H01L27/11

Aluminum indium phosphide subfin germanium channel transistors

Embodiments related to transistors and integrated circuits having aluminum indium phosphide subfins and germanium channels, systems incorporating such transistors, and methods for forming them are discussed.

Cache program operation of three-dimensional memory device with static random-access memory

Embodiments of three-dimensional (3D) memory devices with a 3D NAND memory array having a plurality of pages, an on-die cache coupled to the memory array on a same chip and configured to cache a plurality of batches of program data between a host and the memory array, the on-die cache having SRAM cells, and a controller coupled to the on-die cache on the same chip. The controller is configured to check a status of an (N−2).sup.th batch of program data, N being an integer equal to or greater than 2, program an (N−1).sup.th batch of program data into respective pages in the 3D NAND memory array, and cache an N.sup.th batch of program data in respective space in the on-die cache as a backup copy of the N.sup.th batch of program data.

Shared contact structure and methods for forming the same

A butted contact structure is provided. In one embodiment, a structure includes a first transistor on a substrate, the first transistor comprising a first source or drain region, a first gate, and a first gate spacer being disposed between the first gate and the first source or drain region. The structure includes a second transistor on the substrate, the second transistor comprising a second source or drain region, a second gate, and a second gate spacer being disposed between the second gate and the second source or drain region. The structure includes a butted contact disposed above and extending from the first source or drain region to at least one of the first or second gate, a portion of the first gate spacer extending a distance into the butted contact to separate a first bottom surface of the butted contact from a second bottom surface of the butted contact.

IC including standard cells and SRAM cells

An IC is provided. The IC includes a plurality of a plurality of P-type fin field-effect transistors (FinFETs). The P-type FinFETs includes at least one first P-type FinFET and at least one second P-type FinFET. Source/drain regions of the first P-type FinFET have a first depth, and source/drain regions of the second P-type FinFET have a second depth that is different from the first depth. A first semiconductor fin of the first P-type FinFET includes a first portion and a second portion that are formed by different materials, and the second portion of the first semiconductor fin has a third depth that is greater than the first depth.

SRAM structures

Memory devices are provided. In an embodiment, a memory device includes a static random access memory (SRAM) array. The SRAM array includes a static random access memory (SRAM) array. The SRAM array includes a first subarray including a plurality of first SRAM cells and a second subarray including a plurality of second SRAM cells. Each n-type transistor in the plurality of first SRAM cells includes a first work function stack and each n-type transistor in the plurality of second SRAM cells includes a second work function stack different from the first work function stack.

STATIC RANDOM ACCESS MEMORY WITH MAGNETIC TUNNEL JUNCTION CELLS

Disclosed herein are related to a memory cell including magnetic tunneling junction (MTJ) devices. In one aspect, the memory cell includes a first layer including a first transistor and a second transistor. In one aspect, the first transistor and the second transistor are connected to each other in a cross-coupled configuration. A first drain structure of the first transistor may be electrically coupled to a first gate structure of the second transistor, and a second drain structure of the second transistor may be electrically coupled to a second gate structure of the first transistor. In one aspect, the memory cell includes a second layer including a first MTJ device electrically coupled to the first drain structure of the first transistor and a second MTJ device electrically coupled to the second drain structure of the second transistor. In one aspect, the second layer is above the first layer.

TWO-PORT SRAM CELLS WITH ASYMMETRIC M1 METALIZATION
20220328499 · 2022-10-13 ·

A semiconductor structure includes an array of two-port (TP) SRAM cells, each of which includes a write port and a read port. The write port includes two write pass gate (W_PG) transistors, two write pull-down (W_PD) transistors, and two write pull-up (W_PU) transistors. The array of TP SRAM cells includes first and second TP SRAM cells whose write ports abuts each other. Two W_PG transistors of the first and second TP SRAM cells share a common gate electrode. Source/drain electrodes of two W_PD transistors of the first and second TP SRAM cells share a common contact. The first TP SRAM cell includes a Vss conductor connected to the common contact. The second TP SRAM cell includes a write word line (W_WL) landing pad connected to the common gate electrode. The Vss conductor and the W_WL landing pad are located at a first metal layer.

SEMICONDUCTOR DEVICE STRUCTURE INCLUDING FORKSHEET TRANSISTORS AND METHODS OF FORMING THE SAME

A structure includes a first dielectric feature extending along a first direction, the first dielectric feature having a first side and a second side opposing the first side. The structure includes a first semiconductor layer disposed adjacent the first side of the first dielectric feature, the first semiconductor layer extending along a second direction perpendicular to the first direction. The structure includes a CESL in contact with the first dielectric feature and a portion of the first semiconductor layer, an ILD layer in contact with the CESL and a portion of the first semiconductor layer. The structure further includes a second dielectric feature extending along the first direction, the second dielectric feature comprising a first dielectric layer in contact with the CESL and a portion of the first semiconductor layer, and a second dielectric layer in contact with the first dielectric layer and a portion of the first semiconductor layer.

3D SEMICONDUCTOR DEVICES AND STRUCTURES WITH METAL LAYERS
20220328474 · 2022-10-13 · ·

A semiconductor device including: a first silicon layer including a first single crystal silicon and a plurality of first transistors; a first metal layer disposed over the first silicon layer; a second metal layer disposed over the first metal layer; a third metal layer disposed over the second metal layer; a second level including a plurality of second transistors, the second level disposed over the third metal layer; a fourth metal layer disposed over the second level; a fifth metal layer disposed over the fourth metal layer, where the fourth metal layer is aligned to first metal layer with a less than 40 nm alignment error; and a via disposed through the second level, where each of the second transistors includes a metal gate, and where a typical thickness of the second metal layer is greater than a typical thickness of the third metal layer by at least 50%.

SEMICONDUCTOR DEVICE AND METHOD OF FABRICATING THE SAME

A semiconductor device includes a first active pattern on a substrate, a pair of first source/drain patterns on the first active pattern and a first channel pattern between the pair of first source/drain patterns, wherein the first channel pattern includes a plurality of semiconductor patterns that are stacked and spaced apart from each other, a first gate electrode on the first channel pattern, a first gate cutting pattern that is adjacent to the first channel pattern and penetrates the first gate electrode, and a first residual pattern between the first gate cutting pattern and the first channel pattern. The first residual pattern covers an outermost sidewall of at least one semiconductor pattern of the plurality of semiconductor patterns of the first channel pattern. The first gate electrode includes, on an upper portion of the first gate electrode, a first extension that vertically overlaps the first residual pattern.