A semiconductor device includes a plurality of active regions including channel regions extending in a first direction on a semiconductor substrate and source/drain regions connected to the channel regions, a plurality of gate electrodes extending in a second direction different from the first direction to intersect the channel regions, a plurality of conductive lines electrically connected to at least one of the source/drain regions and the plurality of gate electrodes through a plurality of vias, and a power line disposed between the semiconductor substrate and the plurality of conductive lines and configured to supply a power supply voltage.

Some embodiments relate to a method of designing an integrated circuit layout. In this method, a plurality of design shapes are provided on different design layers over an active area within a graphical representation of the layout. A connection extends perpendicularly between a first design shape formed on a first design layer and a second design shape formed on the first design layer. First and second cut mask shapes on first and second cut mask design layers, respectively, are generated. The first cut shape removes portions of the first design layer and the second cut shape removes portions of the second design layer.

A filler cell, a semiconductor device, and a logic circuit are provided. The filler cell includes two dummy polysilicon layers and a threshold voltage layer. The dummy polysilicon layers are arranged at intervals in a first direction. The threshold voltage layer is below the dummy polysilicon layers, and the two opposite sides of the threshold voltage layer in the first direction extend in a second direction and are respectively aligned with center points of the dummy polysilicon layers. The two opposite sides of the threshold voltage layer in the second direction are respectively aligned with the two opposite sides of each of the dummy polysilicon layers in the second direction. The first direction is perpendicular to the second direction. The semiconductor device includes a plurality of filler cells, at least one transistor cell, and another two threshold voltage layers. The logic circuit includes a plurality of semiconductor devices.

Provided is a cell layout for a semiconductor device, which includes: a 1.sup.st cell; a 2.sup.nd cell at a side of the 1.sup.st cells in a 1.sup.st direction; and a filler cell between the 1.sup.st cell and the 2.sup.nd cell, wherein each of the 1.sup.st cell, the filler cell, and the 2.sup.nd cell includes a 1.sup.st active pattern and a 2.sup.nd active pattern above the 1.sup.st active pattern in a 3.sup.rd direction, and wherein a width of the 2.sup.nd active pattern and a width of the 1.sup.st active pattern are the same in the filler cell, in a 2.sup.nd direction intersecting the 1.sup.st direction and the 3.sup.rd direction.

A semiconductor device includes a substrate including an N-stack cell, a buffer cell and an M-stack cell that are on the substrate, the buffer cell being between the N-stack and M-stack cells, an active pattern extending from the N-stack cell to the M-stack cell via the buffer cell, an N-stack channel pattern on the active pattern of the N-stack cell, an M-stack channel pattern on the active pattern of the M-stack cell, a dummy channel pattern on the active pattern of the buffer cell, an N-stack epitaxial pattern between the N-stack channel pattern and the dummy channel pattern, and an M-stack epitaxial pattern between the M-stack channel pattern and the dummy channel pattern. The N-stack channel pattern includes stacked N semiconductor patterns. The M-stack channel pattern includes stacked M semiconductor patterns. Each of N and M is an integer number of 2 or more, and M is greater than N.

A semiconductor device includes: first fins (F-fins) and second fins (S-fin) arranged in a first row having a single-row height and that includes an alpha cell region and a beta cell region. The alpha cell region includes a first F-fin, a first S-fin and a first gate structure overlapping each of the first F-fin and the first S-fin. The first gate structure does not overlap top and bottom edges of the alpha cell region. The beta cell region includes second and third F-fins, second and third S-fins and a second gate structure overlapping each of the second F-fin and second S-fin and at least one of the third F-fin or the third S-fin. A top edge of the beta cell region being co-track aligned with the third F-fin. A bottom edge of the beta cell region being co-track aligned with the third S-fin.

An integrated circuit includes a first transistor of a first conductivity type including a first active area extending in a first direction; a second transistor of the first conductivity type including at least two second active areas extending in the first direction and a first gate stripe crossing the at least two second active areas; and a third transistor of a second conductivity type that is stacked on the second transistor and includes at least two third active areas arranged above the at least two second active areas. A top most boundary line of the first active area is aligned with a top most boundary line of one of the at least two third active areas in a layout view.

A semiconductor device includes a plurality of semiconductor elements, each of the plurality of semiconductor elements including an active region disposed on a substrate, and a gate structure intersecting the active region and extending in a first direction that is parallel to an upper surface of the substrate; and at least one dummy element disposed between a pair of semiconductor elements adjacent to each other in a second direction, intersecting the first direction, among the plurality of semiconductor elements. The dummy element includes a dummy active region and at least one dummy gate structure intersecting the dummy active region and extending in the first direction. A length of the dummy active region in the second direction is less than a length of the active region included in each of the pair of semiconductor elements.

A semiconductor structure and a method of fabricating thereof including a substrate having a device region and a dummy region. The device region includes a number of N-type device cells having a plurality of operational N-type transistors and a number of P-type device cells having a plurality of operational P-type transistors. The dummy region includes a number of N-type dummy cells having a plurality of non-operational N-type transistors and a number of P-type dummy cells having a plurality of non-operational P-type transistors, and a total number of the N-type device cells and P-type device cells is equal to a total number of the N-type dummy cells and P-type dummy cells.

A semiconductor structure and a method of fabricating thereof including a substrate having a device region and a dummy region. The device region includes a number of N-type device cells having a plurality of operational N-type transistors and a number of P-type device cells having a plurality of operational P-type transistors. The dummy region includes a number of N-type dummy cells having a plurality of non-operational N-type transistors and a number of P-type dummy cells having a plurality of non-operational P-type transistors, and a total number of the N-type device cells and P-type device cells is equal to a total number of the N-type dummy cells and P-type dummy cells.