Provided is a semiconductor device having improved performance. In a semiconductor substrate located in a memory cell region, a memory cell of a nonvolatile memory is formed while, in the semiconductor substrate located in a peripheral circuit region, a MISFET is formed. At this time, over the semiconductor substrate located in the memory cell region, a control gate electrode and a memory gate electrode each for the memory cell are formed first. Then, an insulating film is formed so as to cover the control gate electrode and the memory gate electrode. Subsequently, the upper surface of the insulating film is polished to be planarized. Thereafter, a conductive film for the gate electrode of the MISFET is formed and then patterned to form a gate electrode or a dummy gate electrode for the MISFET in the peripheral circuit region.

There is provided a method of manufacturing a Fin Field Effect Transistor (FinFET). The method may include: forming a fin on a semiconductor substrate; forming a dummy device including a dummy gate on the fin; forming an interlayer dielectric layer to cover regions except for the dummy gate; removing the dummy gate to form an opening; implanting ions to form a Punch-Through-Stop Layer (PTSL) in a portion of the fin directly under the opening, while forming reflection doped layers in portions of the fin on inner sides of source/drain regions; and forming a replacement gate in the opening.

A semiconductor device includes a semiconductor substrate having a fin-type field effect transistor (finFET) on a first region and a fin varactor on a second region. The finFET includes a first semiconductor fin that extends from an upper finFET surface thereof to the upper surface of the first region to define a first total fin height. The fin varactor includes a second semiconductor fin that extends from an upper varactor surface thereof to the upper surface of the second region to define a second total fin height that is different from the first total fin height of the finFET.

A semiconductor device includes a semiconductor substrate having a fin-type field effect transistor (finFET) on a first region and a fin varactor on a second region. The finFET includes a first semiconductor fin that extends from an upper finFET surface thereof to the upper surface of the first region to define a first total fin height. The fin varactor includes a second semiconductor fin that extends from an upper varactor surface thereof to the upper surface of the second region to define a second total fin height that is different from the first total fin height of the finFET.

A method for manufacturing a semiconductor device includes providing a substrate, forming an amorphous layer in the substrate, performing a first etching process on the substrate using the amorphous layer as an etch stop layer to form a plurality of first fins, performing a channel stop ion implantation process into the amorphous layer to form an impurity region, and performing an annealing process to activate implanted dopants in the impurity region, wherein the amorphous layer disappears during the annealing process. The method also includes performing a second etching process on a region of the substrate disposed between the first fins to form second fins from the first fins, and forming an isolation region between adjacent second fins by filling at least a portion of an air gap between the second fins with an insulating material. The method prevents dopants of the channel stop implant from diffusing into the channel.

A semiconductor device is provided that includes a pedestal of an insulating material present over at least one layer of a semiconductor material, and at least one fin structure in contact with the pedestal of the insulating material. Source and drain region structures are present on opposing sides of the at least one fin structure. At least one of the source and drain region structures includes at least two epitaxial material layers. A first epitaxial material layer is in contact with the at least one layer of semiconductor material. A second epitaxial material layer is in contact with the at least one fin structure. The first epitaxial material layer is separated from the at least one fin structure by the second epitaxial material layer. A gate structure present on the at least one fin structure.

A method includes forming fin semiconductor features on a substrate. A dopant-containing dielectric material layer is formed on sidewalls of the fin semiconductor features and the substrate. A precise material modification (PMM) process is performed to the dopant-containing dielectric material layer. The PMM process includes forming a first dielectric material layer over the dopant-containing dielectric material layer; performing a tilted ion implantation to the first dielectric material layer so that a top portion of the first dielectric material layer is doped to have a modified etch characteristic different from an etch characteristic of a bottom portion of the first dielectric material layer; and performing an etch process to selectively remove the top portion of the first dielectric material layer and the top portion of the dopant-containing dielectric material layer.

A semiconductor structure includes first, second, and third transistor elements each having a first screening region concurrently formed therein. A second screening region is formed in the second and third transistor elements such that there is at least one characteristic of the screening region in the second transistor element that is different than the second screening region in the third transistor element. Different characteristics include doping concentration and depth of implant. In addition, a different characteristic may be achieved by concurrently implanting the second screening region in the second and third transistor element followed by implanting an additional dopant into the second screening region of the third transistor element

A semiconductor device includes a semiconductor substrate, a first semiconductor fin, a second semiconductor fin, an air gap and a dielectric cap layer. The first semiconductor fin is disposed on the semiconductor substrate, and the second semiconductor fin is disposed on the semiconductor substrate. The air gap is located between the first semiconductor fin and the second semiconductor fin, and the dielectric cap layer caps a top of the air gap.

Integrated circuits including multiple gate devices with dual threshold voltages and methods for fabricating such integrated circuits are provided. An exemplary method for fabricating an integrated device includes providing a semiconductor fin structure overlying a semiconductor substrate. The semiconductor fin structure has a first sidewall, a second sidewall opposite the first sidewall, and an upper surface. The method includes forming a first gate along the first sidewall of the semiconductor fin structure with a first threshold voltage. Further, the method includes forming a second gate along the second sidewall of the semiconductor fin structure with a second threshold voltage different from the first threshold voltage.