H10D62/307

Lateral double diffused metal oxide semiconductor field-effect transistor

A lateral double diffused metal oxide semiconductor field-effect transistor includes semiconductor substrates, body regions positioned in the semiconductor substrates, drift regions positioned in the semiconductor substrates, source regions and a body leading-out region which are positioned in the body regions and spaced from the drift regions, a field region and drain regions which are positioned in the drift regions, and gates positioned on the surfaces of the semiconductor substrates to partially cover the body regions, the drift regions and the field region, wherein the field region is of a finger-like structure and comprises a plurality of strip field regions which extend from the source regions to the drain regions and are isolated by the active regions; and the strip field regions provided with strip gate extending regions extending from the gates.

Transistor structure with improved unclamped inductive switching immunity

A laterally diffused metal oxide semiconductor (LDMOS) transistor structure with improved unclamped inductive switching immunity. The LDMOS includes a substrate and an adjacent epitaxial layer both of a first conductivity type. A gate structure is above the epitaxial layer. A drain region and a source region, both of a second conductivity type, are within the epitaxial layer. A channel is formed between the source and drain region and arranged below the gate structure. A body structure of the first conductivity type is at least partially formed under the gate structure and extends laterally under the source region, wherein the epitaxial layer is less doped than the body structure. A conductive trench-like feed-through element passes through the epitaxial layer and contacts the substrate and the source region. The LDMOS includes a tub region of the first conductivity type formed under the source region, and adjacent laterally to and in contact with said body structure and said trench-like feed-through element.

ULTRA-SHORT CHANNEL LENGTHS IN SIC MOS-BASED POWER DEVICES AND METHOD OF MAKING THE SAME

A metal oxide semiconductor based power device in 4H-SiC semiconductor includes a semiconductor region, a drain electrode disposed adjacent a drain region and a source electrode disposed adjacent a source region which is disposed over a base region, and a gate electrode separated from the semiconductor region by silicon dioxide as a dielectric material. To avoid punchthrough, when the channel has a length of between i) about 0.5 m and about 0.4 m, ii) about 0.4 m and about 0.3 m, iii) about 0.3 m and about 0.2 m, or iv) about 0.2 m and about 0.1 m, the silicon dioxide has a corresponding thickness range of between i) about 5 nm to about 25 nm, ii) about 5 nm to about 20 nm, iii) about 5 nm to about 15 nm, or iv) about 5 nm to about 10 nm, respectively each base region at a predetermined doping profile.

SILICON CARBIDE SEMICONDUCTOR ELEMENT AND MANUFACTURING METHOD THEREOF

A silicon carbide (SiC) semiconductor element includes a semiconductor layer, a dielectric layer on a surface of the semiconductor layer, a gate electrode layer on the dielectric layer, a first doped region, a second doped region, a shallow doped region and a third doped region. The semiconductor layer is of a first conductivity type. The first doped region is of a second conductivity type and includes an upper doping boundary spaced from the surface by a first depth. The shallow doped region is of the second conductivity type, and extends from the surface to a shallow doped depth. The second doped region is adjacent to the shallow doped region and is at least partially in the first doped region. The third doped region is of the second conductivity type and at least partially overlaps the first doped region.

GATE-ALL-AROUND FIN DEVICE

A gate-all around fin double diffused metal oxide semiconductor (DMOS) devices and methods of manufacture are disclosed. The method includes forming a plurality of fin structures from a substrate. The method further includes forming a well of a first conductivity type and a second conductivity type within the substrate and corresponding fin structures of the plurality of fin structures. The method further includes forming a source contact on an exposed portion of a first fin structure. The method further comprises forming drain contacts on exposed portions of adjacent fin structures to the first fin structure. The method further includes forming a gate structure in a dielectric fill material about the first fin structure and extending over the well of the first conductivity type.

GATE-ALL-AROUND FIN DEVICE

A gate-all around fin double diffused metal oxide semiconductor (DMOS) devices and methods of manufacture are disclosed. The method includes forming a plurality of fin structures from a substrate. The method further includes forming a well of a first conductivity type and a second conductivity type within the substrate and corresponding fin structures of the plurality of fin structures. The method further includes forming a source contact on an exposed portion of a first fin structure. The method further comprises forming drain contacts on exposed portions of adjacent fin structures to the first fin structure. The method further includes forming a gate structure in a dielectric fill material about the first fin structure and extending over the well of the first conductivity type.

GATE-ALL-AROUND FIN DEVICE

A gate-all around fin double diffused metal oxide semiconductor (DMOS) devices and methods of manufacture are disclosed. The method includes forming a plurality of fin structures from a substrate. The method further includes forming a well of a first conductivity type and a second conductivity type within the substrate and corresponding fin structures of the plurality of fin structures. The method further includes forming a source contact on an exposed portion of a first fin structure. The method further comprises forming drain contacts on exposed portions of adjacent fin structures to the first fin structure. The method further includes forming a gate structure in a dielectric fill material about the first fin structure and extending over the well of the first conductivity type.

Trench transistor having a doped semiconductor region

A trench transistor having a semiconductor body includes a source region, a body region, a drain region electrically connected to a drain contact, and a gate trench including a gate electrode which is isolated from the semiconductor body. The gate electrode is configured to control current flow between the source region and the drain region along at least a first side wall of the gate trench. The trench transistor further includes a doped semiconductor region having dopants introduced into the semiconductor body through an unmasked part of the walls of a trench.

Dummy gate for a high voltage transistor device

A semiconductor device and methods for forming the same are provided. The semiconductor device includes a first doped region and a second, oppositely doped, region both formed in a substrate, a first gate formed overlying a portion of the first doped region and a portion of the second doped region, two or more second gates formed over the substrate overlying a different portion of the second doped region, one or more third doped regions in the second doped region disposed only between the two or more second gates such that the third doped region and the second doped region having opposite conductivity types, a source region in the first doped region, and a drain region in the second doped region disposed across the second gates from the first gate.

Semiconductor device and manufacturing method thereof
09711642 · 2017-07-18 · ·

A semiconductor device includes: an n-type first source region and first drain region formed in a surface of a p-type epitaxial layer; an n-type first source drift region and first drain drift region formed so as to individually surround the first source region and the first drain region; and a p-type first diffusion region formed in a first channel region and having a higher concentration than the epitaxial layer, the semiconductor device having p-type first withstand voltage maintaining regions formed between the first diffusion region, and the first source drift region and first drain drift region respectively, the first withstand voltage maintaining regions having a lower concentration than the first diffusion region.