A semiconductor device includes an n.sup.+ type silicon carbide substrate, and in the substrate an active region where primary current flows and an edge termination area surrounding the active region. The semiconductor device has a first p-type region and a second p-type region in the edge termination area, and the first p-type region includes therein a plurality of third p-type regions, and the second p-type region includes therein a plurality of fourth p-type regions. The widths between the respective plurality of third p-type regions and the widths between the respective plurality of fourth p-type regions become greater further away from the active region.

This invention discloses a method for manufacturing a semiconductor power device in a semiconductor substrate comprises an active cell area and a termination area. The method comprises the steps of a) growing and patterning a field oxide layer in the termination area and also in the active cell area on a top surface of the semiconductor substrate b) depositing and patterning a polysilicon layer on the top surface of the semiconductor substrate at a gap distance away from the field oxide layer; c) performing a blank body dopant implant to form body dopant regions in the semiconductor substrate substantially aligned with the gap area followed by diffusing the body dopant regions into body regions in the semiconductor substrate; d) implanting high concentration body-dopant regions encompassed in and having a higher dopant concentration than the body regions and e) applying a source mask to implant source regions having a conductivity opposite to the body region with the source regions encompassed in the body regions and surrounded by the high concentration body-dopant regions.

A trench power transistor is provided. The trench gate structure of the trench power transistor includes at least one insulting layer, a gate electrode, and a shielding electrode, which are disposed in a trench of an epitaxial layer. The insulating layer formed on an inner wall of the active trench to isolate an epitaxial layer from the gate and the shielding electrodes. The insulating layer includes a first dielectric layer, a second dielectric layer and a third dielectric layer. The first and second dielectric layers extend from an upper portion of the inner wall to a lower portion of the inner wall of the active trench. The third dielectric layer is formed on the second dielectric layer and located at the lower portion of the active trench. A portion of the second dielectric layer is interposed between the first and third dielectric layers.

A silicon carbide substrate includes a first impurity region, a well region in contact with the first impurity region, and a second impurity region separated from the first impurity region by the well region. A first main surface includes a first region in contact with a channel region, and a second region different from the first region. A silicon-containing material is formed on the second region. A first silicon dioxide region is formed on the first region. A second silicon dioxide region is formed by oxidizing the silicon-containing material. A gate runner is electrically connected to a gate electrode and formed in a position facing the second silicon dioxide region. Consequently, a silicon carbide semiconductor device capable of achieving improved insulation performance between the gate runner and the substrate while the surface roughness of the substrate is suppressed, and a method of manufacturing the same can be provided.

A silicon carbide semiconductor device includes a silicon carbide layer 32 of a first conductivity type, a silicon carbide layer 36 of a second conductivity type, a gate trench 20, a gate electrode 79 provided in the gate trench 20, and a protection trench 10 formed to a depth greater than the gate trench 20. A region in the horizontal direction that includes both the gate trench 20 and a protection trench 10 that surrounds the gate trench 20 with at least a part of the gate trench 20 left unenclosed is a cell region, and a region in the horizontal direction that includes a protection trench 10 and in which a gate pad 89 or a lead electrode connected to the gate pad is disposed is a gate region.

A ground working tool comprising a tubular base body with an inner receiving space for receiving a cylindrical core of solid ground material, connector mechanism for connecting the tubular base body with a rotary drive and locking mechanism for locking the core in the receiving space of the tubular base body. The locking mechanism involves at least one locking unit having a guide rail being disposed at an inner side of the tubular base body and arranged with a deviation angle relative to a tangential direction of the tubular base body and the locking unit further comprises at least one locking element, which is moveably mounted on the guide rail between a radially outer releasing position and a radially inner locking position, in which the core is clamped within the receiving space by means of the at least one locking element.

An electronic device is integrated on a chip of semiconductor material having a main surface and a substrate region with a first type of conductivity. The electronic device has a vertical MOS transistor, formed in an active area having a body region with a second conductivity type. A set of one or more cells each one having a source region of the first conductivity, a gate region of electrically conductive material in a gate trench extending from the main surface in the body region and in the substrate region, and an insulating gate layer, and a termination structure with a plurality of termination rings surrounding at least part of the active area on the main surface, each termination ring having a floating element of electrically insulating material in the termination trench extending from the main surface in the chip and at least one bottom region of said semiconductor material of the second conductivity type extending from at least one deepest portion of a surface of the termination trench in the chip; the termination trenches have a depth from the main surface decreasing moving away from the active area.

When hydrogen penetrates in to the semiconductor device, a gate voltage threshold of a gate structure (Vth) is shifted.

Penetrating of hydrogen into the semiconductor device from the edge termination structure section which is positioned at an end portion of the semiconductor device is prevented.

To provide a semiconductor device comprising a semiconductor substrate in which an active region and an edge termination structure section which is provided around the active region are provided, a first lower insulating film which is provided in the edge termination structure section on the semiconductor substrate, and a first protective film which is provided on the first lower insulating film, and is electrically insulated from the semiconductor substrate, and occludes hydrogen.

Provided is a semiconductor device including a semiconductor substrate, an electrode provided on a front surface of the semiconductor substrate, where the electrode contains aluminum, a barrier layer provided between the semiconductor substrate and the electrode. Here, the barrier layer includes a first titanium nitride layer, a first titanium layer, a second titanium nitride layer and a second titanium layer in a stated order with the first titanium nitride layer being positioned closest to the semiconductor substrate.

A gate-all around fin double diffused metal oxide semiconductor (DMOS) devices and methods of manufacture are disclosed. The method includes forming a plurality of fin structures from a substrate. The method further includes forming a well of a first conductivity type and a second conductivity type within the substrate and corresponding fin structures of the plurality of fin structures. The method further includes forming a source contact on an exposed portion of a first fin structure. The method further comprises forming drain contacts on exposed portions of adjacent fin structures to the first fin structure. The method further includes forming a gate structure in a dielectric fill material about the first fin structure and extending over the well of the first conductivity type.