H01L27/24

Conductive structures for contacting a top electrode of an embedded memory device and methods of making such contact structures on an IC product

One illustrative method disclosed herein includes forming at least one first layer of insulating material above an upper surface of a top electrode of a memory cell, forming a patterned etch stop layer above the at least one first layer of insulating material, wherein the patterned etch stop layer has an opening that is positioned vertically above at least a portion of the upper surface of the top electrode and forming at least one second layer of insulating material above an upper surface of the etch stop layer. The method also includes forming a conductive contact opening that extends through the etch stop layer to expose at least a portion of the upper surface of the top electrode and forming a conductive contact structure in the conductive contact opening, wherein the conductive contact structure is conductively coupled to the upper surface of the top electrode.

Resistive random access memory devices

The present disclosure generally relates to memory devices and methods of forming the same. More particularly, the present disclosure relates to resistive random-access (ReRAM) memory devices. The present disclosure provides a memory device including an opening in a dielectric structure, the opening having a sidewall, a first electrode on the sidewall of the opening, a spacer layer on the first electrode, a resistive layer on the first electrode and upon an upper surface of the spacer layer, and a second electrode on the resistive layer.

ACCESS TRANSISTOR INCLUDING A METAL OXIDE BARRIER LAYER AND METHODS FOR FORMING THE SAME

A transistor may be provided by forming, in a forward order or in a reverse order, a gate electrode, a semiconducting metal oxide liner, a gate dielectric, and an active layer over a substrate, and by forming a source electrode and a drain electrode on end portions of the active layer. The semiconducting metal oxide liner comprises a thin semiconducting metal oxide material that functions as a hydrogen barrier material.

ELECTRONIC DEVICE AND METHOD FOR FABRICATING THE SAME
20220375995 · 2022-11-24 ·

An electronic device comprising a semiconductor memory is provided. The semiconductor memory includes a substrate including a cell region and a peripheral circuit region, the cell region including a first cell region and a second cell region, the first cell region being disposed closer to the peripheral circuit region than the second cell region; second lines disposed over the first lines and extending in a second direction crossing the first direction; memory cells positioned at intersections between the first lines and the second lines in the cell region; a first insulating layer positioned between the first lines, between the second line, or both, in the first cell region; and a second insulating layer positioned between the first lines and between the second lines in the second cell region. A dielectric constant of the first insulating layer is smaller than that of the second insulating layer.

3D SEMICONDUCTOR DEVICE AND STRUCTURE WITH METAL LAYERS
20220375861 · 2022-11-24 · ·

A semiconductor device including: a first silicon layer including a first single crystal silicon and a plurality of first transistors; a first metal layer disposed over the first silicon layer; a second metal layer disposed over the first metal layer; a third metal layer disposed over the second metal layer; a second level including a plurality of second transistors, the second level disposed over the third metal layer; a fourth metal layer disposed over the second level; a fifth metal layer disposed over the fourth metal layer, a connection path from the fifth metal layer to the second metal layer, where the connection path includes a via disposed through the second level, where the via has a diameter of less than 450 nm, where the fifth metal layer includes a global power distribution grid, and where a typical thickness of the fifth metal layer is greater than a typical thickness of the second metal layer by at least 50%.

THREE-TERMINAL ELECTRO-CHEMICAL MEMORY CELL WITH VERTICAL STRUCTURE FOR NEUROMORPHIC COMPUTATION AND MEMORY CELL ARRAY INCLUDING THE SAME

Disclosed is a three-terminal electro-chemical memory cell with a vertical structure for neuromorphic computation, including a circumferential hole, first and second conductive electrode layers sequentially stacked along an outer surface of the circumferential hole, an electrolyte layer formed along an inner surface of the circumferential hole and connected to one end of each of the first and second conductive electrode layers, and a gate electrode disposed parallel to the electrolyte layer in an inner surface direction of the circumferential hole.

Method of forming semiconductor device having capped air gaps between buried bit lines and buried gate

A semiconductor device and method of forming the same, the semiconductor device includes plural bit lines, plural conductive patterns, plural conductive pads and a spacer. The bit lines are disposed on a substrate, along a first direction. The conductive patterns are disposed on the substrate, along the first direction, wherein the conductive patterns and the bit lines are alternately arranged in a second direction perpendicular to the first direction. The conductive pads are arranged in an array and disposed over the conductive patterns and the bit lines. The spacer is disposed between the bit lines and the conductive patterns, under the conductive pads, wherein the spacers includes a tri-layered structure having a first layer, a second layer and a third layer, and the second layer includes a plurality of air gaps separated arranged along the first direction.

Method for fabricating memory device

A method for fabricating memory device is provided. The method includes forming a transistor on a substrate. Further, a contact structure is formed on a source/drain region of the transistor. A conductive layer is formed on the contact structure. Four memory structures are formed on the conductive layer to form a quadrilateral structure.

Charge locking circuits and control system for qubits

Systems and methods related to charge locking circuits and a control system for qubits are provided. A system for controlling qubit gates includes a first packaged device comprising a quantum device including a plurality of qubit gates, where the quantum device is configured to operate at a cryogenic temperature. The system further includes a second packaged device comprising a control circuit configured to operate at the cryogenic temperature, where the first packaged device is coupled to the second packaged device, and where the control circuit comprises a plurality of charge locking circuits, where each of the plurality of charge locking circuits is coupled to at least one qubit gate of the plurality of qubit gates via an interconnect such that each of the plurality of charge locking circuits is configured to provide a voltage signal to at least one qubit gate.

Resistive memory device having an oxide barrier layer
11508905 · 2022-11-22 · ·

A memory device is disclosed. The memory device includes a bottom contact, and a memory layer connected to the bottom contact, where the memory layer has a variable resistance. The memory device also includes a top electrode on the memory layer, where the top electrode and the memory layer cooperatively form a heterojunction memory structure. The memory device also includes a top contact on the top electrode, and a first barrier layer, including a first oxide material and a second oxide material, where the first oxide material is different from the second oxide material, and where the first barrier layer is between one of A) the memory layer and the bottom contact, and B) the top electrode and the top contact, where the first barrier layer is configured to substantially prevent the conduction of ions or vacancies therethrough.