The present disclosure relates to semiconductor structures and, more particularly, to devices with a metal field plate extension and methods of manufacture. The structure includes: a gate structure over a semiconductor substrate; a drift region under the gate structure; a source region adjacent to the gate structure; a drain region in the drift region; a isolation structure within the drift region; and a contact extending from the source region and into the isolation structure within the drift region.

A process for fabricating a semiconductor structure is disclosed. The process includes: forming an isolation trench in a substrate; forming a trench fill layer to at least fill the isolation trench in the substrate, the silicon oxide trench fill layer comprising a portion in contact with the substrate below an upper surface of the substrate; exposing a sidewall of the isolation trench and without exposing a bottom of the isolation trench in the substrate; and forming a gate structure over the substrate, wherein the gate structure contacts the sidewall of the isolation trench.

A method of fabricating a semiconductor device is disclosed. A semiconductor substrate is provided. A high-voltage well and a pre-recessed region are formed in the semiconductor substrate. A drift region is formed in the high-voltage well. A recessed channel region is formed adjacent to the drift region. A heavily doped drain region is formed in the drift region and spaced apart from the recessed channel region. An isolation structure is formed between the recessed channel region and the heavily doped drain region in the drift region. The isolation structure overlaps with the pre-recessed region. A buried gate dielectric layer is formed on the recessed channel region. A top surface of the buried gate dielectric layer is lower than a top surface of the heavily doped drain region. A gate is formed on the buried gate dielectric layer.

The present disclosure relates to an integrated chip. The integrated chip includes a source region disposed within a semiconductor substrate and a drain region disposed within the semiconductor substrate and separated from the source region. A gate electrode is disposed within the semiconductor substrate between the source region and the drain region. The gate electrode includes a base region and a plurality of gate extensions. The plurality of gate extensions are laterally between the base region and the drain region. An inter-level dielectric structure is disposed on an upper surface of the semiconductor substrate and surrounds one or more interconnects. The base region and the plurality of gate extensions are below the upper surface of the semiconductor substrate.

In the present invention, in a FinFET having a channel forming region on a surface of a fin that is a semiconductor layer protruding on an upper surface of a substrate, a channel at a corner of the fin is prevented from becoming an ON state with a low voltage and a steep ON/OFF operation is made possible. As a means thereof, in a MOSFET that has a plurality of trenches, each of which have embedded therein a gate electrode, on an upper surface of an n-type epitaxial substrate provided with a drain region on a bottom surface and that has a channel region formed on a surface of a fin which is a protrusion part between the trenches adjacent to each other, a p-type body layer that constitutes a lateral surface of the fin, and a p.sup.+-type semiconductor region that constitutes a corner which is an end of the upper surface of the fin, are formed.

A gate-all-around (GAA) high voltage transistor of the laterally double-diffused metal-oxide semiconductor (LDMOS) type has a loop-shaped gate electrode disposed below a surface of a semiconductor substrate. The loop-shaped gate electrode surrounds a vertical channel formed by a first source/drain region, a body region, and a diffusion region. The first source/drain region is on top, the body region is in the middle, and the diffusion region is underneath. A loop-shaped shallow trench isolation (STI) region surrounds the loop-shaped gate electrode. The diffusion region begins inside the loop-shaped gate electrode, extends under the loop-shaped gate electrode and the loop-shaped STI region, and rises outside the loop-shaped STI region to join with a second source/drain region. This structure allows pitch to be reduced by 40% or linear drive current to be doubled in comparison to an asymmetric NMOS transistor providing otherwise equivalent functionality.

A semiconductor structure is disclosed. The semiconductor structure includes: a substrate; an isolation region and a gate structure extending into the substrate, wherein a portion of the gate structure below a top surface of the substrate abuts the isolation region. An associated method for fabricating the semiconductor structure is also disclosed.

Structures for a junction field-effect transistor and methods of forming a structure for a junction field-effect transistor. The structure comprises a first gate on a top surface of a semiconductor substrate, a second gate beneath the top surface of the semiconductor substrate, and a channel region in the semiconductor substrate. The first gate is positioned between a source and a drain, and the channel region positioned between the first gate and the second gate.

A semiconductor structure and a method for manufacturing a semiconductor structure are provided. The semiconductor structure includes: a substrate; a gate trench located in the substrate; a gate oxide layer located on a side wall and a bottom of the gate trench; and a gate conductive layer located on a surface of the gate oxide layer, a top of the gate conductive layer being lower than a top of the gate trench. The gate oxide layer includes an ion implantation area. A bottom of the ion implantation area is higher than a bottom of the gate conductive layer and lower than the top of the gate conductive layer, and a top of the ion implantation area is higher than or flush with the top of the gate conductive layer.

A method of manufacturing a silicon carbide semiconductor power device is provided. In the method, the power device in high voltage (HV) region and CMOS device in the low voltage (LV) region are formed together, so the cost and time can be saved efficiently. First, a first drift layer is formed on a substrate, and then a shielding region is formed in the first drift layer. The shielding region includes a continuous region in the LV region. Then, a second drift layer is formed on the first drift layer. A pick-up region is formed in the second drift layer, wherein the pick-up region connects to the continuous region of the shielding region, and then NMOS and PMOS in the LV region and the power device in HV region are formed simultaneously. NMOS and PMOS are surrounded by the pick-up region and the continuous region, thereby minimizing body effect.