherein the gate is configured between the two neighboring buried field plate structures. The conductive structure includes portions arranging along a direction perpendicular to the first surface of the substrate and having different widths in a direction parallel to the first surface of the substrate.

An embodiment semiconductor device includes a conductive region extending in a first direction and a second direction intersecting the first direction and stacked in a third direction intersecting the first direction and the second direction and a termination region at an end of the conductive region in the first direction, wherein the termination region includes an n+ type substrate, an n type layer disposed on an upper surface of the n+ type substrate and having a plurality of first trenches opening upward in the third direction, and a lower gate runner covering the plurality of first trenches and disposed on an upper surface of the n type layer.

The trench structure part includes a field plate electrode, a first insulating film, a second insulating film, the second insulating film extending to be more proximate to the first surface than the first insulating film, a gate electrode including a first portion located on the second insulating film, and a second portion located on the first insulating film, the second portion being thicker than the first portion, and a third insulating film. The gate contact part extends from the gate wiring layer toward the second portion and contacts the second portion. The gate contact part is not positioned between the first portion and the gate wiring layer. The first portion is positioned adjacent, in a second direction orthogonal to the first direction, to a lower end portion of the gate contact part contacting the second portion.

A field plate electrode FP and a gate electrode GE are formed inside a plurality of trenches TR1. An outer peripheral trench TR2 surrounds the plurality of trenches TR1 in plan view. A field plate electrode FP (lead-out portion FPa) is formed inside the outer peripheral trench TR2. The outer peripheral trench TR2 has an extending part TR2a extending in the Y direction, an extending part TR2b extending in the X direction, and a corner part TR2c extending in a direction different from the X and Y directions in plan view and connecting the extending part TR2a and the extending part TR2b. In the Y-direction, the distance L2 between the end part 10 of the closest trench TR1 closest to the extending part TR2a and the extending part TR2b is longer than the distance L3 between the end part 10 of the other trench TR1 and the extending part TR2b.

We herein describe a semiconductor device comprising a first element portion formed on a substrate, the first element portion being an operating region of an insulated gate bipolar transistor (IGBT) and a second element portion formed on the substrate, the second element portion being an operating region of a diode. The first element portion comprises a first collector region of a second conductivity type, a drift region of a first conductivity type located over the first collector region, and formed by the semiconductor substrate, a first body region of a first conductivity type located over the drift region, a second body region of a second conductivity type located over the drift region, at least one first contact region of a first conductivity type located above the second body region and having a higher doping concentration compared to the first body region, at least one second contact region of a second conductivity type located laterally adjacent to the at least one first contact region, the at least one second contact region having a higher doping concentration than the second body region, a first plurality of trenches extending from a surface through the second body region of a second conductivity type into the drift region wherein the at least one first contact region adjoins at least one of the plurality of trenches so that, in use, a channel region is formed along said at least one trench of the first plurality of trenches and within the body region of a second conductivity type. A first trench of the first plurality of trenches is laterally spaced from a second trench of the first plurality of trenches by a first distance. The second element portion comprises a second collector region of a second conductivity type, the drift region of a first conductivity type located over the second collector region, a third body region of a second conductivity type located over the drift region, a second plurality of trenches extending from a surface through the third body region into the drift region. A first trench of the second plurality of trenches is laterally spaced from a second trench of the second plurality of trenches by a second distance, and the first distance is larger than the second distance. The semiconductor device further comprises a first terminal contact, wherein the first terminal contact is electrically connected to the at least one first contact region of a first conductivity type and the body region of a second conductivity type and a second terminal contact, wherein the second terminal contact is electrically connected to the first collector region and the second collector region.

The present disclosure provides a trench field effect transistor structure and a manufacturing method thereof. The manufacturing method includes: providing a substrate (100), forming an epitaxial layer (101), forming a device trench (102) in the epitaxial layer, and forming a shielding dielectric layer (107), a shielding gate layer (105), a first isolation dielectric layer (108), a gate dielectric layer (109), a gate layer (110), a second isolation dielectric layer (112), a body region (114), a source (115), a source contact hole (118), a source electrode structure (122), and a drain electrode structure (123). During manufacturing of a trench field effect transistor structure, a self-alignment process is adopted in a manufacturing process, so that a cell pitch is not limited by an exposure capability and alignment accuracy of a lithography machine, to further reduce the cell pitch of the device, improve a cell density, and reduce a device channel resistance.

A semiconductor device includes substrate, a first gate structure, a second gate structure, and an epitaxy layer. The first gate structure and the second gate structure are over the substrate, in which the first gate structure and the second gate structure each comprises a shielding electrode, a gate electrode over the shielding electrode, and a first gate dielectric layer vertically separating the shielding electrode from the gate electrode. The epitaxy layer is over the substrate and cups an underside of the first gate structure and the second gate structure, in which the epitaxy layer comprises a doped region laterally between the first gate dielectric layer of the first gate structure and the first gate dielectric layer of the second gate structure, a dopant concentration of the doped region being non-uniform along a lateral direction.

An electronic device can include a substrate, an active region of a transistor, and a shield electrode. The substrate can define a trench and include a mesa adjacent to the trench, and the shield electrode can be within the trench. In an embodiment, the electronic device can further include an active region of a transistor within the mesa and an insulating layer including a thicker section and a thinner section closer to a bottom of the trench. In another embodiment, the electronic device can include a body region and a doped region within the mesa and spaced apart from the body region by a semiconductor region. The doped region can have a dopant concentration that is higher than a dopant concentration of the semiconductor region and a portion of the substrate underlying the doped region.

A power transistor is formed by a plurality of transistor cells electrically connected in parallel. Each transistor cell includes a gate structure including a gate electrode coupled to a control terminal and a gate dielectric stack, the gate dielectric stack including a ferroelectric insulator. A method of operating the power transistor includes: switching the power transistor in a normal operating mode by applying a switching control signal to the control terminal, the switching control signal having a maximum voltage and a minimum voltage; and setting the ferroelectric insulator into a defined polarization state by applying a first voltage pulse to the control terminal, the first voltage pulse exceeding the maximum voltage of the switching control signal.