A semiconductor device includes an n-type vertical field-effect transistor (FET) that includes: a first source/drain feature disposed in a substrate; a first vertical bar structure that includes a first sidewall and a second sidewall disposed over the substrate; a gate disposed along the first sidewall of the first vertical bar structure; a second vertical bar structure electrically coupled to the first vertical bar structure; and a second source/drain feature disposed over the first vertical bar structure; and a p-type FET that includes; a third source/drain feature disposed in the substrate; a third vertical bar structure that includes a third sidewall and a fourth sidewall disposed over the substrate; the gate disposed along the third sidewall of the third vertical bar structure; a fourth vertical bar structure electrically coupled to the third vertical bar structure; and a fourth source/drain feature disposed over the third vertical bar structure.

The present disclosure provides a bio-field effect transistor (BioFET) and a method of fabricating a BioFET device. The method includes forming a BioFET using one or more process steps compatible with or typical to a complementary metal-oxide-semiconductor (CMOS) process. The BioFET device may include a substrate; a gate structure disposed on a first surface of the substrate and an interface layer formed on the second surface of the substrate. The interface layer may allow for a receptor to be placed on the interface layer to detect the presence of a biomolecule or bio-entity. An amplification factor of the BioFET device may be provided by a difference in capacitances associated with the gate structure on the first surface and with the interface layer formed on the second surface.

Nanowire metal-oxide semiconductor (MOS) Field-Effect Transistors (FETs) (MOSFETs) employing a nanowire channel structure employing recessed conductive structures for conductively coupling nanowire structures are disclosed. Conductive structures are disposed between adjacent nanowire structures to conductively couple nanowire structures. Providing conductive structures in the nanowire channel structure increases the average cross-sectional area of nanowire structures, as compared to a similar nanowire channel structure not employing conductive structures, thus increasing effective channel width and drive strength for a given channel structure height. The precision of a gate material filling process is also eased, because gate material does not have to be disposed in areas between adjacent nanowire structures occupied by conductive structures. The conductive structure width can also be recessed with regard to width of nanowire structures in the nanowire channel structure to allow for a thicker metal gate to lower the gate resistance, while providing excellent electrostatic gate control of the channel.

Exemplary embodiments provide for fabricating a biaxially strained nanosheet. Aspects of the exemplary embodiments include: growing an epitaxial crystalline initial superlattice having one or more periods, each of the periods comprising at least three layers, an active material layer, a first sacrificial material layer and a second sacrificial material layer, the first and second sacrificial material layers having different material properties; in each of the one or more periods, placing each of the active material layers between the first and second sacrificial material layers, wherein lattice constants of the first and second sacrificial material layers are different than the active material layer and impose biaxial stress in the active material layer; selectively etching away all of the first sacrificial material layers thereby exposing one surface of the active material for additional processing, while the biaxial strain in the active material layers is maintained by the second sacrificial material layers; and selectively etching away all of the second sacrificial material layers thereby exposing a second surface of the active material layers for additional processing.

A double gate trench power transistor and manufacturing method thereof are provided. The double gate trench power transistor gate structure includes an epitaxial layer, a trench structure formed in the epitaxial layer, at least two gate structures, and a shielding electrode structure. The trench structure includes a deep trench portion and two shallow trench portions respectively adjacent to two opposite sides of the deep trench portion. Each of the gate structures formed in each of the shallow trench portions includes a gate insulating layer and a gate electrode. The gate insulating layer has a first dielectric layer, a second dielectric layer and a third dielectric layer. The second dielectric layer is interposed between the first and third dielectric layers. Additionally, a portion of the gate insulating layer is in contact with a shielding dielectric layer of the shielding electrode structure.

A transistor may include a source region and a drain region separately formed in a substrate, a trench defined in the substrate between the source region and the drain region, and a buried gate electrode formed. The buried gate electrode includes a high work function liner layer having a bottom portion which is positioned over a bottom of the trench and sidewall portions which are positioned on lower sidewalls of the trench; a low work function liner layer positioned on upper sidewalls of the trench, and overlapping with the source region and the drain region; and a low resistance layer contacting the high work function liner layer and the low work function liner layer, and partially filling the trench.

A method of integrating at least one passive component and at least one active power device on a same substrate includes: forming a substrate having a first resistivity value associated therewith; forming a low-resistivity region having a second resistivity value associated therewith in the substrate, the second resistivity value being lower than the first resistivity value; forming the at least one active power device in the low-resistivity region; forming an insulating layer over at least a portion of the at least one active power device; and forming the at least one passive component on an upper surface of the insulating layer above the substrate having the first resistivity value, the at least one passive component being disposed laterally relative to the at least one active power device and electrically connected with the at least one active power device.

A method comprises forming a buried layer over a substrate, forming an epitaxial layer over the buried layer, forming a first trench and a second trench in the buried layer and the epitaxial layer, wherein a width of the second trench is greater than a width of the first trench, depositing a dielectric layer in the first trench and the second trench, wherein the dielectric layer partially fills the second trench, removing the dielectric layer in the second trench and forming a first gate region in the first trench and a second gate region in the second trench.

High voltage devices and methods for forming a high voltage device are disclosed. The method includes providing a substrate having top and bottom surfaces. The substrate is defined with a device region and a recessed region disposed within the device region. The recessed region includes a recessed surface disposed lower than the top surface of the substrate. A transistor is formed over the substrate. Forming the transistor includes forming a gate at least over the recessed surface and forming a source region adjacent to a first side of the gate below the recessed surface. Forming the transistor also includes forming a drain region displaced away from a second side of the gate. First and second device wells are formed in the substrate within the device region. The first device well encompasses the drain region and the second device well encompasses the source region.

The symmetric LDMOS transistor comprises a semiconductor substrate (1), a well (2) of a first type of conductivity in the substrate, and wells (3) of an opposite second type of conductivity. The wells (3) of the second type of conductivity are arranged at a distance from one another. Source/drain regions (4) are arranged in the wells of the second type of conductivity. A gate dielectric (7) is arranged on the substrate, and a gate electrode (8) on the gate dielectric. A doped region (10) of the second type of conductivity is arranged between the wells of the second type of conductivity at a distance from the wells. The gate electrode has a gap (9) above the doped region (10), and the gate electrode overlaps regions that are located between the wells (3) of the second type of conductivity and the doped region (10).