A semiconductor storage device includes: a conductive layer and a second conductive layer that are arranged in a first direction; a plurality of first semiconductor layers facing the first conductive layer between the first conductive layer and the second conductive layer, the plurality of first semiconductor layers being arranged in a second direction that intersects the first direction; a first charge storage layer that is provided between the plurality of first semiconductor layers and the first conductive layer in the first direction, and extends in the second direction over a plurality of regions between the plurality of first semiconductor layers and the first conductive layer; and a first insulating layer provided between the plurality of first semiconductor layers and the first charge storage layer in the first direction. The first insulating layer includes a first region that faces one end of each of the first semiconductor layers in the second direction, in the first direction, a second region that faces the other end of each of the first semiconductor layers in the second direction, in the first direction, and a third region provided between the first region and the second region in the second direction. A nitrogen concentration in the first region and the second region is lower than a nitrogen concentration in the third region.

A semiconductor device of an embodiment includes first and second structures arranged in a first hierarchy, in which the first and second structures are repeatedly arranged in a first direction along a plane of the first hierarchy, and a distance between geometric centers of the first and second structures in a minimum unit of repetition of the first and second structures differs between a first position and a second position in the first direction.

A semiconductor storage device includes a substrate, a plurality of first conductive layers arranged in a first direction intersecting with a surface of the substrate, a first semiconductor layer that extends in the first direction and faces the plurality of first conductive layers, a first gate insulating film that extends in the first direction and covers an outer peripheral surface of the first semiconductor layer, a first insulating layer that extends in the first direction and has an outer peripheral surface covered with the first semiconductor layer, and a second conductive layer that is farther from the substrate than the plurality of first conductive layers and is connected to one end in the first direction of the first semiconductor layer. The first semiconductor layer includes a first region facing the plurality of first conductive layers and a second region farther from the substrate than the first region. The second conductive layer is connected to an inner peripheral surface and an outer peripheral surface of the second region of the first semiconductor layer and is in contact with one end in the first direction of the first insulating layer.

A memory device includes a semiconductor layer including adjacent cell and non-cell areas in a first direction, first and second conductive lines on the layer, extending along the first direction and arranged away from each other in a second direction crossing the first direction, conductor layers arranged above the semiconductor layer in a third direction crossing the first and second directions, pillars on the cell area, passing through the conductor layers in the third direction and forming memories at intersections with the conductor layers, and shunt lines extending along the second direction and arranged in the first direction above the cell area, each of the shunt lines connected to the first and second lines via third conductive lines. A length between the shunt line closest to the non-cell area and a boundary between the cell and non-cell areas is less than a length between adjacent shunt lines.

According to a certain embodiment, the nonvolatile semiconductor memory device includes: a first conductivity-type semiconductor substrate including a crushed layer on a back side surface thereof; a memory cell array disposed on a front side surface of the semiconductor substrate opposite to the crushed layer; and a first conductivity-type high voltage transistor HVP disposed on the semiconductor substrate and including a first conductivity-type channel, configured to supply a high voltage to the memory cell array. The first conductivity-type high voltage transistor includes: a well region NW disposed on the surface of the semiconductor substrate and having a second conductivity type; a source region and a drain region disposed in the well region; and a first conductivity-type first high concentration layer WT2 disposed between the crushed layer of the semiconductor substrate and the well region and having a higher concentration than an impurity concentration of the semiconductor substrate.

A semiconductor memory device may include a peripheral circuit structure including peripheral circuits integrated on a semiconductor substrate in a first region and a first keypad disposed in a second region; a stack provided on the first region of the peripheral circuit structure, the stack including a plurality of first conductive lines extending in a first direction and are vertically stacked; an upper insulating layer covering the stack; an interconnection layer provided on the upper insulating layer; a penetration plug spaced apart from the stack and is provided to penetrate the upper insulating layer to connect the interconnection layer to the peripheral circuits of the peripheral circuit structure; a molding structure provided on the second region of the peripheral circuit structure and spaced apart from the stack in the first direction; and a penetration structure provided to penetrate the molding structure and vertically overlap with the first keypad.

Provided is a semiconductor memory device. The semiconductor memory device comprises a first semiconductor pattern including a first impurity region, a second impurity region, and a channel region, the first impurity region spaced apart from a substrate in a first direction and having a first conductivity type, the second impurity region having a second conductivity type different from the first conductivity type, and the channel region between the first impurity region and the second impurity region, a first conductive connection line connected to the first impurity region and extending in a second direction different from the first direction and a first gate structure extending in the first direction and including a first gate electrode and a first gate insulating film, wherein the first gate electrode penetrates the channel region and the first gate insulating film is between the first gate electrode and the semiconductor pattern.

A method for producing a 3D memory device, the method comprising: providing a first level comprising a single crystal layer; forming at least one second level above said first level; performing a first etch step comprising etching holes within said second level; forming at least one third level above said at least one second level; performing a second etch step comprising etching holes within said third level; performing additional processing steps to form a plurality of first memory cells within said second level and a plurality of second memory cells within said third level, wherein each of said first memory cells comprise one first transistor, wherein each of said second memory cells comprise one second transistor, wherein at least one of said first or second transistors has a channel, a source and a drain having the same doping type, and wherein said forming at least one third level comprises forming a window within said third level to allow lithography alignment through said third level to an alignment mark underneath.

Methods of forming a capacitor structure might include forming a first and second conductive regions having first and second conductivity types, respectively, in a semiconductor material, forming a dielectric overlying the first and second conductive regions, forming a conductor overlying the dielectric, and patterning the conductor, the dielectric, and the first and second conductive regions to form a first island of the first conductive region, a second island of the first conductive region, an island of the second conductive region, a first portion of the dielectric overlying the first island of the first conductive region separated from a second portion of the dielectric overlying the second island of the first conductive region and the island of the second conductive region, and a first portion of the conductor overlying the first portion of the dielectric separated from a second portion of the conductor overlying the second portion of the dielectric.

A 3D semiconductor device, the device including: a first single crystal layer including a plurality of first transistors and at least one metal layer, where the at least one metal layer interconnecting the first transistors; a plurality of logic gates including the at least one metal layer interconnecting the first transistors; a plurality of second transistors atop the at least one metal layer; a plurality of third transistors atop the second transistors; a top metal layer atop the third transistors; and a memory array including wordlines, where the memory array includes at least two rows by two columns of memory mini arrays, where each of the mini arrays includes at least four rows by four columns of memory cells, and where each of the memory cells includes at least one of the second transistors or at least one of the third transistors.