Patent classifications
H10D30/0221
Semiconductor device and method for manufacturing the same
A semiconductor device and a method for manufacturing the same are provided. The semiconductor device includes a well region, a drain region and a source region disposed in the well region, a gate electrode disposed above the well region, a thin gate insulating layer and a thick gate insulating layer disposed under the gate electrode, the thick gate insulating layer being disclosed closer to the drain region than the thin gate insulating layer, and an extended drain junction region disposed below the gate electrode.
Integrated Circuitry and Methods of Forming Transistors
Some embodiments include integrated circuits having first and second transistors. The first transistor is wider than the second transistor. The first and second transistors have first and second active regions, respectively. Dielectric features are associated with the first active region and break up the first active region. The second active region is not broken up to the same extent as the first active region. Some embodiments include methods of forming transistors. Active areas of first and second transistors are formed. The active area of the first transistor is wider than the active area of the second transistor. Dielectric features are formed in the active area of the first transistor. The active area of the first transistor is broken up to a different extent than the active area of the second transistor. The active areas of the first and second transistors are simultaneously doped.
Semiconductor device having buried gate structure, method for manufacturing the same, memory cell having the same, and electronic device having the same
A method for forming a semiconductor structure includes forming a trench in a semiconductor substrate; forming a first dielectric layer over a bottom surface and sidewalls of the trench; forming a second dielectric layer over the first dielectric layer; forming a sacrificial layer that fills the trench, over the second dielectric layer; etching the sacrificial layer and the second dielectric layer, and forming a sacrificial filler and a dielectric liner that are positioned in the trench; removing the sacrificial filler; forming a conductive layer that fills the trench, over the dielectric liner and the first dielectric layer; and etching the conductive layer to be buried in the trench.
Methodology and structure for field plate design
The present disclosure relates to a high voltage transistor device having a field plate, and a method of formation. In some embodiments, the high voltage transistor device has a gate electrode disposed over a substrate between a source region and a drain region located within the substrate. A dielectric layer laterally extends from over the gate electrode to a drift region arranged between the gate electrode and the drain region. A field plate is located within a first inter-level dielectric layer overlying the substrate. The field plate laterally extends from over the gate electrode to over the drift region and vertically extends from the dielectric layer to a top surface of the first ILD layer. A plurality of metal contacts, having a same material as the field plate, vertically extend from a bottom surface of the first ILD layer to a top surface of the first ILD layer.
Semiconductor device and method of manufacturing the same
A semiconductor device includes a semiconductor substrate, and a P-well and an N-type drift region disposed in the semiconductor substrate. The P-well includes a lower well region and an upper well region disposed above the lower well region. The lower well region includes a first surface that is near the N-type drift region, and the upper well region includes a second surface that is near the N-type drift region. A distance from the first surface of the lower well region to the N-type drift region is greater than a distance from the second surface of the upper well region to the N-type drift region.
REDUCED AREA POWER DEVICES USING DEEP TRENCH ISOLATION
An integrated circuit including an isolated device which is isolated with a lower buried layer combined with deep trench isolation. An upper buried layer, with the same conductivity type as the substrate, is disposed over the lower buried layer, so that electrical contact to the lower buried layer is made at a perimeter of the isolated device. The deep trench isolation laterally surrounds the isolated device. Electrical contact to the lower buried layer sufficient to maintain a desired bias to the lower buried layer is made along less than half of the perimeter of the isolated device, between the upper buried layer and the deep trench.
SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
To provide an LDMOS semiconductor device having improved properties. A semiconductor device having a source region and a drain region, a channel formation region, a drain insulating region between the channel formation region and the drain region, and a gate electrode is provided. The drain insulating region has a slit exposing therefrom an active region and this slit is placed on the side of the channel formation region with respect to the center of the drain insulating region. This active region is formed as an n type semiconductor region. Such a configuration enables relaxation of an electric field of the drain insulating region on the side of the channel formation region (on the side of the source region). The generation number of hot carriers (hot electrons, hot holes) can therefore be reduced. As a result, a semiconductor device having improved HCI-related properties can be obtained.
SEMICONDUCTOR DEVICE
An improvement is achieved in the performance of a semiconductor device. The semiconductor device includes a coupling transistor made of a p-channel MOSFET and formed in an n.sup.-type semiconductor region over a base made of a p-type semiconductor. The coupling transistor has a resurf layer as a p-type semiconductor region and couples a lower-voltage circuit region to a higher-voltage circuit region to which a power supply potential higher than the power supply potential supplied to the lower-voltage circuit region is supplied. The semiconductor device has a p-type semiconductor region formed in the portion of the n.sup.-type semiconductor region which surrounds the coupling transistor in plan view.
HIGH VOLTAGE TRANSISTOR WITH REDUCED ISOLATION BREAKDOWN
Devices and methods for forming a device are disclosed. The device includes a substrate with a device region having a length and a width direction. An isolation region surrounds the device region of which an isolation edge abuts the device region. A transistor is disposed in the device region. The transistor includes a gate disposed between first and second source/drain (S/D) regions. A silicide block is disposed on the transistor. The silicide block covers at least the isolation edge adjacent to the gate. The silicide block prevents formation of a silicide contact at least at the isolation edge adjacent to the gate.
ELECTRONIC DEVICE INCLUDING A DRIFT REGION, A DRAIN REGION, AND A RESURF REGION AND A PROCESS OF FORMING THE SAME
An electronic device can include a semiconductor layer having a primary surface, a drift region adjacent to the primary surface, a drain region adjacent to the drift region and extending deeper into the semiconductor layer as compared to the drift region, a resurf region spaced apart from the primary surface, an insulating layer overlying the drain region, and a contact extending through the insulating layer to the drain region. In an embodiment, the drain region can include a sinker region that allows a bulk breakdown to the resurf region to occur during an overvoltage event where the bulk breakdown occurs outside of the drift region, and in a particular embodiment, away from a shallow trench isolation structure or other sensitive structure.