Patent classifications
H10D30/0223
SEMICONDUCTOR STRUCTURE
Provided are a semiconductor structure and a manufacturing method thereof. The manufacturing method of the semiconductor structure includes the following. A gate structure is formed on a substrate. A tilt implanting process is performed to implant group IV elements into the substrate to form a doped region, and the doped region is located on two sides of the gate structure and partially located under the gate structure. A part of the substrate on two sides of the gate structure is removed to form a first recess. A cleaning process is performed on the surface of the first recess. A wet etching process is performed on the first recess to form a second recess. A semiconductor layer is formed in the second recess.
Semiconductor device structure and method for forming the same
A semiconductor device structure is provided. The semiconductor device structure includes a substrate having a trench surrounding an active island of the substrate. The active island has a top surface, a sidewall, and an inclined surface connecting the top surface to the sidewall. The inclined surface is inclined relative to the top surface at a first angle. The sidewall is inclined relative to the top surface at a second angle. The first angle is greater than the second angle. The semiconductor device structure includes an isolation structure in the trench. The semiconductor device structure includes a gate insulating layer over the top surface and the inclined surface. The semiconductor device structure includes a gate over the gate insulating layer and the isolation structure. The gate crosses the active island.
Method and structure of making enhanced UTBB FDSOI devices
An integrated circuit die includes a substrate having a first layer of semiconductor material, a layer of dielectric material on the first layer of semiconductor material, and a second layer of semiconductor material on the layer of dielectric material. An extended channel region of a transistor is positioned in the second layer of semiconductor material, interacting with a top surface, side surfaces, and potentially portions of a bottom surface of the second layer of semiconductor material. A gate dielectric is positioned on a top surface and on the exposed side surface of the second layer of semiconductor material. A gate electrode is positioned on the top surface and the exposed side surface of the second layer of semiconductor material.
High thermal budget magnetic memory
Semiconductor devices and methods for forming a semiconductor device are disclosed. The method includes forming a storage unit of a magnetic memory cell. A bottom electrode and a fixed layer are formed. The fixed layer includes a composite spacer layer disposed on the bottom electrode. The composite spacer layer includes a base layer and an amorphous buffer layer disposed over the base layer. A reference layer is disposed on the composite spacer layer. The amorphous buffer layer serves as a template for the reference layer to have a desired crystalline structure in a desired orientation. At least one tunneling barrier layer is formed over the fixed layer. A storage layer is formed over the tunneling barrier layer and a top electrode is formed over the storage layer.
REPLACEMENT LOW-K SPACER
A semiconductor structure formed based on forming a dummy gate stack on a substrate including a sacrificial spacer on the peripheral of the dummy gate stack. The dummy gate stack is partially recessed. The sacrificial spacer is etched down to the partially recessed dummy gate stack. Remaining portions of the sacrificial spacer are etched leaving gaps around and above a remaining portion of the dummy gate stack. A first low-k spacer portion and a second low-k spacer portion are formed to fill gaps around the dummy gate stack and extend vertically along a sidewall of a dummy gate cavity. The first low-k spacer portion and the second low-k spacer portion are etched. A poly pull process is performed on the dummy gate stack. A replacement metal gate (RMG) structure is formed with the first low-k spacer portion and the second low-k spacer portion.
Semiconductor device and method of manufacturing the same
To improve performance of a semiconductor device. Over a semiconductor substrate, a gate electrode is formed via a first insulating film for a gate insulating film, and a second insulating film extends from over a side wall of the gate electrode to over the semiconductor substrate. Over the semiconductor substrate in a part exposed from the second insulating film, a semiconductor layer, which is an epitaxial layer for source/drain, is formed. The second insulating film has a part extending over the side wall of the gate electrode and a part extending over the semiconductor substrate, and a part of the semiconductor layer lies over the second insulating film in the part extending over the semiconductor substrate.
Replacement low-k spacer
A semiconductor structure formed based on forming a dummy gate stack on a substrate including a sacrificial spacer on the peripheral of the dummy gate stack. The dummy gate stack is partially recessed. The sacrificial spacer is etched down to the partially recessed dummy gate stack. Remaining portions of the sacrificial spacer are etched leaving gaps around and above a remaining portion of the dummy gate stack. A first low-k spacer portion and a second low-k spacer portion are formed to fill gaps around the dummy gate stack and extend vertically along a sidewall of a dummy gate cavity. The first low-k spacer portion and the second low-k spacer portion are etched. A poly pull process is performed on the dummy gate stack. A replacement metal gate (RMG) structure is formed with the first low-k spacer portion and the second low-k spacer portion.
Integrated circuit transistor structure with high germanium concentration SiGe stressor
An integrated circuit transistor structure includes a semiconductor substrate, a first SiGe layer in at least one of a source area or a drain area on the semiconductor substrate, and a channel between the source area and the drain area. The first SiGe layer has a Ge concentration of 50 percent or more.
Methods and apparatus for quantum point contacts in CMOS processes
Methods and apparatus for quantum point contacts. In an arrangement, a quantum point contact device includes at least one well region in a portion of a semiconductor substrate and doped to a first conductivity type; a gate structure disposed on a surface of the semiconductor substrate; the gate structure further comprising a quantum point contact formed in a constricted area, the constricted area having a width and a length arranged so that a maximum dimension is less than a predetermined distance equal to about 35 nanometers; a drain/source region in the well region doped to a second conductivity type opposite the first conductivity type; a source/drain region in the well region doped to the second conductivity type; a first and second lightly doped drain region in the at least one well region. Additional methods and apparatus are disclosed.
FIELD EFFECT TRANSISTOR AND MANUFACTURING METHOD THEREOF
A field effect transistor comprising a substrate, at least one gate structure, spacers and strained source and drain regions is described. The at least one gate structure is disposed on the substrate and between the recesses and the isolation structures. The spacers are disposed on sidewalls of the at least one gate structure. The strained source and drain regions are disposed in the recesses and on two opposite sides of the at least one gate structure, and top edges of the strained source and drain regions are covered by the spacers and located beneath the spacers.