A novel integrated circuit and method thereof are provided. The integrated circuit includes a plurality of first interconnect pads, a plurality of second interconnect pads, a first inter-level dielectric layer, a thin film resistor, and at least two end-caps. The end-caps, which are connectors for the thin film resistor, are positioned at the same level with the plurality of second interconnect pads. Therefore, an electrical connection between the end-caps and the plurality of second interconnect pads can be formed by directly connection of them. An integrated circuit with a thin film resistor can be made in a cost benefit way accordingly, so as to overcome disadvantages mentioned above.

A semiconductor device includes a first dielectric film, a resistor element disposed on the first dielectric film, and a second dielectric film disposed on the resistor element. The resistor element contains silicon, chromium, and carbon. The silicon concentration in the resistor element increases from a center part of the resistor element towards an upper surface of the resistor element, and also increases from the center part of the resistor element towards a lower surface of the resistor element.

A semiconductor arrangement comprising; a die of III-V semiconductor material; a resistor element integrated in the die, the resistor element comprising a track defined by a first implant material in the III-V semiconductor material of the die, said track electrically isolated from substantially the remainder of the die by an isolation region that surrounds the track.

An interlayer insulating film is disposed on a LOCOS oxide film covering an n-type drift region of a JFET. A polysilicon resistor having a spiral planar shape is disposed in the interlayer insulating film. A spiral wire in an outermost circumference of the polysilicon resistor is covered by a source electrode wire that extends on the interlayer insulating film. An end of the polysilicon resistor is electrically connected to a drain electrode wire. A ground terminal wire and a voltage division terminal wire are electrically connected to a spiral wire farther on an inner circumference side by one or more wires than the spiral wire. A portion farther on an inner circumference side than the spiral wire is used as a resistive element, and voltage for an input pad of the JFET is thereby divided to be taken out as a potential of the voltage division terminal wire.

A method of forming an on-chip heat sink includes forming a device on a substrate. The method also includes forming a plurality of insulator layers over the device. The method further includes forming a heat sink in at least one of the plurality of insulator layers and proximate to the device. The heat sink includes a reservoir of phase change material having a melting point temperature that is less than an upper limit of a design operating temperature of the chip.

An integrated circuit contains three thin film resistors over a dielectric layer. The first resistor body includes only a bottom thin film layer and the first resistor heads include the bottom thin film layer, a middle thin film layer and a top thin film layer. The second resistor body and heads include all three thin film layers. The third resistor body does not include the middle thin film layer. The three resistors are formed using two etch masks.

A method includes forming an insulating carrier substrate, forming a shallow trench isolation region within the insulating carrier substrate, and forming a plurality of gate recesses on the shallow trench isolation region. The plurality of gate recesses is formed by forming a plurality of dummy gates on the shallow trench isolation region and etching the plurality of dummy gates. The method further includes depositing a metal resistor layer within the plurality of gate recesses.

A chip resistor has a substrate, a first connection electrode and a second connection electrode that are formed on the substrate, and a resistor network that is formed on the substrate and that has ends one of which is connected to the first connection electrode and the other one of which is connected to the second connection electrode. The resistor network is provided with a resistive circuit. The resistive circuit has a resistive element film line that is provided along inner wall surfaces of trenches. The resistive element film line extending along the inner wall surfaces of the trenches is long and has a high resistivity as a unit resistive element.

A semiconductor device is made by depositing an encapsulant material between first and second plates of a chase mold to form a molded substrate. A first conductive layer is formed over the molded substrate. A resistive layer is formed over the first conductive layer. A first insulating layer is formed over the resistive layer. A second insulating layer is formed over the first insulating layer, resistive layer, first conductive layer, and molded substrate. A second conductive layer is formed over the first insulating layer, resistive layer, and first conductive layer. A third insulating layer is formed over the second insulating layer and second conductive layer. A bump is formed over the second conductive layer. The first conductive layer, resistive layer, first insulating layer, and second conductive layer constitute a MIM capacitor. The second conductive layer is wound to exhibit inductive properties.

In some embodiments of the present disclosure, a method for manufacturing a thin film resistor after completing a copper chemical mechanical polishing (CMP) process on a copper process module may include: depositing a dielectric barrier layer across at least two structures; depositing a second dielectric layer atop the dielectric barrier as a hard mask; patterning a trench using photo lithography; etching the trench through the hard mask and stopping in or on the dielectric barrier; removing any remaining photoresist from the photo lithography process; etching the trench through the dielectric barrier thereby exposing a copper surface for each of the at least two copper structures; and depositing thin-film resistor material into the trench and bridging across the resulting at least two exposed copper surfaces.