Trenches having a gate oxide layer are formed in the surface of a silicon wafer for vertical gates. Conductive doped polysilicon is then deposited in the trenches to form a relatively thin layer of doped polysilicon along the sidewalls. Thus, there is a central cavity surrounded by polysilicon. Next, the cavity is filled in with a much higher conductivity material, such as aluminum, copper, a metal silicide, or other conductor to greatly reduce the overall resistivity of the trenched gates. The thin polysilicon forms an excellent barrier to protect the gate oxide from diffusion from the inner conductor atoms. The inner conductor and the polysilicon conduct the gate voltage in parallel to lower the resistance of the gates, which increases the switching speed of the device. In another embodiment, a metal silicide is used as the first layer, and a metal fills the cavity.

Trenches having a gate oxide layer are formed in the surface of a silicon wafer for vertical gates. Conductive doped polysilicon is then deposited in the trenches to form a relatively thin layer of doped polysilicon along the sidewalls. Thus, there is a central cavity surrounded by polysilicon. Next, the cavity is filled in with a much higher conductivity material, such as aluminum, copper, a metal silicide, or other conductor to greatly reduce the overall resistivity of the trenched gates. The thin polysilicon forms an excellent barrier to protect the gate oxide from diffusion from the inner conductor atoms. The inner conductor and the polysilicon conduct the gate voltage in parallel to lower the resistance of the gates, which increases the switching speed of the device. In another embodiment, a metal silicide is used as the first layer, and a metal fills the cavity.

A semiconductor arrangement is presented. The semiconductor arrangement comprises a semiconductor body, the semiconductor body including a semiconductor drift region, wherein the semiconductor drift region has dopants of a first conductivity type; a first semiconductor sense region and a second semiconductor sense region, wherein each of the first semiconductor sense region and the second semiconductor sense region is electrically connected to the semiconductor drift region and has dopants of a second conductivity type different from said first conductivity type; a first metal contact comprising a first metal material, the first metal contact being in contact with the first semiconductor sense region, wherein a transition between the first metal contact and the first semiconductor sense region forms a first metal-to-semiconductor transition; a second metal contact comprising a second metal material different from said first metal material, the second metal contact being separated from the first metal contact and in contact with the second semiconductor sense region, a transition between the second metal contact and the second semiconductor sense region forming a second metal-to-semiconductor transition different from said first metal-to-semiconductor transition; first electrical transmission means, the first electrical transmission means being arranged and configured for providing a first sense signal derived from an electrical parameter of the first metal contact to a first signal input of a sense signal processing unit; and second electrical transmission means separated from said first electrical transmission means, the second electrical transmission means being arranged and configured for providing a second sense signal derived from an electrical parameter of the second metal contact to a second signal input of said sense signal processing unit.

Disclosed is a power device, such as power MOSFET, and method for fabricating same. The device includes an upper trench situated over a lower trench, where the upper trench is wider than the lower trench. The device further includes a trench dielectric inside the lower trench and on sidewalls of the upper trench. The device also includes an electrode situated within the trench dielectric. The trench dielectric of the device has a bottom thickness that is greater than a sidewall thickness.

A method of forming an integrated DMOS transistor/EEPROM cell includes forming a first mask over a substrate, forming a drift implant in the substrate using the first mask to align the drift implant, simultaneously forming a first floating gate over the drift implant, and a second floating gate spaced apart from the drift implant, forming a second mask covering the second floating gate and covering a portion of the first floating gate, forming a base implant in the substrate using an edge of the first floating gate to self-align the base implant region, and simultaneously forming a first control gate over the first floating gate and a second control gate over the second floating gate. The first floating gate, first control gate, drift implant, and base implant form components of the DMOS transistor, and the second floating gate and second control gate form components of the EEPROM cell.

In one implementation, a semiconductor package includes a first patterned conductive carrier including partially etched segments. The semiconductor package also includes a control FET having a control drain attached to a first partially etched segment of the first patterned conductive carrier. In addition, the semiconductor package includes a sync FET having a sync source and a sync gate attached to respective second and third partially etched segments of the first patterned conductive carrier. The semiconductor package further includes a second patterned conductive carrier having a switch node segment situated over a control source of the control FET and over a sync drain of the sync FET, as well as an inductor coupled between the switch node segment and an output segment of the second patterned conductive carrier.

In an embodiment, an electronic component includes a compound semiconductor transistor device having a first current electrode, a second current electrode and a control electrode, a die pad, a first lead, a second lead and a third lead. The first lead, the second lead and the third lead are spaced at a distance from the die pad. The control electrode is coupled to the first lead, the first current electrode is coupled to the die pad and the second current electrode is coupled to the second lead. The third lead is coupled to the compound semiconductor transistor device and provides a source sensing functionality.

A semiconductor device includes a first semiconductor region having first charge carriers of a first conductivity type and a second semiconductor region having second charge carriers. The first semiconductor region includes a transition region in contact with the second semiconductor region, the transition region having a first concentration of the first charge carriers, a contact region having a second concentration of the first charge carriers, wherein the second concentration is higher than the first concentration, and a damage region between the contact region and the transition region. The damage region is configured for reducing lifetime and/or mobility of the first charge carriers of the damage region as compared to the lifetime and/or the mobility of the first charge carriers of the contact region and the transition region.

A semiconductor device including a VDMOS device formed therein includes a terminal, or contact, to the drain region of the VDMOS device from the frontside of the device. In one or more implementations, a semiconductor device includes a semiconductor substrate having a first surface and a second surface and a vertical diffused metal-oxide-semiconductor device formed within the semiconductor substrate. The vertical diffused metal-oxide-semiconductor device includes at least one source region formed proximate to the first surface and at least one drain region formed proximate to the second surface. A through-substrate via is formed within the semiconductor substrate, and the through-substrate via electrically connected to the drain region. The through-substrate via provides an electrical interconnection to the drain region from the first surface.

A semiconductor component is disclosed. One embodiment includes a semiconductor body including a first semiconductor layer having at least one active component zone, a cell array with a plurality of trenches, and at least one cell array edge zone. The cell array edge zone is only arranged in an edge region of the cell array, adjoining at least one trench of the cell array, and being at least partially arranged below the at least one trench in the cell array.