A method comprises providing a cavity structure on the substrate comprising a first growth channel extending in a first direction, a second growth channel extending in a second direction, wherein the second direction is different from the first direction and the second channel is connected to the first channel at a channel junction, a first seed surface in the first channel, at least one opening for supplying precursor materials to the cavity structure, selectively growing from the first seed surface a first semiconductor structure substantially only in the first direction and in the first channel, thereby forming a second seed surface for a second semiconductor structure at the channel junction, growing in the second channel the second semiconductor structure in the second direction from the second seed surface, thereby forming the semiconductor junction comprising the first and the second semiconductor structure.

There is formed a first concave portion that extends inside a semiconductor substrate from a main surface thereof. An insulating film is formed over the main surface, over a side wall and a bottom wall of the first concave portion so as to cover an element and to form a capped hollow in the first concave portion. A first hole portion is formed in the insulating film so as to reach the hollow in the first concave portion from an upper surface of the insulating film, and to reach the semiconductor substrate on the bottom wall of the first concave portion while leaving the insulating film over the side wall of the first concave portion. There is formed a second hole portion that reaches the conductive portion from the upper surface of the insulating film. The first and second hole portions are formed by the same etching treatment.

A method for manufacturing a semiconductor device may include the following steps: preparing a semiconductor structure that comprises a substrate and a first fin member, wherein the first fin member is connected to the substrate and comprises a first semiconductor portion; providing a first-type dopant member that directly contacts the first semiconductor portion, comprises first-type dopants, and is at least one of liquid and amorphous; and performing heat treatment on at least one of the first-type dopant member and the first semiconductor portion to enable a first portion of the first-type dopants to diffuse through a first side of the first-type dopant member into the first semiconductor portion.

FinFET and fabrication method thereof. The FinFET fabrication method includes providing a semiconductor substrate; forming a plurality of trenches in the semiconductor substrate, forming a buffer layer on the semiconductor substrate by filling the trenches and covering the semiconductor substrate, and forming a fin body by etching the buffer layer. The FinFET fabrication method may further includes forming a insulation layer on the buffer layer around the fin body; forming a channel layer on the surface of the fin body; forming a gate structure across the fin body; forming source/drain regions in the channel layer on two sides of the gate structure; and forming an electrode layer on the source/drain regions.

In a semiconductor device including a transistor in which an oxide semiconductor layer, a gate insulating layer, and a gate electrode layer on side surfaces of which sidewall insulating layers are provided are stacked in this order, a source electrode layer and a drain electrode layer are provided in contact with the oxide semiconductor layer and the sidewall insulating layers. In a process for manufacturing the semiconductor device, a conductive layer and an interlayer insulating layer are stacked to cover the oxide semiconductor layer, the sidewall insulating layers, and the gate electrode layer. Then, parts of the interlayer insulating layer and the conductive layer over the gate electrode layer are removed by a chemical mechanical polishing method, so that a source electrode layer and a drain electrode layer are formed. Before formation of the gate insulating layer, cleaning treatment is performed on the oxide semiconductor layer.

The present application provides a semiconductor device and a method for fabricating the same. The device includes a substrate with a first top surface, first and second gate electrodes within the substrate, a first barrier layer, and a second barrier layer over the first barrier layer and the first gate electrode. A gate capping layer is placed over the second gate electrode, and a cell contact structure is disposed on the first top surface. The second gate electrode is above the first gate electrode, wherein the first gate electrode consists of a first member surrounded by the first barrier layer and a second member extending toward the first top surface, protruding from the first barrier layer. The second gate electrode surrounds the second barrier layer and the second member of the first gate electrode.

The present application provides a semiconductor device and a method for fabricating the same. The device includes a substrate with a first top surface, first and second gate electrodes within the substrate, a first barrier layer, and a second barrier layer over the first barrier layer and the first gate electrode. A gate capping layer is placed over the second gate electrode, and a cell contact structure is disposed on the first top surface. The second gate electrode is above the first gate electrode, wherein the first gate electrode consists of a first member surrounded by the first barrier layer and a second member extending toward the first top surface, protruding from the first barrier layer. The second gate electrode surrounds the second barrier layer and the second member of the first gate electrode.

A semiconductor device includes: an n type semiconductor layer including an active region and an inactive region; an element structure formed in the active region and including at least an active side p type layer to form pn junction with n type portion of the n type semiconductor layer; an inactive side p type layer formed in the inactive region and forming pn junction with the n type portion of the n type semiconductor layer; a first electrode electrically connected to the active side p type layer in a front surface of the n type semiconductor layer; a second electrode electrically connected to the n type portion of the n type semiconductor layer in a rear surface of the n type semiconductor layer; and a crystal defect region formed in both the active region and the inactive region and having different depths in the active region and the inactive region.

A MOSFET device or a rectifier device with improved RDSON and BV performance has a repetitive pattern of field plate trenches disposed in a semiconductor chip. The semiconductor chip comprises a doped epi-layer, in which the dopant concentration progressively decreases from the top of the chip surface towards the bottom of the chip. The doped epi-layer may comprises strata of epi-layers of different dopant concentrations and the field plate trenches each terminate at a predetermined point in the strata.

A p-type anode layer (2) is provided on an upper surface of an n-type drift layer (1). An n-type cathode layer (3) is provided on a lower surface of the n.sup.-type drift layer (1). An n-type buffer layer (4) is provided between the n.sup.-type drift layer (1) and the n-type cathode layer (3). A peak impurity concentration in the n-type buffer layer (4) is higher than that in the n.sup.-type drift layer (1) and lower than that in the n-type cathode layer (3). A gradient of carrier concentration at a connection between the n.sup.-type drift layer (1) and the n-type buffer layer (4) is 20 to 2000 cm.sup.4.