In an active region, p.sup.+ regions are selectively disposed in a surface layer of an n.sup. drift layer on an n.sup.+ semiconductor substrate. A p-base layer is disposed on surfaces of the n.sup. drift layer and the P.sup.+ regions, and an MOS structure is disposed on the p-base layer. In another portion of the active region, a p.sup.+ region is disposed to be in contact with the source electrode on the p.sup.+ regions. In a breakdown voltage structure region (100), a JTE structure having at least a P.sup. region is disposed separately from the P.sup.+ regions and the p-base layer, to surround the active region. The P.sup. region is electrically in contact with the P.sup.+ region in a portion in which the MOS structure is not formed, in the vicinity of the boundary between the active region and the breakdown voltage structure region.

Provided is a silicon carbide semiconductor device that enables integration of a transistor element and a Schottky barrier diode while avoiding the reduction of an active region. A silicon carbide semiconductor device includes a silicon carbide layer, a gate insulating film, a Schottky electrode being Schottky functioned to a drift layer via a first contact hole and an opening, a gate electrode being arranged on the gate insulating film, an insulating layer being arranged so as to cover the gate insulating film, the gate electrode, and the Schottky electrode and having a second contact hole for exposing the gate electrode, and a gate pad electrode being arranged on the insulating layer so as to overlap the Schottky electrode in a plan view and being electrically connected to the gate electrode via the second contact hole.

There is provided a gallium nitride substrate having a C plane as a surface with a diameter of not less than 100 mm, the gallium nitride substrate including first regions and second regions having different average values of band-edge emission intensities in a micro photoluminescence mapping at 25 C. in a square region located in the C plane and having sides each having a length of 2 mm, an average value Ibe1a of the band-edge emission intensities of the first regions and an average value Ibe2a of the band-edge emission intensities of the second regions satisfying the following relational expressions (I) and (II): Ibe1a>Ibe2a . . . (I) and 2.1Ibe1a/Ibe2a9.4 . . . (II).

A semiconductor device according to one embodiment includes a first normally-off type transistor including a first source, a first drain, a first gate, and a first body diode, a second normally-off type transistor including a second source connected to the first source, a second drain, a second gate connected to the first gate, and a second body diode, a normally-on type transistor including a third source connected to the first drain, a third drain, and a third gate connected to the second drain, and a diode including an anode connected to the second drain and a cathode connected to the third drain.

Electrostatic Discharge (ESD) protection using lateral surface Schottky diodes is disclosed. In one embodiment, a Metal-Insulator-Metal (MIM) capacitor with ESD protection comprises a group III-V substrate, a first metal layer contacting the substrate, an insulation layer formed over the first metal layer, and a second metal layer formed over the insulation layer and also contacting the substrate. A MIM capacitor is formed by overlapping portions of the first metal layer, the insulation layer, and the second metal layer. First and second Schottky diodes are formed where the first and second metal layers, respectively, contact the substrate, such that the cathodes of the Schottky diodes are electrically connected to one another and the anodes of the Schottky diodes are electrically connected to the respective overlapping portions of the first and second metal layers.

A synchronous rectifier is described that includes a transistor device that has a gate terminal, a source terminal, a drain terminal, and a field-plate electrode. The field-plate electrode of the transistor device includes an integrated diode. The integrated diode is configured to discharge a parasitic capacitance of the transistor device during each switching operation of the synchronous rectifier. In some examples, the integrated diode is also configured to charge the parasitic capacitance of the transistor device during each switching operation of the synchronous rectifier.

A semiconductor device includes: a semiconductor substrate, an upper electrode, a lower electrode and a gate electrode. In the semiconductor substrate, a body region, a pillar region, and a barrier region are formed. The pillar region has an n-type impurity, is formed on a lateral side of the body region, and extends along a depth from a top surface of the semiconductor substrate to a lower end of the body region. The barrier region has an n-type impurity and is formed on a lower side of the body region and the pillar region. The barrier region is formed on the lower side of the pillar region. An n-type impurity concentration distribution in a depth direction in the pillar region and the barrier region has a maximum value in the pillar region. The n-type impurity concentration distribution has a folding point on a side deeper than the maximum value.

A semiconductor device according to an embodiment includes a semiconductor substrate having a first surface and a second surface. The semiconductor substrate includes an element region and a termination region provided around the element region. The termination region has a first semiconductor region of a first conductivity type provided at the first surface of the semiconductor substrate and a second semiconductor region of a second conductivity type provided between the first semiconductor region and the second surface. The semiconductor device further includes a first insulating film provided on the first semiconductor region, a second insulating film provided on the first semiconductor region and having a portion interposed between the first insulating films, a first electrode provided on the first surface of the element region and electrically connected to the first semiconductor region, and a second electrode provided at the second surface of the semiconductor substrate.

A semiconductor device includes a semiconductor chip formed with an SiC-IGBT including an SiC semiconductor layer, a first conductive-type collector region formed such that the collector region is exposed on a second surface of the SiC semiconductor layer, a second conductive-type base region formed such that the base region contacts the collector region, a first conductive-type channel region formed such that the channel region contacts the base region, a second conductive-type emitter region formed such that the emitter region contacts the channel region to define a portion of a first surface of the SiC semiconductor layer, a collector electrode connected to the collector region, and an emitter electrode connected to the emitter region. A MOSFET of the device is connected in parallel to the SiC-IGBT, and includes a second conductive-type source region electrically connected to the emitter electrode and a second conductive-type drain region electrically connected to the collector electrode.

This invention discloses a method for manufacturing a semiconductor power device in a semiconductor substrate comprises an active cell area and a termination area. The method comprises the steps of a) growing and patterning a field oxide layer in the termination area and also in the active cell area on a top surface of the semiconductor substrate b) depositing and patterning a polysilicon layer on the top surface of the semiconductor substrate at a gap distance away from the field oxide layer; c) performing a blank body dopant implant to form body dopant regions in the semiconductor substrate substantially aligned with the gap area followed by diffusing the body dopant regions into body regions in the semiconductor substrate; d) implanting high concentration body-dopant regions encompassed in and having a higher dopant concentration than the body regions and e) applying a source mask to implant source regions having a conductivity opposite to the body region with the source regions encompassed in the body regions and surrounded by the high concentration body-dopant regions.