Provided herein may be a semiconductor memory device and a method of manufacturing the semiconductor memory device. The semiconductor memory device includes a substrate with a complementary metal oxide semiconductor (CMOS) circuit; a gate stacked body with interlayer insulating layers and conductive patterns that are alternately stacked on the substrate in a vertical direction; a plurality of channel structures passing through the gate stacked body, each with a first end that protrudes above the gate stacked body; and a plurality of conductive layers disposed over the gate stacked body. Each of the plurality of conductive layers is in contact with the first end of at least one of the plurality of channel structures.

There is provided a semiconductor memory device including: a substrate having a Complementary Metal Oxide Semiconductor (CMOS) circuit; a gate stack structure including interlayer insulating layers and conductive patterns, which are alternately stacked in a vertical direction on the substrate; a channel structure having a first part penetrating the gate stack structure and a second part extending from one end of the first part, the second part extending beyond the gate stack structure; a common source line extending to overlap with the gate stack structure, the common source line surrounding the second part of the channel structure; a memory layer disposed between the first part of the channel structure and the gate stack structure; and a bit line connected to the other end of the first part of the channel structure, the bit line being disposed between the substrate and the gate stack structure.

A semiconductor device includes a plurality of semiconductor elements, each of the plurality of semiconductor elements including an active region disposed on a substrate, and a gate structure intersecting the active region and extending in a first direction that is parallel to an upper surface of the substrate; and at least one dummy element disposed between a pair of semiconductor elements adjacent to each other in a second direction, intersecting the first direction, among the plurality of semiconductor elements. The dummy element includes a dummy active region and at least one dummy gate structure intersecting the dummy active region and extending in the first direction. A length of the dummy active region in the second direction is less than a length of the active region included in each of the pair of semiconductor elements.

A semiconductor device is disclosed, which relates to a three-dimensional (3D) semiconductor memory device. The semiconductor device includes a first connection pattern, a bit line disposed over the first connection pattern in a vertical direction, and a bit-line contact pad, disposed in a first layer between the bit line and the first connection pattern to electrically couple the bit line to the first connection pattern so that the bit-line contact pad, and formed as an island when viewed along the vertical direction.

Memory stack structures are formed through an alternating stack of insulating layers and sacrificial material layers. Backside recesses are formed by removal of the sacrificial material layers selective to the insulating layers and the memory stack structures. An electrically conductive, amorphous barrier layer can be formed prior to formation of a metal fill material layer to provide a diffusion barrier that reduces fluorine diffusion between the metal fill material layer and memory films of memory stack structures. The electrically conductive, amorphous barrier layer can be an oxygen-containing titanium compound or a ternary transition metal nitride.

Some embodiments include apparatuses and methods having multiple decks of memory cells and associated control gates. A method includes forming a first deck having alternating conductor materials and dielectric materials and a hole containing materials extending through the conductor materials and the dielectric materials. The methods can also include forming a sacrificial material in an enlarged portion of the hole and forming a second deck of memory cells over the first deck. Additional apparatuses and methods are described.

A semiconductor device may include an insulating layer, a bulk pattern, a stack structure, and a channel pattern. A first trench may be formed in the insulating layer. A bulk pattern may be located in the first trench and includes a metal pattern and an electron hole source. The stack structure may be located on the insulating layer and includes conductive layers and insulating layers, which are alternately stacked. The channel pattern may penetrate the stack structure, and may be supplied with electron holes from the bulk pattern.

A semiconductor device according to an embodiment, includes a plurality of wires, a first dielectric film, and a second dielectric film. The plurality of wires are arranged above a semiconductor substrate so as to extend in a first direction and aligned via a first cavity. The first dielectric film has a plurality of portions arranged above the plurality of wires so as to extend in a second direction substantially perpendicular to the plurality of wires and aligned along the first direction via a second cavity leading to the first cavity. The second dielectric film is formed above the first dielectric film so as to cover the second cavity.

A semiconductor device includes a first memory block and a second memory block in a cell region and a first transistor and a second transistor, respectively corresponding to the first and second memory blocks, in a pass transistor region located below the cell region, wherein each of the first and second transistors includes: a first gate electrode coupled to the first memory block and a second gate electrode coupled to the second memory block.

A 3D semiconductor device including: a first single crystal layer including a plurality of first transistors and a first metal layer, where a second metal layer is disposed atop the first metal layer; a plurality of logic gates including the first metal layer and first transistors; a plurality of second transistors disposed atop the second metal layer; a plurality of third transistors disposed atop the second transistors; a top metal layer disposed atop the third transistors; and a memory array including word-lines, where the memory array includes at least four memory mini arrays, where each of the mini arrays includes at least two rows by two columns of memory cells, where each memory cell includes one of the second transistors or one of the third transistors, and where one of the second transistors is self-aligned to one of the third transistors, being processed following a same lithography step.