An organic light emitting display apparatus is disclosed that comprises a substrate including a first portion and a second portion; a first thin film transistor having a first polycrystalline semiconductor pattern, the first thin film transistor on the first portion of the substrate; a second thin film transistor having a first oxide semiconductor pattern, the second thin film transistor on the second portion of the substrate; and an organic light emitting device configured to emit light, the organic light emitting device connected to the second thin film transistor; wherein the first polycrystalline semiconductor pattern includes a surface that is planarized and the first oxide semiconductor pattern includes a surface that includes a plurality of protrusions.

An SiC semiconductor device includes an SiC semiconductor layer including an SiC monocrystal and having a first main surface as an element forming surface, a second main surface at a side opposite to the first main surface, and a plurality of side surfaces connecting the first main surface and the second main surface, and a plurality of modified lines formed one layer each at the respective side surfaces of the SiC semiconductor layer and each extending in a band shape along a tangential direction to the first main surface of the SiC semiconductor layer and modified to be of a property differing from the SiC monocrystal.

Microelectronic assemblies, related devices and methods, are disclosed herein. In some embodiments, a microelectronic assembly may include a first die having a surface; a second die having a first surface, an opposing second surface, and side surfaces between the first surface and the second surface, wherein the first surface of the second die is electrically coupled to the surface of the first die, and wherein the side surfaces of the second die are scalloped. In some embodiments, side surfaces of the second die may include a protective coating material, where the protective coating material includes an alkyl silane, a fluoroalkyl silane, a thiol, a phosphonic acid, an alkanoic acid, a siloxane, a silazane, a polyolefin, or a fluorinated polymer. In some embodiments, a microelectronic assembly may further include a dielectric material around a plurality of second dies and the dielectric material does not have an interface seam.

The present invention relates to a chamfered silicon carbide substrate which is essentially monocrystalline, and to a corresponding method of chamfering a silicon carbide substrate. A silicon carbide substrate according to the invention comprises a main surface (102), wherein an orientation of said main surface (102) is such that a normal vector ({right arrow over (O)}) of the main surface (102) includes a tilt angle with a normal vector ({right arrow over (N)}) of a basal lattice plane (106) of the substrate, and a chamfered peripheral region (110), wherein a surface of the chamfered peripheral region includes a bevel angle with said main surface, wherein said bevel angle is chosen so that, in more than 75% of the peripheral region, normal vectors ({right arrow over (F)}_i) of the chamfered peripheral region (110) differ from the normal vector of the basal lattice plane by less than a difference between the normal vector of the main surface and the normal vector of the basal lattice plane of the substrate.

The present invention relates to a chamfered silicon carbide substrate which is essentially monocrystalline, and to a corresponding method of chamfering a silicon carbide substrate. A silicon carbide substrate according to the invention comprises a main surface (102), wherein an orientation of said main surface (102) is such that a normal vector ({right arrow over (O)}) of the main surface (102) includes a tilt angle with a normal vector ({right arrow over (N)}) of a basal lattice plane (106) of the substrate, and a chamfered peripheral region (110), wherein a surface of the chamfered peripheral region includes a bevel angle with said main surface, wherein said bevel angle is chosen so that, in more than 75% of the peripheral region, normal vectors ({right arrow over (F)}_i) of the chamfered peripheral region (110) differ from the normal vector of the basal lattice plane by less than a difference between the normal vector of the main surface and the normal vector of the basal lattice plane of the substrate.

An organic light emitting display apparatus is disclosed that comprises a substrate including a first portion and a second portion; a first thin film transistor having a first polycrystalline semiconductor pattern, the first thin film transistor on the first portion of the substrate; a second thin film transistor having a first oxide semiconductor pattern, the second thin film transistor on the second portion of the substrate; and an organic light emitting device configured to emit light, the organic light emitting device connected to the second thin film transistor; wherein the first polycrystalline semiconductor pattern includes a surface that is planarized and the first oxide semiconductor pattern includes a surface that includes a plurality of protrusions.

An organic light emitting display apparatus is disclosed that comprises a substrate including a first portion and a second portion; a first thin film transistor having a first polycrystalline semiconductor pattern, the first thin film transistor on the first portion of the substrate; a second thin film transistor having a first oxide semiconductor pattern, the second thin film transistor on the second portion of the substrate; and an organic light emitting device configured to emit light, the organic light emitting device connected to the second thin film transistor; wherein the first polycrystalline semiconductor pattern includes a surface that is planarized and the first oxide semiconductor pattern includes a surface that includes a plurality of protrusions.