A fin field effect transistor (fin FET) is formed using a bulk silicon substrate and sufficiently guarantees a top channel length formed under a gate, by forming a recess having a predetermined depth in a fin active region and then by forming the gate in an upper part of the recess. A device isolation film is formed to define a non-active region and a fin active region in a predetermined region of the substrate. In a portion of the device isolation film a first recess is formed, and in a portion of the fin active region a second recess having a depth shallower than the first recess is formed. A gate insulation layer is formed within the second recess, and a gate is formed in an upper part of the second recess. A source/drain region is formed in the fin active region of both sides of a gate electrode.

A method for fabricating semiconductor device is disclosed. First, a substrate is provided, and a fin-shaped structure is formed on the substrate. Next, a gate structure is formed on the fin-shaped structure, and an epitaxial layer is formed adjacent to the gate structure. Preferably, the epitaxial layer includes a V-shaped profile viewing from the top. According to the preferred embodiment of the present invention, the V-shaped profile of the epitaxial layer allows more stress to be applied to the region having concentrated currents or edges of the fin-shaped structures during an on-state, and at the same time prevent exerting too much stress to the region having high currents or central region of the fin-shaped structure during an off-state.

An alternating stack of layers of a first epitaxial semiconductor material and a second epitaxial semiconductor material is formed on a substrate. A fin stack is formed by patterning the alternating stack into a shape of a fin having a parallel pair of vertical sidewalls. After formation of a disposable gate structure and an optional gate spacer, raised active regions can be formed on end portions of the fin stack. A planarization dielectric layer is formed, and the disposable gate structure is subsequently removed to form a gate cavity. A crystallographic etch is performed on the first epitaxial semiconductor material to form vertically separated pairs of an upright triangular semiconductor nanowire and an inverted triangular semiconductor nanowire. Portions of the epitaxial disposable material are subsequently removed. After an optional anneal, the gate cavity is filled with a gate dielectric and a gate electrode to form a field effect transistor.

A method of forming a SiOCN material layer, a material layer stack, a semiconductor device, a method of fabricating a semiconductor device, and a deposition apparatus, the method of forming a SiOCN material layer including providing a substrate; providing a silicon precursor onto the substrate; providing an oxygen reactant onto the substrate; providing a first carbon precursor onto the substrate; providing a second carbon precursor onto the substrate; and providing a nitrogen reactant onto the substrate, wherein the first carbon precursor and the second carbon precursor are different materials.

A semiconductor device may include a first gate electrode being formed on a substrate and having a first ratio of a width of an upper surface to a width of a lower surface, a second gate electrode being formed on the substrate and having a second ratio of the width of the upper surface to the width of the lower surface, wherein the second ratio is less than the first ratio, a first gate spacer being formed on a sidewall of the first gate electrode, a second gate spacer being formed on a sidewall of the second gate electrode and an interlayer insulating film covering the first gate spacer and the second gate spacer.

A method includes forming a fin on a semiconductor substrate. An isolation structure is formed adjacent the fin. A silicon alloy material is formed on a portion of the fin extending above the isolation structure. A thermal process is performed to define a silicon alloy fin portion from the silicon alloy material and the fin and to define a first insulating layer separating the fin from the substrate.

A semiconductor device capable of adjusting profiles of a gate electrode and a gate spacer by implanting or doping an element semiconductor material into an interlayer insulating layer may be provided. The semiconductor device may include a gate spacer on a substrate, the gate spacer defining a trench, a gate electrode filling the trench, and an interlayer insulating layer on the substrate, which surrounds the gate spacer, and at least a portion of which includes germanium.

Methods of forming a semiconductor device are provided. An active region is formed on a substrate. A temporary gate crossing the active region and a capping pattern covering the temporary gate are formed. Spacers are formed on sidewalls of the temporary gate. A growth-blocking layer is locally formed in an upper edge of the temporary gate. A source/drain region is formed on the active region adjacent to the temporary gate. The capping pattern, the first growth-blocking layer, and the temporary gate are removed to expose the active region. A gate electrode is formed on the exposed active region.

A semiconductor device includes a multi-fin active region having a plurality of sub-fins sequentially arranged on a substrate. A gate electrode crosses the multi-fin active region. Source/drain regions are disposed on the sub-fins except a first sub-fin and a last sub-fin. A contact plug is disposed on the source/drain regions.

A method for manufacturing a semiconductor device is described that comprises providing a substrate, forming a plurality of fins having a first semiconductor material, replacing a first portion of at least one of the fins with a second semiconductor material, and distributing the second semiconductor material from the first portion to a second portion of the at least one of the fins.