Embodiments of a three-dimensional (3D) memory device and method for forming the 3D memory device are provided. In an example, the 3D memory device includes a plurality of conductor layers extending over a substrate, a channel structure vertically extending through the conductor layers to the substrate, and a source structure extending through the conductor layers to the substrate. The channel structure may include a blocking layer having a plurality of blocking portions disconnected from one another. Each of the blocking portions may include (i) a vertical blocking portion under a respective conductor layer, and (ii) at least one lateral blocking portion covering a respective lateral surface of the respective conductor layer. The channel structure may also include a memory layer having a plurality of memory portions disconnected from one another, each of the memory portions under and in contact with the respective vertical blocking portion.

Methods for forming channel structures in 3D memory devices are disclosed. In one example, a memory film and a sacrificial layer are subsequently formed along a sidewall and a bottom of a channel hole. A protective structure covering a portion of the sacrificial layer along the sidewall of the channel hole is formed. A portion of the sacrificial layer at the bottom of the channel hole that is not covered by the protective structure is selectively removed. A portion of the memory film at the bottom of the channel hole that is not covered by a remainder of the sacrificial layer is selectively removed.

A semiconductor device includes a substrate provided with a decoupling capacitor and plurality of circuit elements disposed along a first direction, and a plurality of first wiring line patterns disposed in a first wiring line layer over the substrate, including a power routing pattern coupled to the decoupling capacitor and a plurality of internal wiring line patterns coupled to the plurality of circuit elements. The plurality of first wiring line patterns extend in the first direction, and are aligned in conformity with virtual wiring line pattern tracks which are defined at a first pitch along a second direction intersecting the first direction and parallel to the substrate.

A semiconductor memory device includes an electrode structure including a plurality of electrode layers and a plurality of interlayer dielectric layers which are alternately stacked on a source plate defined with a cell area and a connection area in a first direction; a vertical channel passing through the electrode structure in the cell area; a hard mask pattern disposed on the electrode structure in the connection area, and having a plurality of opening holes; a plurality of contact holes defined in the electrode structure under the opening holes, and exposing pad areas of the electrode layers; and a slit dividing the hard mask pattern into units smaller than the electrode structure in the connection area.

A semiconductor device includes: an alternating stack of conductive layers and dielectric layers disposed over a substrate; a channel layer disposed in a through portion, penetrating through the alternating stack; a blocking layer disposed in the through portion, surrounding an outer wall of the channel layer; and a continuous etch stop layer disposed in the through portion, surrounding an outer wall of the blocking layer.

A semiconductor memory device includes first conducting layers and a first semiconductor layer opposed to the first conducting layers. If a concentration of the dopant in the first semiconductor layer is measured along an imaginary straight line, the concentration of the dopant has: a maximum value at a first point, a minimum value in a region closer to the first conducting layer than the first point at a second point; and a minimum value in a region farther from the first conducting layer than the first point at a third point. The second point is nearer to an end portion of the first semiconductor layer on the first conducting layer side than that on the opposite side. The third point is farther from the end portion on the first conducting layer side than that on the opposite side.

A semiconductor device is disclosed. The semiconductor device includes a first slit, at least one word line, and a second slit. The first slit is disposed at a boundary between contiguous memory blocks to isolate the memory blocks from each other, and includes a first outer slit and a second outer slit, the second outer slit is spaced apart in a first direction from the first outer slit by a predetermined distance. The word line is disposed, between the first and second outer slits, including a center region having a first end and a second end, and an edge region located at the first end and a second end of the center region, and the second slit is disposed at the center region that isolate area of the word line in the center region on either side of the second slit, wherein the word line is continuous in the edge regions.

A memory device and a manufacturing for the same are provided. The memory device comprises a channel line, word lines, a first switch, and a second switch. Memory cells for a memory string are defined at intersections between the channel line and the word lines. The first switch is electrically connected with the channel line. The second switch is electrically connected with the channel line. The first switch is electrically connected between the second switch and the memory cells.

A memory device is disclosed. The disclosed memory device may include a first wafer, and a second wafer stacked on and bonded to the first wafer. The first wafer may include a cell structure including a memory cell array; and a first logic structure disposed under the cell structure, and including a column control circuit. The second wafer may include a second logic structure including a row control circuit.

Provided herein may be a semiconductor memory device and a method of manufacturing the same. The semiconductor memory device may include a stacked body including alternately stacked interlayer insulating layers and conductive patterns, and channel structures penetrating the stacked body. Each of the channel structures may include a channel layer vertically extending up to the height of the upper portion of at least one upper conductive pattern disposed uppermost, among the conductive patterns, a memory layer surrounding the channel layer and extending from the lower interlayer insulating layer to the height of the middle portion of the upper conductive pattern, and a doped semiconductor pattern disposed above the channel layer and the memory layer.