A memory array includes a plurality of memory pages, each memory page includes a plurality of memory bytes, each memory byte includes a plurality of memory cells, and each memory cell includes a floating gate module, a control element, and an erase element. Memory bytes of the same column are coupled to the same erase line, and memory bytes of different columns are coupled to different erase lines. Therefore, the memory array is able to support byte operations while the memory cells of the same memory byte can share the same wells. The circuit area of the memory array can be reduced and the operation of the memory array can be more flexible.

In a semiconductor substrate, a memory cell region in which a flash memory cell is formed is defined by an element isolation region. A floating gate electrode of the flash memory cell includes a protruding portion protruding toward an erase gate electrode so as to flare from a portion located immediately below a control gate electrode. Protruding portion includes an end face of a height corresponding to a thickness, and an inclined surface continuous with end face. Protruding portion faces erase gate electrode with a tunnel oxide film interposed therebetween.

Provided is a pulse operating method for an FET-type sensor having a horizontal floating electrode. The pulse operating method for an FET-type sensor includes a reading preparation step of applying one or more pre-bias voltage pulses (V.sub.pre) to the control electrode and a reading step of applying one or more read-bias voltage pulses (V.sub.rCG) to the control electrode and applying a voltage pulse (V.sub.rDs) synchronized with the read-bias voltage pulse between a drain and a source. The reactivity and the recovery time can be improved according to the width or the magnitude of the pre-bias voltage pulse applied to the input terminal of the control electrode, and the oxidizing gas and the reducing gas can be distinguished. In addition, since current flows to the FET-type sensor only in the read-biasing period, power consumption can be greatly reduced.

A semiconductor device with split gate flash memory cell structure includes a substrate having a first area and a second area, at least a first cell formed in the first area and at least a second cell formed in the second area. The first cell includes a first dielectric layer formed on the substrate, a floating gate (FG), a word line and an erase gate (EG) formed on the first dielectric layer, an interlayer dielectric (ILD) layer, an inter-gate dielectric layer and a control gate (CG). The FG is positioned between the word line and the EG, and the ILD layer is formed on the word line and the EG, wherein the ILD layer has a trench exposing the FG. The inter-gate dielectric layer is formed in the trench as a liner, and the CG formed in the trench is surrounded by the inter-gate dielectric layer.

According to one embodiment, a non-volatile memory device includes electrodes, an interlayer insulating film, at least one semiconductor layer, conductive layers, first and second insulating films. The electrodes are arranged in a first direction. The interlayer insulating film is provided between the electrodes.

The semiconductor layer extends in the first direction in the electrodes and the interlayer insulating film. The conductive layers are provided between each of the electrodes and the semiconductor layer, and separated from each other in the first direction. The first insulating film is provided between the conductive layers and the semiconductor layer. The second insulating film is provided between each of the electrodes and the conductive layers, and extends between each of the electrodes and the interlayer insulating film adjacent to the each of the electrodes. A width of the conductive layers in the first direction is narrower than that of the second insulating film.

In a memory unit, voltages required for operations of a capacity transistor in a first well and a writing transistor in a second well are separately applied to a first deep well and a second deep well, without the voltages on the first deep well and the second deep well being restricted by each other. Thus, in the memory unit, each of a voltage difference between the first deep well and the first well and a voltage difference between the second deep well and the second well is made smaller than a voltage difference (18 [V]), at which a tunneling effect occurs, and accordingly a junction voltage between the first deep well and the first well and a junction voltage between the second deep well and the second well are low.

Provided is a split-gate embedded flash memory cell and method for forming the same. The flash memory cell includes split-gate transistors in which the control gate is aligned with respect to the floating gate without the use of a photolithographic patterning operation to pattern the material from which the control gates are formed. An anisotropic blanket etching operation is used to form the floating gates of the split-gate floating gate transistors alongside sidewalls of a sacrificial layer. Local oxidation of silicon (LOCOS) methods are not needed to form the inter-gate dielectric and therefore high integrity is maintained for the floating transistor gates. The floating transistor gates are formed of charge storage material such as silicon nitride, Si.sub.3N.sub.4 in some embodiments.

A flash memory cell structure includes a semiconductor substrate, a pad dielectric layer, a floating gate, a control gate, and a blocking layer. The pad dielectric layer is disposed on the semiconductor substrate. The floating gate is disposed over the pad dielectric layer, in which the floating gate has a top surface opposite to the pad dielectric layer, and the top surface includes at least one recess formed thereon. The control gate is disposed over the top surface of the floating gate. The blocking layer is disposed between the floating gate and the control gate.

An insulating film made of the same material as that of a gate insulating film is formed so as to cover one sidewall of a control gate on a conducting film for floating gate. By selectively removing the conducting film for floating gate with the insulating film as a mask, a floating gate is formed from the conducting film for floating gate, and a portion of the gate insulating film is exposed at the floating gate. A nitrogen introduced portion is formed by introducing nitrogen into the exposed portion of the gate insulating film. Then, the insulating film is removed to expose an upper surface of a lateral protrusion of the floating gate. An erase gate is formed so as to face the upper surface and a side surface of the lateral protrusion.

A memory cell includes a program select transistor, a program element, a read select transistor, a read element, and an erase element. The program select transistor is coupled to a program source line, a program select line, and a program control line. The program element is coupled to the second terminal of the program select transistor, a program bit line, and the program control line. The read select transistor is coupled to a read source line, a read select line, and a bias control line. The read element is coupled to the second terminal of the read select transistor, a read bit line, and the bias control line. The erase element is coupled to an erase control line. A floating gate is coupled to the erase element, the program element and the read element.