An integrated circuit including a link or string of semiconductor memory cells, wherein each memory cell includes a floating body region for storing data. The link or string includes at least one contact configured to electrically connect the memory cells to at least one control line, and the number of contacts in the string or link is the same as or less than the number of memory cells in the string or link.

A semiconductor device includes a substrate, a peripheral circuit layer, a first active pattern, a gate electrode, a first insulating layer, a conductive contact, and a second active pattern. The peripheral circuit layer is disposed on the substrate, and the peripheral circuit layer includes logic transistors and an interconnection layer that is disposed on the logic transistors. The first active pattern is disposed on the peripheral circuit layer. The gate electrode is disposed on a channel region of the first active pattern. The first insulating layer is disposed on the first active pattern and the gate electrode. The conductive contact is disposed in the first insulating layer and is electrically connected to a first source/drain region of the first active pattern, and the second active pattern is disposed on the first insulating layer. The channel region of the second active pattern vertically overlaps with the conductive contact.

A semiconductor device includes a landing pad on a substrate, a lower electrode on the landing pad, the lower electrode being electrically connected to the landing pad, a dielectric layer on the lower electrode, the dielectric layer extending along a profile of the lower electrode, an upper electrode on the dielectric layer, and an upper plate electrode on the upper electrode and including first fluorine (F) therein, wherein the upper plate electrode includes an interface facing the upper electrode, and wherein the upper plate electrode includes a portion in which a concentration of the first fluorine decreases as a distance from the interface of the upper plate electrode increases.

A semiconductor device that is suitable for high integration is provided. A first layer provided with a first transistor including an oxide semiconductor, over a substrate; a second layer over the first layer; a third layer provided with a second transistor including an oxide semiconductor, over the second layer; a fourth layer between the first layer and the second layer; and a fifth layer between the second layer and the third layer are included. The total internal stress of the first layer and the total internal stress of the third layer act in a first direction, the total internal stress of the second layer acts in the direction opposite to the first direction, and the fourth layer and the fifth layer each include a film having a barrier property.

A method of manufacturing a semiconductor structure includes: receiving a substrate having an active region and a non-active region adjacent to the active region; forming an etch stop layer over the non-active region of the substrate, in which the etch stop layer is oxide-free; forming an isolation over the etch stop layer; removing a portion of the active region and a portion of the isolation to form a first trench in the active region and a second trench over the etch stop layer, respectively, in which a thickness of the etch stop layer beneath the second trench is greater than a depth difference between the first trench and the second trench; forming a dielectric layer in the first trench; and filling a conductive material on the dielectric layer in the first trench and in the second trench. A semiconductor structure is also provided.

A novel information processing device with least signal transmission delay and low power consumption is provided. A storage device includes a first layer, a second layer, and a third layer. The first layer is provided with a circuit. The second layer is provided with a memory cell portion. The third layer is provided with a first electrode. The circuit has a function of switching and performing reading or writing of first data or second data from or to the memory cell portion. At least part of the second layer is stacked above the first layer. At least part of the third layer is stacked above the second layer. An arithmetic device includes a fourth layer and a fifth layer. The fourth layer is provided with a central processing device. The fifth layer is provided with a second electrode. At least part of the fifth layer is stacked above the fourth layer. The circuit is electrically connected to the central processing device through the first electrode and the second electrode.

The present disclosure provides a semiconductor device and its preparation method, wherein the preparation method includes providing a substrate, forming bit line units, capacitor contacts and a conductive layer on the substrate, patterning the conductive layer on the substrate by step-by-step etching, etching first grooves to form first conductive parts positioned above the bit line units, protecting sidewalls of the first grooves, and then etching second grooves to form second conductive parts covering sidewalls of the bit line units and third conductive parts covering the capacitor contacts.

A manufacturing method for memory includes: providing a substrate, and forming a first isolation layer and discrete bit lines on the substrate; removing part of the first isolation layer by a thickness to form discrete first trenches; forming word lines filling the first trenches, wherein the word lines each has a first side wall and a second side wall opposite to each other; forming discrete through holes each being between adjacent word lines; forming a first dielectric layer on surface of exposed first side wall, and forming a second dielectric layer on surface of exposed second side wall; and forming an active layer filling the through holes.

A semiconductor device includes bit lines extending in a first direction on a substrate, a lower contact connected to the substrate between two adjacent ones of the bit lines, a landing pad on the lower contact, and an insulating structure surrounding a sidewall of the landing pad, the insulating structure including a first insulating pattern having a top surface at a lower level than a top surface of the landing pad, and a second insulating pattern on the top surface of the first insulating pattern.

Present invention relates to a semiconductor memory device. A semiconductor memory device according to the present invention may comprise: a memory cell array including a plurality of memory cells over a substrate, the plurality of memory cells repeatedly arranged in horizontal direction and a vertical direction, the horizontal direction parallel to a surface of the substrate, the vertical direction perpendicular to the surface of the substrate, a bit line coupled to the memory cells arranged in the vertical direction, and a word line coupled to the memory cells arranged in the horizontal direction, wherein each of the memory cells comprises a capacitor comprising a storage node and a plate node, and the plate nodes of the capacitors are coupled to each other in the vertical direction and are spaced apart from each other in the horizontal direction.