A semiconductor device has an FET of a trench-gate structure obtained by disposing a conductive layer, which will be a gate, in a trench extended in the main surface of a semiconductor substrate, wherein the upper surface of the trench-gate conductive layer is formed equal to or higher than the main surface of the semiconductor substrate. The conductive layer of the trench gate is formed to have a substantially flat or concave upper surface and the upper surface is formed equal to or higher than the main surface of the semiconductor substrate. After etching of the semiconductor substrate to form the upper surface of the conductive layer of the trench gate, a channel region and a source region are formed by ion implantation so that the semiconductor device is free from occurrence of a source offset.

The present invention provides a laterally diffused metal-oxide-semiconductor (LDMOS) transistor and a manufacturing method thereof. The LDMOS transistor includes a semiconductor substrate, an insulation structure, agate structure, and a plurality of floating electrodes. The insulation structure is disposed in the semiconductor substrate. The gate structure is disposed on the semiconductor substrate. The floating electrodes are embedded in the insulation structure, wherein the floating electrode closest to the gate structure protrudes from a top surface of the insulation structure or the gate structure includes at least one branch portion embedded in the insulation structure, and the floating electrodes are separated from the gate structure.

An integrated semiconductor device includes a substrate of a first conductivity type, a buried layer located over the substrate, an isolated region located over a first portion of the buried layer, and an isolation trench located around the isolated region. A punch-through structure is located around at least a portion of the isolation trench. The punch-through structure includes a second portion of the buried layer, a first region located over the second portion of the buried layer, the first region having a second conductivity type, and a second region located over the first region, the second region having the first conductivity type.

A semiconductor device includes a first nitride semiconductor layer, a source electrode on the first nitride semiconductor layer, a drain electrode on the first nitride semiconductor layer, a gate electrode on the first nitride semiconductor layer and between the source electrode and the drain electrode, a gate field plate electrode that is separated from the first nitride semiconductor layer, and includes one end in direct contact with the gate electrode, and the other end positioned between the gate electrode and the drain electrode, a first interlayer insulating film that is separated from the gate electrode and is between the gate field plate electrode and the first nitride semiconductor layer, and a second interlayer insulating film that is between the gate electrode and the first interlayer insulating film and has a dielectric constant higher than a dielectric constant of the first interlayer insulating film.

A semiconductor device includes a FinFET component, a plurality of patterned dummy semiconductor fins arranged aside a plurality of fins of the FinFET component, an isolation structure formed on the patterned dummy semiconductor fins, and a tuning component formed on the patterned dummy semiconductor fins and electrically connected to the FinFET component. A height of the patterned dummy semiconductor fins is shorter than that of the fins of the FinFET component.

A manufacturing method of a semiconductor device according to an embodiment includes: forming a semiconductor portion including a transistor region and a diode region; forming a first lifetime control region in a lower portion of the semiconductor portion in the diode region, with ion irradiated from an upper side of the semiconductor portion; and forming a second lifetime control region in an upper portion of the semiconductor portion, with ion irradiated through a mask from the upper side of the semiconductor portion, the second lifetime control region being formed simultaneously with the first lifetime control region so as not to overlap with the first lifetime control region.

A Schottky diode includes a substrate with an epitaxy layer on which a cathode region and an anode region are defined. A cathode structure and an anode structure are formed in the cathode region and the anode region respectively and horizontally separated by a distance. The anode structure includes a plurality of p-type doped regions diffused from the epitaxy layer toward the substrate, with an interval is formed between adjacent two p-type doped regions. A backside metal film and a backside protection layer are sequentially formed on a back surface of the substrate. Since the manufacturing of the Schottky diode does not involve wire bonding and molding processes, the overall thickness of the Schottky diode is reduced and heat dissipation is improved. With the backside metal film on the back side of the substrate, an equivalent resistance and a forward voltage of the Schottky diode can be reduced.

According to one embodiment, the semiconductor device 1 includes a semiconductor substrate having an upper surface and a lower surface, and an emitter wiring, wherein when viewed from the upper surface side, the semiconductor substrate has an active region including a plurality of IGBTs, a termination region, and a main junction region, wherein the semiconductor substrate of the main junction region has an N type drift layer and a P type junction impurity layer, wherein the semiconductor substrate of the termination region has an N type drift layer and a P type floating layer, wherein at least the main junction region has a trench electrode provided inside the trench, and a trench insulating film provided between the trench electrode and the semiconductor substrate, and wherein the trench electrode and the P type junction impurity layer are connected to the emitter wiring.

A semiconductor device includes first and second electrodes, a semiconductor part located between the first and second electrodes, a gate electrode located between the semiconductor part and the second electrode, and a structure body extending in the semiconductor part under the gate electrode. The semiconductor part includes first to fifth layers which are stacked in this order. The first to third and fifth layers are of a first conductivity type. The fourth layer is of a second conductivity type. The gate electrode faces the fourth layer. The structure body includes an insulating film, a conductive body, an insulating layer, and a silicide layer. The silicide layer is located at a lower end of the structure body. The lower end of the structure body contacts the second layer. The second layer includes a heavy metal. The third layer has a lower concentration of the heavy metal than the second layer.

Device structures and methods for reducing current collapse in high electron mobility transistors (HEMT) using aluminum nitride back barrier and in-situ two-step passivation are disclosed. In one aspect, the HEMT includes a back barrier layer including Al and N on a substrate, a channel layer including Ga and N on the back barrier layer, an Al.sub.xGa.sub.1-xN layer on the channel layer, a first passivation layer on the Al.sub.xGa.sub.1-xN layer, source and drain ohmic contacts, a T-shaped gate electrode at a location on a surface between the drain ohmic contact and the source ohmic contact, and a second passivation layer on the first passivation layer covering the surface and the T-shaped gate electrode.