The switching device includes an electron transport layer; an electron supply layer provided on the electron transport layer and being in contact with the electron transport layer by heterojunction; a source electrode being in contact with the electron supply layer; a drain electrode being in contact with the electron supply layer at a position spaced from the source electrode; and a first gate electrode provided above the electron supply layer, and provided between the source electrode and the drain electrode when viewed in a plan view from above. The first gate electrode is electrically connected above the electron supply layer to the drain electrode. An on-resistance of the switching device is lower than an electric resistance between the first gate electrode and the drain electrode.

A circuit including a semiconductor device having a set of space-charge control electrodes is provided. The set of space-charge control electrodes is located between a first terminal, such as a gate or a cathode, and a second terminal, such as a drain or an anode, of the device. The circuit includes a biasing network, which supplies an individual bias voltage to each of the set of space-charge control electrodes. The bias voltage for each space-charge control electrode can be: selected based on the bias voltages of each of the terminals and a location of the space-charge control electrode relative to the terminals and/or configured to deplete a region of the channel under the corresponding space-charge control electrode at an operating voltage applied to the second terminal.

A power semiconductor device comprising a first metal electrode and a second metal electrode formed on a first substrate surface of a semiconductor substrate, a semi-insulating field plate interconnecting said first and second metal electrodes, and an insulating oxide layer extending between said first and second metal electrodes and between said field plate and said semiconductor substrate, wherein said semi-insulating field plate is a titanium nitride (TiN) field plate.

A III-nitride power semiconductor device that includes a field relaxation feature to relax the electric fields around the gate thereof to improve the breakdown voltage of the device.

A semiconductor structure is disclosed. The semiconductor structure includes a source trench in a drift region, the source trench having a source trench dielectric liner and a source trench conductive filler surrounded by the source trench dielectric liner, a source region in a body region over the drift region. The semiconductor structure also includes a patterned source trench dielectric cap forming an insulated portion and an exposed portion of the source trench conductive filler, and a source contact layer coupling the source region to the exposed portion of the source trench conductive filler, the insulated portion of the source trench conductive filler increasing resistance between the source contact layer and the source trench conductive filler under the patterned source trench dielectric cap. The source trench is a serpentine source trench having a plurality of parallel portions connected by a plurality of curved portions.

A semiconductor device, including a first nitride semiconductor layer, a second nitride semiconductor layer provided on the first nitride semiconductor layer and having a band gap width larger than or equal to a band gap width of the first nitride semiconductor layer, first, second, and third electrodes provided on the second nitride semiconductor layer, an insulation layer provided on the second nitride semiconductor layer and between the first and second electrodes, and a conductor provided within the insulation layer between the second and third electrodes and connecting the second and third electrodes to each other, or the conductor provided within the insulation layer between the first and second electrodes and connecting the first and second electrodes to each other, the conductor including-a plurality of conductive regions arranged in a first direction from the first electrode toward the second electrode, the conductive regions being electrically connected to one another.

An improvement is achieved in the performance of a semiconductor device. The semiconductor device includes a coupling transistor made of a p-channel MOSFET and formed in an n.sup.-type semiconductor region over a base made of a p-type semiconductor. The coupling transistor has a resurf layer as a p-type semiconductor region and couples a lower-voltage circuit region to a higher-voltage circuit region to which a power supply potential higher than the power supply potential supplied to the lower-voltage circuit region is supplied. The semiconductor device has a p-type semiconductor region formed in the portion of the n.sup.-type semiconductor region which surrounds the coupling transistor in plan view.

A high electron mobility transistor comprising: an epitaxial substrate comprising a semi-insulating substrate, a buffer layer and a barrier layer sequentially stacked; a first and a second current conducting electrode formed on, and in ohmic contact with, the barrier layer; a control gate and one or more field plate electrode(s) formed on, and in contact with, the barrier layer between the first and second current conducting electrodes; and an electric circuit formed for electrically connecting each field plate electrode to an electric reference potential and comprising at least a rectifying contact and/or an electric resistor, wherein the rectifying contact is formed outside the channel area of the high electron mobility transistor and is distinguished from the rectifying contact formed by the corresponding field plate electrode.

Semiconductor devices and methods for fabricating semiconductor devices are provided. In one example, a semiconductor device includes a semiconductor structure. An electrically semi-insulating passivation layer overlies the semiconductor structure. An electrically substantially fully insulating passivation layer overlies the electrically semi-insulating passivation layer.

The present invention generally relates to a structure and manufacturing of a power field effect transistor (FET). The present invention provides a planar power metal oxide semiconductor field effect transistor (MOSFET) structure and an insulated gate bipolar transistor (IGBT) structure comprising a split gate and a semi-insulating field plate. The present invention also provides manufacturing methods of the structures.