A semiconductor device is formed using a semiconductor substrate having a first main surface and a second main surface. A first semiconductor region of a first conductivity type is formed between the first main surface and the second main surface of the semiconductor substrate. A second semiconductor region is formed between the first semiconductor region and the first main surface. The first semiconductor region includes a hydrogen-related donor, and a concentration of the hydrogen-related donor of the first semiconductor region is equal to or larger than an impurity concentration of the first semiconductor region.

Semiconductor devices, and more particularly semiconductor devices with improved edge termination structures are disclosed. A semiconductor device includes a drift region that forms part of an active region. An edge termination region is arranged along a perimeter of the active region and also includes a portion of the drift region. The edge termination region includes one or more sub-regions of an opposite doping type than the drift region and one or more electrodes may be capacitively coupled to the drift region by way of the one or more sub-regions. During a forward blocking mode for the semiconductor device, the one or more electrodes may provide a path that draws ions away from passivation layers that are on the edge termination region and away from the active region. In this manner, the semiconductor device may exhibit reduced leakage, particularly at higher operating voltages and higher associated operating temperatures.

In an example, a semiconductor device includes a cathode region having a first conductivity type and a cathode region dopant concentration. A charge storage region overlies the cathode region and has the first conductivity type and a charge storage region dopant concentration less than the cathode region dopant concentration. A buffer region overlies the charge storage region and has the first conductivity type, a buffer region thickness, a buffer region dopant concentration profile, and a buffer region peak dopant concentration. A drift region overlies the buffer region and has the first conductivity type and a drift region dopant concentration. An anode region of a second conductivity type opposite to the first conductivity type is adjacent to the drift region. The buffer region peak dopant concentration is greater than the charge storage region dopant concentration and greater than the drift region dopant concentration. The buffer region peak dopant concentration is spaced apart from the charge storage region and spaced apart from the drift region. Other related examples and methods are disclosed herein.

Semiconductor device are provided. In one example, a semiconductor device includes a substrate. The semiconductor device includes a plurality of semiconductor layers on the substrate. The plurality of semiconductor layers are bonded to one another in a stacked arrangement.

Provided is a semiconductor apparatus comprising: a semiconductor substrate; an element electrode provided above the semiconductor substrate; an element electrode pad electrically connected to the element electrode; and a wire configured to connect to the element electrode pad at a plurality of connection points, wherein the semiconductor substrate includes an emitter region of a first conductivity type arrayed in an array direction, the emitter region facing the element electrode on an upper surface of the semiconductor substrate, wherein a density of the emitter region below a connection point of any of the wires is different from a density of the emitter region below a connection point of any other of the wires.

The technology of this disclosure relates to an IGBT chip integrating a temperature sensor, and relates to the field of power device technologies, to improve accuracy of temperature monitoring of the IGBT chip. The IGBT chip integrating the temperature sensor includes a cell region, an emitter pad, a gate pad, a gate finger structure, a temperature sensing module, and a conductive shielding structure. The emitter pad is electrically connected to emitters of a plurality of IGBT cells. The gate finger structure is connected between the gate pad and gates of the plurality of IGBT cells. The temperature sensing module includes a temperature sensor, an anode pad, a cathode pad, and a metal lead. The temperature sensor and at least a part of the metal lead are located in the gate finger structure and are insulated from the gate finger structure.

To mitigate adverse effects on a surface electrode of a semiconductor device. The semiconductor device includes: a first well region formed in a surface layer of an upper surface of a drift layer; a gate electrode; a second well region surrounding the first well region as seen in plan view; and a gate portion covering an interlayer insulation film and the gate electrode exposed from the interlayer insulation film. An outside edge portion of the gate electrode is farther from the first well region than an outside edge portion of the gate portion and closer to the first well region than an outside edge portion of the second well region.

A semiconductor device is provided, including: a semiconductor substrate; an active portion provided on the semiconductor substrate; a first well region and a second well region provided on the semiconductor substrate and arranged sandwiching the active portion in a top view; a peripheral well region provided on the semiconductor substrate and arranged enclosing the active portion in a top view; an intermediate well region provided on the semiconductor substrate and arranged between the first well region and the second well region in a top view; a first pad arranged above the first well region and a second pad arranged above the second well region; and a temperature sense diode arranged above the intermediate well region.

A method comprises the steps of providing a semiconductor wafer comprising a substrate layer; forming a first alignment mark and a second alignment mark; forming a plurality of super junction buffer regions; forming additional two or more epitaxial layers; forming additional one or more alignment marks; forming a top layer; thinning the wafer; forming a first plurality of regions and a second plurality of regions; and applying a singulation process. Devices made by the method have reduced misalignment, between a top portion and a bottom portion of an interface within the devices, for less than 0.5 micron.

A semiconductor device includes an insulating layer (IFL) on a semiconductor substrate (SUB), a conductive film (PL) on the insulating layer (IFL), an interlayer insulating film (IL) covering the conductive film (PL), a contact hole (CH1) in the interlayer insulating film (IL), the conductive film (PL) and the insulating layer (IFL), and a plug (PG1) embedded in the contact hole (CH1). A side surface of the interlayer insulating film (IL) is separated from a side surface of the conductive film (PL) to expose a part of an upper surface of the conductive film (PL), and a side surface of the insulating layer (IFL) is separated from the side surface of the conductive film (PL) to expose a part of a lower surface of the conductive film (PL). A distance (L1) from the lower surface of the conductive film (PL) to the bottom of the contact hole (CH1) is longer than a distance (L2) from the side surface of the conductive film (PL) to the side surface of the interlayer insulating film (IL).